Industrial Grade Real DeepUV DPSSLasers for New and

Industrial Grade Real Deep-UV DPSS-Lasers for New and Improved Applications Thorsten Bauer

Content Company overview Requests on lasers for applications What we have 1342 nm laser transition of Nd: YVO 4 Real deep UV laser Single longitudinal mode laser Harmonic generators Conclusion

Basic information Xiton Photonics Gmb. H Foundation 2004 Spin-off “Technische Universität Kaiserslautern” Located in Kaiserslautern, Germany, 80 km south-west FRA Privately owned Personnel: 12 Products: DPSS lasers, nonlinear conversion

Organization Inside Xiton Development Fabrication mechanical parts Construction Assembly Test Service Administration Outside Xiton Fabrication optics and electronic boards

What is available Nd-doped lasers, bulk and fiber, diode pumped J High efficiency, Q-switched high peak power J Robust J Very good beam profile, M 2 ~ 1. 1 J Lifetime > 20, 000 h L Few wavelengths: 1. 064 µm, harmonics 532 nm, 355 nm, 266 nm

What we have Nd 3+ - ion: 4 F 3/2 ® 4 F 11/2: 1064 nm More harmonics: 1064 nm ® 213 nm Nonlinear conversion Wavelength of choice: PPLN OPG Wavelength availability to 0. 6 – 4. 5µm

What we have Nd 3+ - ion 4 F 3/2 ® 4 F 13/2: 1342 nm Nd: YVO 4 L Low gain L Bad Quantum efficiency L Prohibit 1064 radiation 671 nm, 447 nm, 224 nm

IDOL-C-Series Fundamental 1342 nm High PRR SHG/THG wavelengths: → 671 / 447 nm Both available with perfect beam profile

IDOL-C 1. 34 -Q model IDOL 1. 34 -Q wavelength 1342 nm average power 4. 5 W pulse duration 11 ns energy per pulse 450 µJ repetition rate 1 – 100 k. Hz M² < 1. 2

IDOL-C-T model IDOL 1. 34 -Q-T wavelength 447 nm average power 1. 5 W pulse duration 10 ns Color filter repair FPD energy per pulse 150 µJ Color laser marking repetition rate 1 – 50 k. Hz M² < 1. 3

IDOL-C market TFT market for 671 and 447 nm Still most important for Xiton Need to address existing market Change to OLED New applications necessary Fundamental 1342 nm: new chances New market for example CIS and material processing for different layers Stealth laser dicing

New IXI 1342 Compact air-cooled 1342 nm laser Customer demand Constant pulse duration and energy per pulse Resistor trimming

IMPRESS 224 model Extremely short UV Excellent beam profile IMPRESS 224 wavelength 224 nm average power 300 m. W pulse duration < 9 ns energy per pulse repetition rate > 30 µJ 0. 1 -30 k. Hz Every process below 250 nm Direct scribing M 2 < 1. 6

IMPRESS 213 model Extremely short UV Excellent beam profile IMPRESS 213 wavelength 213 nm average power 150 m. W pulse duration < 7 ns energy per pulse repetition rate > 15 µJ 0. 1 -30 k. Hz Every process below 250 nm Direct scribing M 2 < 1. 6

Xiton IMPRESS 213

Beam profile

New results Exposure time nearly the same 95 % transmission loss (81 % Kr. F) No saturation in the inscription curves Optics are optimized for 248 nm esp. phase mask Strong FBGs inscribed in nonhydrogenated SMF 28 fibers

FBG with IMPRESS ns laser High photosensitivity discovered with ns at 213 nm and 224 nm for the first time Hydrogen free writing possible in SMF 28 fiber for the first time with turn key, high wall-plug efficiency 213 nm and 224 nm laser Strong gratings in SMF 28, 5 mm, 40 db reflectivity For higher quality, especially long gratings, longer coherence length is necessary!

The Best of Both Worlds Q-switched-laser (standard) cw-laser J High efficiency, Q-switched high peak power J Long coherence length J Continuous emission J Robust L Bad beam profile in UV J Very good beam profile, M 2 ~ 1. 1 L Massive lifetime issue in UV J Lifetime > 20, 000 h L Vibration sensitive L Short coherence length L Bad pulse to pulse stability cw-injection-seeded Q-switched DPSS laser with high repetition rate

SLM-Series High repetition rate single frequency 1064 nm laser Injection seeding with cw-fiberlaser 1 to 30 k. Hz PRR Line-width < 80 MHz All harmonics available Optimal pump source for SOPG

SLM pulseshape „normal“ multimode laser with modebeating SLM laser without modebeating

Spectral Characterization 30 MHz 30 GHz 1000 times narrower spectrum 1000 times longer coherence length

SLM-Series Model SLM-1064 SLM-532 SLM-355 SLM-266 SLM-213 wavelength 1064 nm 532 nm 355 nm 266 nm 213 nm spectral bandwidth < 30 MHz < 60 MHz < 80 MHz average power > 8. 0 W > 4. 0 W > 2. 0 W > 500 m. W > 100 m. W pulse duration < 12 ns < 10 ns < 8 ns energy per pulse 800 µJ 400 µJ 200 µJ 50 µJ 10 µJ 8 -15 k. Hz 8 – 15 k. Hz < 1. 2 < 1. 3 < 1. 8 < 1. 6 s < 0. 3 % s < 1. 0 % s < 2. 5 % reptition rate M² pulse-topulse stab.

SLM-Series 1064 nm applications Perfect source for OPO “Optics Express Vol. 17, No. 8. p. 6623 (2009)” High PRR alternative to GCR 532 nm applications Filtered Rayleigh scattering LIDAR Vibrational Raman spectroscopy 355 nm application Lithography

Demand for 193 nm SLM laser XUV lasers still have problems (13. 5 nm) 193 nm Ar. F-Laser lithography is state-of-the-art semiconductor production process High demand for reliable table-top SLM source at 193 nm

Concept IXION 193 -SLM 5 HG 213 nm 1064 nm SLM Laser 193 nm 2055 nm SLM OPO

IXION 193 -SLM

IXION 193 -SLM Model Wavelength IXION 193 -SLM 193. 368 nm (190 -194 nm) Average Power 10 m. W Pulse Duration Typ. 8 -12 ns Energy per Pulse 1. 6 µJ Repetition Rate 6 k. Hz Beam Quality M² < 1. 6 Spectral Bandwidth < 100 MHz ↔ 0. 012 pm ↔ 0. 003 cm-1 Spectral Tunability > 80 GHz ↔ 10 pm ↔ 2. 6 cm-1 Coherence Length >2 m

Wavelength stability improved by a factor of 5

Output power stability

Temporal pulse shape =1. 5%

Beam Profile Mx 2 = 1. 36 My 2 = 1. 42

Wavelength Tuning

Spectral Bandwidth measured with Michelson-Interferometer With Fouriertransformation the visibility gives the spectral bandwidth 1. 5 m ↔ 100 MHz

Spectral Bandwidth measured with SFPI

Spectral Bandwidth measured ELIAS III (LTB) FWHM = 0. 022 pm E 95% = 0. 111 pm

Lab. View based GUI

Applications for IXION 193 SLM Applications Spectrometer calibration Quality control of optics and masks at 193 nm Bandwidth control for Ar. F-Lasers to shrink structure size

New EXCITE-Series Longer coherence length Smaller footprint Lower power consumption Low TCO Excellent beam quality

EXCITE-Series Model EXCITE-1064 EXCITE-532 EXCITE-355 EXCITE-266 wavelength 1064 nm 532 nm 355 nm 266 nm spectral bandwidth < 20 MHz < 25 MHz < 30 MHz > 7 m > 6 m >5 m >4 m average power > 5. 0 W > 2. 0 W > 500 m. W > 150 m. W pulse duration < 25 ns < 18 ns < 16 ns < 12 ns energy per pulse > 400 µJ > 150 µJ > 40 µJ > 12. 5 µJ reptition rate 1 -30 k. Hz < 1. 1 < 1. 2 < 1. 6 < 1. 7 s < 0. 3 % s < 0. 5 % s < 1. 0 % s < 1. 5 % coherence length M² pulse-to-pulse stab.

EXCITE-Series beam-profile Single pass 1064 nm nm 532 nm frequency conversion Field replaceable crystals Easy to use x-y stage 355 nm 266 nm

Reference Customers Fh. G Freiburg, Germany Single frequency Q-switch laser (1064 nm) Max Planck Institut für Kernphysik, Heidelberg Cw single-frequency OPO (1178 nm), Dl < 5 MHz Trumpf, Ditzingen, Germany Flexible harmonic conversion unit for Tru. Micro ps-lasers Machine controlled output: IR, VIS or UV

XHB for True. Micro 50 series new: available for Femto Edition

XHB-M Harmonic Boxes on demand 40 % SHG 20 % THG Customized design

Conclusion Full set of wavelengths Reliable 24/7 operation High energy efficiency Special variable wavelengths available SLM models Long coherence length Adapted wavelengths allow new applications: 671 nm, 447 nm: CLM, FPD repair 213 nm, 224 nm: LDT, FBG writing