SEMICON West 2006 STEP Methods to MeasureImprove Equipment

SEMICON West 2006 STEP Methods to Measure/Improve Equipment Productivity/Performance Specifications Overview Dr. Vallabh H. Dhudshia Q&R Consultant Standards Technology Group v-dhudshia@msn. com July 12, 2006 SEMICON West 2006 STEP 1

NA Metrics Committee Charter To explore, evaluate, discuss, and formulate consensus-based standard measurement methods, specifications, guidelines, and practices that, through voluntary compliance, will promote mutual understanding and improved communication between users and suppliers of manufacturing equipment and materials to enhance the manufacturing capability of the semiconductor and related industries. Its scope includes liaison with other technical committees for the development of metrics-related standards. Its scope is limited to exploring and developing standards and associated training that pertain to common criteria, guidelines, methods, or approaches to be used as the basis for comparative performance measurements of equipment, materials, components, or manufacturing operations. July 12, 2006 SEMICON West 2006 STEP 2

Metrics Committee Specifications / Standards SEMI E 10 SEMI E 79 SEMI E 35 SEMI E 58 (co-owned with I&C Committee) SEMI E 116 (co-owned with I&C Committee) SEMI E 124 July 12, 2006 SEMICON West 2006 STEP 3

To Understand SEMI Standards Need to Understand (RAMP): Reliability Availability Maintainability Productivity July 12, 2006 SEMICON West 2006 STEP 4

What is Reliability? Ø One of the important equipment characteristics Ø Longevity measure of failure-free operation interval Ø Probability of performing intended functions for a specified time under the stated operational conditions July 12, 2006 SEMICON West 2006 STEP 5

Categories of Reliability Metrics Reliability metrics can be divided into four main categories: 1. Metrics based on probabilities 2. Metrics based on mean life Commonly used in the SC manufacturing industry 3. Metrics normalized by life units 4. Metrics expressed in percentages July 12, 2006 SEMICON West 2006 STEP 6

What is Maintainability? § Maintainability deals with the time it takes to restore the equipment operations after it stops performing its intended functions. § Maintainability is the probability that the equipment will be restored to a specific operational condition (able to perform its intended functions) within a specified period of time, when the maintenance is performed by personnel having specified skill levels and using prescribed procedures, resources, and tools. § Maintenance can be either unscheduled or scheduled. § The most commonly used maintainability metric is Mean Time to Repair (MTTR). Notes: According to SEMI E 10, Repair Time is sum of downtimes for diagnosis, corrective action, equipment test, and verification runs. July 12, 2006 SEMICON West 2006 STEP 7

What is Availability? Availability is a joint measure of reliability and maintainability. It is defined as the probability that the equipment will be in a condition to perform its intended functions when required. July 12, 2006 SEMICON West 2006 STEP 8

Availability v Availability = Uptime / (Uptime + Downtime) Where Downtime includes Unscheduled and Scheduled (Preventive Maintenance) downtimes v One of the most widely used parameters of the availability is % Uptime, which is defined as % Uptime = Availability x 100 v Three variations in the availability calculations are defined in SEMI E 10. July 12, 2006 SEMICON West 2006 STEP 9

What is Productivity? Productivity as implied in SEMI E 79: Good units Production Rate in relation to theoretical (available) capacity Widely Used Metric: Overall Equipment Efficiency (OEE) July 12, 2006 SEMICON West 2006 STEP 10

Hierarchy of Equipment Performance Metrics Ref: “Hi-Tech Equipment Reliability” by Dr. Vallabh H. Dhudshia July 12, 2006 SEMICON West 2006 STEP 11

July 12, 2006 SEMICON West 2006 STEP 12

What is SEMI E 10? Ø SEMI E 10 is a Semiconductor Equipment & Materials International (SEMI) Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM). Ø Developed by a task force under the SEMI Metrics Committee. Ø First issued in 1986, and revised in 1990, 1992, 1996, 1999, 2001 and 2004 (SEMI E 10 -0304 E). July 12, 2006 SEMICON West 2006 STEP 13

SEMI E 10: Underlying Assumptions & Scope Underlying Assumptions: 1. Repairable System 2. Interval between two successive failures follows Exponential Distribution Scope: 1. Non-Cluster tool (entire equipment or subsystem level) 2. Single Path Cluster tool 3. Multi-Path Cluster tool at subsystem level July 12, 2006 SEMICON West 2006 STEP 14

Key Definitions of SEMI E 10 Failure: Any unscheduled downtime event that changes the equipment to a condition where it cannot perform its intended function. Any part failure, software or process recipe problem, facility or utility supply malfunction, or human error could cause the failure. Equipment-Related Failure: Any unplanned event that changes the equipment to a condition where it cannot perform its intended function solely caused by the equipment. July 12, 2006 SEMICON West 2006 STEP 15

SEMI E 10 Breakdown of Time July 12, 2006 SEMICON West 2006 STEP 16

SEMI E 10 Reliability Metrics PT MTBFP = E-MTBFp = N NE MCBF = Total Equipment Cycles E-MCBF = N NE E-MCBF = Mean Cycles Between Equipment-Related Failures E-MTBFP = Mean Productive Time Between Equipment-Related Failures MCBF = Mean Cycles Between Failures MTBFP = Mean Productive Time Between Failures N = Number of Total Failures NE = Number of Total Equipment-Related Failures PT = Productive Time July 12, 2006 SEMICON West 2006 STEP 17

SEMI E 10 Maintainability Metrics Total Repair Time MTTR = N Total Repair Time Includes: • Diagnosis Time • Corrective Action Time • Equipment Test and Verification Time Repair Time does not include maintenance delays. July 12, 2006 SEMICON West 2006 STEP 18

SEMI E 10 Availability Metrics Equipment-Dependent Uptime % = Uptime x 100 (Uptime + Equipment Caused Downtime) Supplier-Dependent Uptime % = Uptime x 100 (Uptime + Equipment and Supplier Caused Downtime) Uptime Operational Uptime % = x 100 Operations Time July 12, 2006 SEMICON West 2006 STEP 19

SEMI E 10 Utilization Metrics Productive Time Operational Utilization % = x 100 Operations Time Productive Time Total Utilization % = x 100 Total Time July 12, 2006 SEMICON West 2006 STEP 20

Other SEMI E 10 Metrics • Multi-path Cluster tool RAM metrics • Confidence limits for reliability metrics • Rate of reliability growth/degradation July 12, 2006 SEMICON West 2006 STEP 21

July 12, 2006 SEMICON West 2006 STEP 22

What is SEMI E 79? Ø SEMI E 79 is a SEMI Specification for Definition and Measurement of Equipment Productivity. Ø Developed by a task force under the SEMI Metrics Committee. Ø First issued in 1999, and revised in 2000 and 2004 (SEMI E 79 -0304). Ø Changed Effectiveness to Efficiency in 2000 revision. July 12, 2006 SEMICON West 2006 STEP 23

SEMI E 79: Underlying Assumptions & Scope Underlying Assumptions: 1. Repairable System 2. Using SEMI E 10 RAM terms and definitions 3. Equipment of the same design have the same theoretical production time per unit 4. Subjectivity in Determining Theoretical Production Time (THT) Scope: 1. 2. 3. 4. July 12, 2006 Non-Cluster tool Module Level Fixed Sequence (Single Path) Cluster tool Flexible-Sequence (Multi-Path) Cluster tool SEMICON West 2006 STEP 24

Mapping with SEMI E 10 States July 12, 2006 SEMICON West 2006 STEP 25

SEMI E 79 OEE Metrics Individual Process Modules or Fixed-Sequence Cluster Tools Overall Equipment Efficiency (OEE) = (Theoretical Production Time for Effective Units) / (Total Time) = (Availability Efficiency) x (Performance Efficiency) x (Quality Efficiency) The fraction of total time that equipment is producing effective units at theoretically efficient rates. Availability Efficiency = (Equipment Uptime) / (Total Time) The fraction of total time that the equipment is in a condition to perform its intended function. July 12, 2006 SEMICON West 2006 STEP 26

SEMI E 79 OEE Metrics Individual Process Modules or Fixed-Sequence Cluster Tools Performance Efficiency = (Operational Efficiency) x (Rate Efficiency) The fraction of equipment uptime that the equipment is processing actual units at theoretically efficient rates. Operational Efficiency = (Production Time) / (Equipment Uptime) The fraction of equipment uptime that the equipment is processing actual units. Rate Efficiency = (Theoretical Production Time for Actual Units) / (Production Time) The fraction of production time that equipment is processing actual units at theoretically efficient rates. Quality Efficiency = (Theoretical Production Time for Effective Units) / (Theoretical Production Time for Actual Units July 12, 2006 SEMICON West 2006 STEP 27

Other SEMI E 79 Metrics • Multi-Path (Flexible Sequence) Cluster tool OEE • Reference OEE (R-OEE) • Engineering OEE (E-OEE) • Value-Added In-Process OEE (VA-OEE) • Production Equipment Efficiency (PEE) • Demand Equipment Efficiency (DEE) • Intrinsic Equipment Efficiency (IEE) July 12, 2006 SEMICON West 2006 STEP 28

July 12, 2006 SEMICON West 2006 STEP 29

What is SEMI E 35? Ø SEMI E 35 is a SEMI Guide to Calculate Cost Of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment. Ø Developed by a task force under the SEMI Metrics Committee. Ø First issued in 1995 and last revised in 2005 (SEMI E 35 -0305). July 12, 2006 SEMICON West 2006 STEP 30

What is COO? The Cost of Ownership (COO) is the full cost of embedding, operating, and decommissioning a manufacturing equipment in a factory environment that accommodates the required production volume. July 12, 2006 SEMICON West 2006 STEP 31

Simple and Basic COO Equation COO per good unit = (Fc + Rc + Yc) (L x TP x Y x U) Where: Fc = Fixed costs Rc = Recurring costs Yc = Yield loss costs L = Life of equipment TP = Throughput Y = Composite yield U = Utilization July 12, 2006 SEMICON West 2006 STEP 32

Examples of COO Elements Fixed Costs: Ø The fixed costs include amortized portion of purchase price, taxes and duties, transportation costs, installation cost, start-up cost, training cost, and decommission cost. Recurring Costs: Ø The recurring costs for a piece of equipment are costs for consumables and materials, maintenance, parts, waste disposal, and operators. Yield Loss Costs: Ø The yield loss costs are those costs associated with lost production units that are directly attributable to equipment performance. July 12, 2006 SEMICON West 2006 STEP 33

COO Dependencies § Equipment Acquisition Cost § Equipment Utilization § Equipment reliability § Other downtimes § Recurring Cost § Regular operations § Maintenance § Cost of consumables and waste disposal § Production Throughput Rate § Yield Loss (Scrap) Cost § Product yield July 12, 2006 SEMICON West 2006 STEP 34

July 12, 2006 SEMICON West 2006 STEP 35

What is SEMI E 124? Ø SEMI E 124 SEMI Provisional Guide for Definition and Calculation of Overall Factory Efficiency (OFE) and Other Associated Factory-Level Productivity Metrics. Ø Developed by a task force under the SEMI Metrics Committee. Ø First issued in July 2003, last revised in November 2003 (SEMI E 124 -1103). July 12, 2006 SEMICON West 2006 STEP 36

What is OFE? Overall Factory Efficiency (OFE) shows how well a factory is operating compared to how well it could be operating for the given product mix. OFE = volume efficiency x yield efficiency Volume Efficiency is a measure of the total efficiency of the process with respect to the factory dynamics. Yield Efficiency is a measure of overall material efficiency. July 12, 2006 SEMICON West 2006 STEP 37

Definition Tree for Factory-Level Productivity Metrics July 12, 2006 SEMICON West 2006 STEP 38

Why SEMI Standards? Provides company-wide and industry-wide common language for terms, definitions, and calculations of SC Manufacturing Equipment performance/productivity metrics. Provides a common framework for clear and accurate communications between IC Makers and their equipment suppliers. Provides a standard for the design of automated RAM data collection system and Equipment Performance Tracking (E 58 and E 116). Provides structure and hierarchy to equipment performance/productivity metrics. Equipment Purchase Specifications may require that equipment performance/productivity measurements are based on SEMI Standards. Equipment Evaluation Programs (EEP) and Joint Development Programs (JDP) may use SEMI Standards metrics. July 12, 2006 SEMICON West 2006 STEP 39