SEMICON West 2006 STEP Methods to MeasureImprove Equipment

SEMICON West 2006 STEP Methods to Measure/Improve Equipment Productivity Revision Plans for SEMI E 10 / E 35 / E 58 / E 79 / E 116 / E 124 David L. Bouldin Texas Instruments Incorporated d-bouldin@ti. com Jan 1, 2006 Event, Venue information

Revision Plans for SEMI E 10 -0304 E Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) Ø E 10 Revision Task Force (TF) working on revision to: • Convert the multi-path cluster tool RAM metrics into official E 10 metrics vs. supplementary ones. • Harmonize terminology between E 10 and E 79. Ø Plan to Yellow Ballot during Spring 2007 cycle. July 12, 2006 SEMICON West 2006 STEP 2

Revision Plans for SEMI E 35 -0305 Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment Ø Equipment COO TF working on revision to: • Add new content on how to handle calculating COO for measurement, inspection, and test equipment. • Add more inputs/guidance related to environmental, health, and safety (EHS) cost elements. Ø Plan to Yellow Ballot during Fall 2006 cycle. July 12, 2006 SEMICON West 2006 STEP 3

Revision Plans for SEMI E 58 -0703 Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services and SEMI E 58. 1 -0697 (Reapproved 0703) SECS-II Protocol for Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services Ø No active TF currently working on revision. Ø Due for mandatory 5 -year review in 2008. July 12, 2006 SEMICON West 2006 STEP 4

Revision Plans for SEMI E 79 -0304 Specification for Definition and Measurement of Equipment Productivity Ø Equipment Productivity Metrics TF revising to: • Redefine “virtual machines” with reference to fundamental quantities: theoretical production time, equipment uptime, and total time, but without changing calculation results. • Harmonize terminology between E 10 and E 79. • Make significant editorial changes for clarity and consistency. Ø Yellow Balloted during SEMICON 2006 cycle. July 12, 2006 SEMICON West 2006 STEP 5

Revision Plans for SEMI E 116 -0706 Provisional Specification for Equipment Performance Tracking and SEMI E 116. 1 -0706 Specification for SECS-II Protocol for Equipment Performance Tracking Ø TF completed original standards in 2002 and 2003. Ø TF completed latest revisions in early 2006 and discharged. Ø Due for mandatory 5 -year review in 2011. July 12, 2006 SEMICON West 2006 STEP 6

Revision Plans for SEMI E 124 -1103 Provisional Guide for Definition and Calculation of Overall Factory Efficiency (OFE) and Other Associated Factory. Level Productivity Metrics Ø No active TF currently working on revision, but plan to reactivate Factory Productivity Metrics TF to: • Remove Provisional status. • Harmonize terminology with E 10 and E 79. Ø Due for mandatory 5 -year review in 2008. July 12, 2006 SEMICON West 2006 STEP 7

SEMI NA Metrics Technical Committee NA METRICS COMMITTEE (SC 129) C: David Bouldin – TI C: Tom Pomorski – Brooks Automation C: TBD TE: Carolyn Busing – Self TA: TBD SE: Susan Turner – SEMI Equipment COO TF L: Daren Dance – WWK L: David Bouldin – TI E 35 Measurement Systems Analysis TF L: TBD Equipment Documentation TF L: David Bouldin – TI L: Kevin Lanham – TEL July 12, 2006 Metrics Education/Adoption SC E 10 Revision TF L: Tom Pomorski – Brooks Automation L: Sal Di. Iorio – Semi-Tech L: Lisa Pivin – Intel Group L: Michael Werre – Intel STEPs E 10 Equipment Productivity Metrics TF Factory Level Prod. Metrics TF (Inactive) L: Tom Pomorski – Brooks Automation L: Ron Billings – FABQ/ Ga. Tech. L: Jim Irwin – Irwin Consulting C L TF SE TA TE SC VC Legend Chair/Co-Chair Leader Task Force Standards Engineer Technical Architect Technical Editor Subcommittee Vice Chair ESD/ESC TF L: Arnold Steinman – Ion Systems EMC TF L: Vladimir Kratz – Credence L: Mark Frankfurth – Cymer E 79 E 124 Film Mechanical Testing TF RF Diagnostics TF International Environmental Contamination Control TF L: John Pace – Si Automation L: John Caughman – ORNL L: Jeff Lexa – Bird L: Jürgen Frickinger– Fraunhofer. IISB L: Mikio Furukawa – Shin-Etsu Polymer L: Rob Henderson – Yield Service Int’l L: Andrew Mc. Kerrow – TI L: TBD SEMICON West 2006 STEP 8