2 Introduction to Design Rules Etienne Sicard etienne

Summary 1. Why confidentiality 2. Lambda based design 3. Basic design rules 4. Interconnect

1. Why Confidentiality • Extremely strict in the past • Non-disclosure agreement • No

2. Lambda based design • Layout drawn on an integer grid • Grid unit

2. Lambda based design Good points • Enables technology changes • Enable design reuse

3. Basic design rules 4 N-channel MOS 6 6 N+ Metal 3 2 Not

3. Basic design rules P-channel MOS P+ 6 0 3 No floating well 6/16/2021

3. Basic design rules Inverter with same n. MOS and p. MOS sizes 6/16/2021

3. Basic design rules • Minimize spared diffusion • Use minimum poly width (2

3. Basic design rules • Same N and P alters symmetry 6/16/2021 E. Sicard

3. Basic design rules 2 metal 3 metal • Routing strategy metal 2 vertical,

3. Basic design rules Design Rule Checker 6/16/2021 E. Sicard - Design rules 12

4. Interconnect design rules • Up to 6 metal layers • Metal 2, 3,

4. Interconnect design rules Demo 6/16/2021 E. Sicard - Design rules 14

5. Supply design rules Aluminum is sensitive to electromigration • metal 2, 3, 4:

Conclusion • Confidentiality protects advances and weaknesses • Lambda-based design features easy reuse •

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2. Introduction to Design Rules Etienne Sicard etienne. sicard@insa-tlse. fr http: //intrage. insa-tlse. fr/~etienne E. Sicard - Design rules

Summary 1. Why confidentiality 2. Lambda based design 3. Basic design rules 4. Interconnect design rules 5. Supply design rules 6. Conclusion 6/16/2021 E. Sicard - Design rules 2

1. Why Confidentiality • Extremely strict in the past • Non-disclosure agreement • No copy but • Most info is available on the web • SIA roadmap predict rules for the next 10 years • The document includes specific advances and weaknesses of the technology 6/16/2021 E. Sicard - Design rules 3

2. Lambda based design • Layout drawn on an integer grid • Grid unit fixed to = half of technology forever Poly gate = 2 0. 12µm, = 0. 06µm 6/16/2021 E. Sicard - Design rules 4

2. Lambda based design Good points • Enables technology changes • Enable design reuse • Reduce design cost Bad points • Not optimal design • Rarely used in industry 6/16/2021 E. Sicard - Design rules 5

3. Basic design rules 4 N-channel MOS 6 6 N+ Metal 3 2 Not optimal but design reuse 6/16/2021 E. Sicard - Design rules 6

3. Basic design rules P-channel MOS P+ 6 0 3 No floating well 6/16/2021 2 N+ nwell 2 E. Sicard - Design rules 7

3. Basic design rules Inverter with same n. MOS and p. MOS sizes 6/16/2021 p. MOS carriers are twice slower than n. MOS carriers E. Sicard - Design rules Demo 8

3. Basic design rules • Minimize spared diffusion • Use minimum poly width (2 ) 6/16/2021 E. Sicard - Design rules • 1 contact = 1 m. A • Multiply contacts 9

3. Basic design rules • Same N and P alters symmetry 6/16/2021 E. Sicard - Design rules • L min • Wpmos=2 Wnmos 10

3. Basic design rules 2 metal 3 metal • Routing strategy metal 2 vertical, metal 3 horizontal 6/16/2021 • Supply in metal 3 • Use stacked vias E. Sicard - Design rules 11

3. Basic design rules Design Rule Checker 6/16/2021 E. Sicard - Design rules 12

4. Interconnect design rules • Up to 6 metal layers • Metal 2, 3, 4 identical • Metal 5, 6 thicker, larger to be used for supply and long routing 6/16/2021 E. Sicard - Design rules 13

4. Interconnect design rules Demo 6/16/2021 E. Sicard - Design rules 14

5. Supply design rules Aluminum is sensitive to electromigration • metal 2, 3, 4: 1. 5 m. A/µm • metal 5, 6: 3 m. A/µm • contact, vias: 1 m. A 1% fail in 20 years, 125°C 6/16/2021 E. Sicard - Design rules 15

Conclusion • Confidentiality protects advances and weaknesses • Lambda-based design features easy reuse • Basic rules investigated • Interconnect design rules described • Power supply design rules introduced • Illustration made for 0. 12µm 6/16/2021 E. Sicard - Design rules 16