CVD Chemical Vapor Deposition PVD Physical Vapor Deposition
- Slides: 31
코팅 종류 ? CVD : Chemical Vapor Deposition 진/공/개/요
코팅 종류 ? PVD : Physical Vapor Deposition 진/공/개/요
진공이란 ? Atmosphere 진/공/개/요 Food Process Tube Process Space Research Good Better Best
진공의 구분 ? Vacuum Region 진/공/개/요 압력 (torr) 압력 (Pa) Low vacuum 25 ~ 760 3. 3 X 103 ~ 105 Medium vacuum 7. 5 X 10 -3 ~ 25 10 -1 ~ 3. 3 X 103 High vacuum 7. 5 X 10 -7 ~ 7. 5 X 10 -3 10 -4 ~ 10 -1 Very high vacuum 7. 5 X 10 -10 ~ 7. 5 X 10 -7 ~ 10 -4 Ultra high vacuum (UHV) 7. 5 X 10 -13 ~ 7. 5 X 10 -10 ~ 10 -7 Extreme ultrahigh vacuum (EUV) < 7. 5 X 10 -13 < 10 -10
진공 펌프의 구분 ? 진/공/개/요 펌프의 종류 작동압력 비고 Rotary Pump Oil 사용 Dry Pump Booster Pump Oil Diffusion Pump Oil 사용 Turbo Molecular Pump 수증기 취약 Cryo Pump He, Ar 취약 Sublimation Pump Ion Pump 압력 [torr] 760 10 -1 10 -4 10 -7 10 -10 10 -13
Diffusion Pump System 및 Oil • Diffusion Pump System – Baffle – Cold Trap – Backing Pump – 냉각수는 위에서 아래로 • Pump Oil – Mineral (1 X 10 -8 torr) – Silicon* (1 X 10 -9 torr) – Polyphenyl ether* (1 X 10 -9 torr) 진/공/개/요
진공게이지 작업영역 (Torr) - 8 진/공/개/요 -6 -4 -2 0 Bourdon Gauge Pirani gauge Penning gauge Cold cathode (IG) Penning gauge Hot cathode (IG) Baratron gauge 2
진/공/개/요 Bourdon gauge 760 torr ~ 1 torr
Hot cathode ionization (BA) gauge 진/공/개/요
진/공/개/요 Flange CF(Con Flat) Flange : Gasket을 사용한 seal KF(Kwik Flange) or NW Flange CF Flange 26 KF Flange
진/공/개/요 Flange ISO Flange 1. Guide가 있는 O-ring을 사용한 50 mm 이상의 diameter의 seal 2. K-type : Clamp를 사용한 O-ring seal 3. F-type : Bolt-Nut를 사용한 O-ring seal ASA Flange 1. 통상의 O-ring seal 27
Butterfly valve & Conductance control valve Butterfly Valve Coductance Control Valve 저진공 공정에서 고진공 펌프의 원활한 작용 28 진/공/개/요
Gas Control Valve 잠금밸브 : Shut-Off Valve / Ball Valve 유량조절 밸브 : Needle Valve 29 진/공/개/요
- Pvd vs cvd
- Pvd cvd coating
- Nufab northwestern
- Pvd/cvd
- Superaquecimento
- Commvault communication ports
- Chemical equation of phosphorus
- Pvd polymer
- Cvd종류
- Pvd prasības mājražotājiem
- Noelle cda
- Sna to pvd
- Free testosterone levels by age
- Lafer pvd
- Pvd atļauja olu tirdzniecībai
- Section 2 reinforcement classifying chemical reactions
- Empirical formula pogil
- Section 2 classifying chemical reactions
- Chemical reactions section 1 chemical changes
- Trinitrogen monosulfide formula
- Are kc and kp equal
- Properties of sulphuric acid
- Ethan is observing chemical and physical properties
- Undesirable change
- Whats physical change
- Is baking cookies a chemical change
- Physical properties of dental material
- Nitrogen is a colorless gas physical or chemical
- Chopping wood is a chemical change
- Is cutting aluminum foil a chemical change
- Cream being whipped physical or chemical
- Physical change