EMT 261 Semiconductor Process Technology Review EXAMINATION PREPARATION
- Slides: 10
EMT 261 Semiconductor Process Technology Review
EXAMINATION PREPARATION • • • Lecture Slides & Notes Lab Modules & Reports Tutorial Questions & Answers Theory Test Questions & Answers Technical Papers Viva (Presentation Slides)
Definition Source of Contamination Gowning & Degowning Protocol CLEANROOM Classifications Cleanroom Environment
Semiconductor Definition Crystal Lattice & Unit Cell Semiconductor Materials & Properties Semiconductor Devices BASIC SEMICONDUCTOR DEVICES Crystal Properties Doping Of Semiconductor IC Process Resistivity & Conductivity Moore’s Law
Silicon Single Crystal Materials Crystal Defects WAFER MANUFACTURING CZ & FZ Methods Single Crystal Silicon
Definition Silicon & Silicon Dioxide Factors Affect Growth Rate Mechanisms & Principles OXIDATION Oxide Growth Rate Regime Applications Process Steps
Definition Mechanisms & Principles Junction Depth DIFFUSION Applications Limitations/ Disadvantages Process Steps/ Sequence
Definition Patterned & Blanket Wet & Plasma ETCHING Etch Rate Etch Uniformity Etch Profiles Selectivity
Definition Basic Requirements PVD Vs CVD METALLIZATION Types of Thin Film Measurements Junction Spike & Electro migration Applications
Definition PHOTO LITHOGRAPHY Process Steps/ Sequences Photoresists (positive & negative)
