UTMARLOWE CEC Inha University ChiOk Hwang UTMARLOWE Extensively

UT-MARLOWE CEC Inha University Chi-Ok Hwang

UT-MARLOWE • Extensively modified version of MARLOWE Version 12 • Scattering tables in Version 3. 1 • Native FORTRAN into C++ in Version 4. 0 • Kinetic Accumulative Damage Model (KADM) and modified Kinchin-Pease (KP) model in Version 4. 0 • Extending the validity to lower energies (<= 1 ke. V)

UT-MARLOWE

UT-MARLOWE • Multi-body collision algorithm - using a modified interatomic pair-potentials simulating the effect of three-body potentials; for collisions with large impact parameter

Kinetic Accumulative Damage Model (KADM) • Two phases: defect production (1 ps) and defect diffusion and interaction (0. 1 ms or longer determined by the dose rate and the implanter scanning pattern) • Defect diffusion by a (kinetic) Monte Carlo defect hopping algorithm • 10 % critical defect density for Si amorphization

TOMCAT • TOpography based Monte CArlo Transport (TOMCAT) in 1 -D and arbitrary 2 -D and 3 -D structures • Using the physically-based models of UT-MARLOWE 5. 0 • cf) standard approach to 2 -D/3 -D simulation making use of 1 -D profiles - giving a lateral Gaussian tail - using point response profiles (simulations of implants into very small windows) as Green’s functions to the large-window implant problem, superposing the point responses over the entire topography

TOMCAT • Using the detailed effects of transport through varying topography and materials, as well as damage build-up in the crystalline regions • TOMCAT = TOMCAT + Sherwood (2 -D graphical visualization tool) + UTVIEW (3 -D graphical visualization tool) • Octree decomposition scheme • Three-dimensional trajectory replication one more aggressive than the lateral trajectory replication scheme