Presentation Title Exhaust system n TERY CHEN 927260

Presentation Title Exhaust system n TERY CHEN 927260 Acer Display Technology

Presentation Title Exhaust System General Exhaust System (GEX) Acid Exhaust System(SEX) CVD Exhaust System(CVD EX. ) AMX Exhaust System (AMX) Solvent Exhaust System(SOX): Acer Display Technology

Component of Exhaust System 1. General Exhaust System(GEX): Inert Gas, N 2, Air, Hot Air, CO 2 , N 2 O etc will be included 2. Acid Exhaust System(SEX) The corrosive gas, toxic gas , acid etc will be included HF, HCl, SF 6, BCl 3, Cl 2, CH 3 COOH, H 3 PO 4, NHO 3, NF 3 3. CVD Exhaust System(CVD EX. ) Flammable gas etc. will be included NH 3, PH 3/H 2, Si. H 4, NF 3, NO 2. 4. AMX Exhaust System (AMX) a. Stripper Exhaust System: Stripper b. Alkalize Exhaust System: Na. OH , NH 3, Developer 5. Solvent Exhaust System(SOX): IPA, NBA Acer Display Technology Presentation Title

Presentation Title Exhaust Air Volume Acer Display Technology

Duct Material General Exhaust Dry Exhaust : (<50 C) (GS: Galvanize Steel) Wet Exhaust : Moisture Exhaust (PPS: Polypropylene) High Temperature Exhaust: (>50 C) (GS+Insulation) Acid Exhaust System(SEX) (PPS+Sprinkler) CVD Exhaust System(CVD EX. ) (SUS Spiral DUCT) Amonia Exhaust. Stripper Exhaust System (SUS Pipe + Insulation) Alkalize Exhaust System (PPS+Sprinkler) Solvent Exhaust SUS Pipe Acer Display Technology Presentation Title

Presentation Title GEX Flow Chart Acer Display Technology

General Exhaust System Acer Display Technology Presentation Title

Presentation Title SEX & CVD EX. Flow Chart Acer Display Technology

Acid Exhaust System Acer Display Technology Presentation Title

CVD Exhaust System Acer Display Technology Presentation Title

Presentation Title AMX Exhaust System Flow Chart Acer Display Technology

Ammonia Exhaust System Acer Display Technology Presentation Title

Solvent Exhaust System (SUS Spiral Duct + Sprinkler) Acer Display Technology Presentation Title

Solvent Exhaust System Acer Display Technology Presentation Title

Presentation Title Thank you Acer Display Technology

VOC Abatement System Acer Display Technology Presentation Title

Scrubber之結構圖 Acer Display Technology Presentation Title

Presentation Title SCRUBBER(主體結構圖--1) 噴嘴管路及噴嘴 填充層( Scrubber Package ) (Spiral nozzles) 隔柵網 ***************** *********** ********* *********** ************* ****************** ****************** 循環水箱(Re-circulation Exhaust Air Acer Display Technology Demister(除霧層) FAN Tank)

Presentation Title SCRUBBER(主體結構圖— 2) (Spiral nozzles) 加藥管注入口 (Ball valve for Chemical Inlet) 循環水壓力計 Pump (Nozzle Manometer) Dosing Tank FAN 洗滌塔壓差計 酸鹼度檢測計 Exhaust Air (PH Sensor) (Scrubber Manometer) 導電度檢測計 (Conductivity Sensor) 液位檢測計 2 1 b 循環水泵(Re-circulating Pump) Acer Display Technology (Level Sensor) a

補水閥 排水閥 Acer Display Technology Presentation Title

Presentation Title Scrubber之控制圖 A B b a Acer Display Technology

Presentation Title Scrubber Performance Calculation Acid Design Basis Data 1. Scrubber Type：Acid, Horizontal 2. Airflow： 50, 000 CMH 3. Intake Air Speed Max： 2. 5 m/s 4. Inlet Temperature： 23℃ 5. Inlet concentration： 20 ppmv of HCl 6. Removal Efficiency： 99% HCl 7. Dosing Chemical：Na. OH Acer Display Technology

Presentation Title Scrubber Performance Calculation 洗滌塔尺寸設計 填充材寬度與高度 氣體流量＝ 50, 000 CMH＝ 13. 89 m 3/s 氣體流速＝ 2. 5 m/s 有效交錯截面積＝ 13. 89/2. 5＝ 5. 56 m 2 取寬度為 3 m，則高度＝ 5. 56/3＝ 1. 85 實際設計取高度為 2. 3 m 則實際氣體流速＝ ＝ 2. 01 m/s Acer Display Technology

Presentation Title Scrubber Performance Calculation 填充深度計算 氣體質量流率(Ｇ) 23℃下之氣體流量＝ 50, 000×(273/(273+23)) ＝ 46, 114. 86 CMH 在 1 atm、23℃下，空氣的密度＝ 0. 0744 lb/ft 3 ＝ 1. 2 kg/m 3 則氣體質量流率＝ 46, 114. 86× 1. 2/(3× 2. 3) ＝ 8, 020 kg/m 2．hr ＝ 1, 643 lb/ft 2．hr Acer Display Technology

Presentation Title Scrubber Performance Calculation 液體質量流率(Ｌ) 選擇標準液體質量流率為 3, 000 lb/hr．ft 2 （6 gpm/ft 2） 則HTU (for HCl/Na. OH)＝ 3×Ｌ-0. 48×Ｇ 0. 33 （每轉換單元的高度）＝ 3× 3, 000 -0. 48× 1, 643 0. 33 ＝ 0. 74 ft 而NTU (數換單元的數目)＝ln (20/0. 2) ＝ 4. 6 則填充深度＝ 0. 74× 4. 6＝ 3. 4 ft＝ 1 m（＜ 1. 2 m) （HTU for H 2 SO 4＝ 0. 85，最小填充深度 3. 91 ft） Acer Display Technology

Presentation Title Scrubber Performance Calculation 最小循環水量 液體質量流率＝ 3, 000 lb/hr．ft 2 ＝ 6 gpm/ft 2 灑水面積＝ 3× 1. 2＝ 3. 6 m 2 最小循環水量＝ 6× 3. 6× 10. 764 gpm ＝ 232. 5 gpm＝ 880 l/min 循環泵流量＝ 80 m 3/hr＝ 1, 333 l/min (＞ 880 l/min) Acer Display Technology

Presentation Title Scrubber Performance Calculation 加藥量計算 HCl+Na. OH Na. Cl+H 2 O Nominal flow rate : 50, 000×(273/(273+23))= 46, 115 CMH HCl的摩爾流率 46, 115 m 3/hr× 20/106(ppm)× 36. 5(kg/kg-mole)/22. 4(m 3/kgmole) = 1. 5 kg/hr=0. 041 kg-mol/hr Na. OH 消耗量 1 mol HCl須要1 mol Na. OH來反應 0. 041× 1× 40 = 1. 64 kg/hr(100%Na. OH) = 8. 2 kg/hr(20%Na. OH) Acer Display Technology = 6. 8 L/hr (20% Na. OH的比重=1. 21)

Presentation Title Scrubber Performance Calculation 加藥量計算 2 NH 3+2 H 2 O→ 2 NH 4 OH+H 2 SO 4→(NH 4)2 SO 4+2 H 2 O Nominal flow rate : 50, 000×(273/(273+23))= 46, 115 CMH NH 3的摩爾流率 46, 115 m 3/hr× 20/106(ppm)× 17(kg/kg-mole)/22. 4(m 3/kg-mole) = 0. 7 kg/hr=0. 041 kg-mol/hr H 2 SO 4 消耗量 2 mol NH 3須要1 mol H 2 SO 4來反應 0. 041× 1/2× 98 = 2. 0 kg/hr(100%H 2 SO 4) = 10 kg/hr(20%H 2 SO 4) = 8. 5 L/hr (20%H 2 SO 4的比重=1. 18) Acer Display Technology