Introducing RG 2 series encoders 20 mpitch scale

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Introducing RG 2 series encoders • 20 µm-pitch scale system • Range of readhead

Introducing RG 2 series encoders • 20 µm-pitch scale system • Range of readhead sizes for a wide variety of applications • Ultra-high vacuum (UHV) compatibility • Strong reputation built over decades of faultless service

Value to you Proven reliability Easy set-up Versatile Value High speed Robust

Value to you Proven reliability Easy set-up Versatile Value High speed Robust

Specifications • • • Vacuum compatible readhead variant (RGH 20 F and RGH 25

Specifications • • • Vacuum compatible readhead variant (RGH 20 F and RGH 25 F only) Both 20 µm-pitch linear and rotary scales available Compact readhead sizes as small as 36 mm x 13. 5 mm x 10. 5 mm Linear resolutions to 5 nm and linear speeds to over 5 m/s Rotary angular speeds to 2940 RPM (RGH 20) Choose either analogue or digital outputs Linear system accuracy greater than 1. 5 µm/m Rotary system accuracy to ± 0. 5 arc second LED indicators for easy set-up and calibration

Real-life applications • Taiwan’s UMA Technolgy Inc develops optical testing equipment to ensure smartphone

Real-life applications • Taiwan’s UMA Technolgy Inc develops optical testing equipment to ensure smartphone camera lens quality • UMA selected RGH 22 encoders with RGS-20 tape for a screwdriven X-Y mobile platform for lens positioning to improve the accuracy and precision of an existing motion stage The mobile platform is one of the core components of the testing equipment. Prior to redesign, the linear stage was driven by only stepper motors, offering an unsatisfactory level of repeatability. Installation of Renishaw’s RGH 22 encoder system has enhanced resolution to 0. 1µm, which improves our product competiveness “ “

RG 2 basic principles • Readhead sensor uses patented filtering optics OR • RS

RG 2 basic principles • Readhead sensor uses patented filtering optics OR • RS 422 digital output or 1 Vpp direct from readhead • Manual reference mark phasing. REE interpolator and REF interface use advanced algorithms to allow easy calibration • For higher performance applications, the REF interface and REE interpolator allow access to higher resolutions and reduced SDE

RG 2 readhead options ØRGH 20 • • Readhead size: 36 x 13. 5

RG 2 readhead options ØRGH 20 • • Readhead size: 36 x 13. 5 x 14. 8 mm Linear speed to 8 m/s Resolutions to 10 nm 0 °C – 55 °C • • • Super compact readhead: 36 x 13. 5 x 10. 5 mm REF interface with DSP as standard Low SDE < ± 50 nm and resolutions to 5 nm UHV variant available 0 °C – 55 °C ØRGH 20 F

RG 2 readhead options ØRGH 22 ØRGH 24 • • • Readhead size: 44

RG 2 readhead options ØRGH 22 ØRGH 24 • • • Readhead size: 44 x 27 x 16 mm Digital RS 422 output direct from head Optional REE interpolator Speeds to 10 m/s and resolutions to 50 nm 0 °C – 55 °C • • • Readhead size: 36 x 13. 5 x 14. 8 mm Digital RS 422 output direct from head Optional REE interpolator Speeds to 8 m/s and resolutions to 10 nm 0 °C – 55 °C

RG 2 readhead options ØRGH 25 F • • • Ultra-high vacuum compatible Super

RG 2 readhead options ØRGH 25 F • • • Ultra-high vacuum compatible Super compact readhead: 36 x 13. 5 x 10. 5 mm REF interface Low SDE < ± 50 nm and resolutions to 5 nm UHV variant available 0 °C – 55 °C

RG 2 linear scales ØRGS tape (RGH 22, 24, 25 and 25 F) •

RG 2 linear scales ØRGS tape (RGH 22, 24, 25 and 25 F) • • • Lengths > 50 m Thermally masters to the substrate ± 15 µm / m accuracy at 20 °C Repeatable reference mark with magnetic actuator Adhesive mounting ØRSLR spar (RGH 20 and 20 F only) • • Lengths to 5 m ± 4 µm accuracy over 5 m at 20 °C Magnetically actuated reference mark Mounting by adhesive or clips / clamps

RG 2 rotary scale ØRESR ring (RGH 20/RGH 20 F only) • Low profile

RG 2 rotary scale ØRESR ring (RGH 20/RGH 20 F only) • Low profile scales with standard sizes up to Ø 550 mm • Uni-directionally repeatable reference marks with magnetic actuator • Graduation accuracy to ± 0. 5 arc second (Ø 550 ring) • Patented taper mount simplifies integration and eliminates installation errors

The RG 2 Solution • • • Proven track-record over many years Wide-variety of

The RG 2 Solution • • • Proven track-record over many years Wide-variety of readhead variants to suit many applications 20 µm-pitch linear and rotary scales Ultra-high vacuum capability Easy set-up and calibration REE and REF interfaces for enhanced performance • Any questions?