What is thin film? 2 -dimensional layer of liquid, or solid matter (self-sustaining or coated on the other body material, e. g. substrates containg Si wafer and glass. ) very large surface-to-volume ratios ⇒ The surface and interface with substrates usually influences the properties of the film. thickness range of thin film 薄 ( 膜) : < 수 ㎛ ( ? ) - thick film (후막, 厚膜) - coating: over-layer for the protection or enhancement of properties of the body
Applications of Thin Film 1. Electronics & Optics microelectronic devices [Integrated Circuit (IC)] : memory (DRAM, SRAM, flash memory), system IC (CPU, AP, MCU), Optoelectronic IC (Image sensor) largearea devices: magnetic memories (hard disc, floppy disc), optical memories (CD, DVD, blu-ray disc), FPD (LCD, OLED), solar cell optical coating: uv-cut coating, antireflection decorative coating, high reflection coating,
Applications of Thin Film 2. Mechanics wear reduction: DLC coating, ceramic coating, OMC coating, friction reduction: tefron coating, Mo. S 2 coating corrosion reduction thermal protection