SEMI STEP Introduction to SEMI S 2 0706

SEMI STEP: Introduction to SEMI S 2 -0706 The Future of SEMI S 2 Chris Evanston, PE Program Manager Earth Tech Microelectronics Chris. evanston@earthtech. com 12 July 2006 SEMI STEP: Introduction to SEMI S 2 -0706

Introduction to SEMI S 2 -0706 The Future of SEMI S 2 Agenda • Where have we been – The origin of S 2 – The development of S 2 • The Current Status of S 2 – Inside SEMI – Outside SEMI • Projections – Future Development: Near Term – Future Development: Long Term 2 12 July 2006 SEMI STEP: Introduction to SEMI S 2 -0706

The Origin of SEMI S 2 • As the semiconductor industry developed it became apparent that no established standards addressed the safety concerns of the industry • The natural response was for companies to develop their own standards • The next rational step in the evolution of this process was to develop on common industry standard – This would reduce cost because equipment manufacturers would not have to comply with numerous standards – An improve safety by driving toward best industry practices. • Out of this process SEMI S 2 was born 3 12 July 2006 SEMI STEP: Introduction to SEMI S 2 -0706

SEMI S 2 -91 A Revolution in Product Safety 1) 2) 3) 4) 5) 6) 4 12 July 2006 Developed with strong end user input Comprehensive nature Single-point failure clause Report as an information document Requires hazard evaluation Continuing development SEMI STEP: Introduction to SEMI S 2 -0706 • • • Electrical, Interlocks, EMO Robotics Mechanical & Robots Earthquake Fire Protection Radiation Chemical & Industrial Hygiene Noise Environmental Ventilation and Exhaust Lasers Ergonomics

The Evolution of SEMI S 2 -91 (Initial Guideline) Small Upgrades and Clarifications SEMI S 2 -93 (First Complete Revision) Internationalization + Major Upgrades and Clarifications SEMI S 2 -0200 (Second Complete Revision) Incremental Upgrades and Revisions The Last Complete Revision Planned SEMI S 2 -0703 (Only Line Item Changes) Incremental Upgrades and Clarifications SEMI S 2 -0706 (Line Items on 3 Year Cycle) 5 12 July 2006 SEMI STEP: Introduction to SEMI S 2 -0706

S 2 is an Umbrella Document Major Revision Recently Passed Major Revision In The Works S 2 S 1 S 3 S 6 S 8 Labels Heated Baths Ventilation Ergonomics S 10 S 14 Risk Fire S 18 S 22 S 23 Silane Electrical Energy Significant New Support Guidelines 6 Although S 2 may not change significantly Its supporting standards are still evolving 12 July 2006 SEMI STEP: Introduction to SEMI S 2 -0706

Use Of S 2 End Users and Regulators END USERS It Has Become the essential Safety Standard Used By End Users World Wide US Authorities Some Fire Marshals Have Been Using It in the US 7 12 July 2006 SEMI STEP: Introduction to SEMI S 2 -0706 European Authorities Many Use It to Support their MD/LVD Compliance Efforts

S 2 Outside the Semiconductor Industry • Flat Panel Industry is developing a standard based on S 2 • The use of S 2 in non-semiconductor manufacturing environments has been growing. – Disk Drive Industry – Medical Device Companies • It is viewed by increasing numbers of companies outside the semiconductor industry as a sound way to address safety issues in technology driven industries. • The growth of S 2 beyond the semiconductor industry is something the industry never envisioned. 8 12 July 2006 SEMI STEP: Introduction to SEMI S 2 -0706

Projections For The Near Term Development of SEMI S 2 1) 2) 3) 4) 5) 9 12 July 2006 No Major Changes in SEMI S 2 appear on the horizon. Incremental line item changes will continue on a three year revision cycle Potential significant changes will occur in SEMI S 2’s supporting guidelines – this should be watched S 2 application has already saturated the semiconductor market place for production equipment – but its use for related equipment seems to be growing (Abatement equipment is one example) Increasing use in related industries and non-related technology driven industries appears to be an emerging trend. SEMI STEP: Introduction to SEMI S 2 -0706

Projections For The Near Term Development of SEMI S 2 6) The future of SEMI S 2’s use by regulators is less clear. However, it seems that as regulators become more aware of how the industry manages its own safety concerns they will continue to look at it as a useful resource Summary èS 2 will continue to grow in technical sophistication. Its use inside and outside the industry will continue to grow. 10 12 July 2006 SEMI STEP: Introduction to SEMI S 2 -0706

Projections For The Long Term Development of SEMI S 2 The complexity of the semiconductor manufacturing process and its diverse hazards is ultimately what drove the emergence of S 2 This increasing severity and diversity of hazards as well as growing complexity of equipment is a reality that describes more and more industries in the 21 st century. Therefore, it seems reasonable to conclude that the S 2 approach to safety is something that is going to expand. 11 12 July 2006 SEMI STEP: Introduction to SEMI S 2 -0706

Projections For The Long Term Development of SEMI S 2 Because S 2 itself is driven by the complexity of the manufacturing process, it is reasonable to conclude that it will continue to be an increasingly major factor in the long term both inside and outside the semiconductor industry. If other technology driven industries require significant variations from S 2, then the S 2 approach will still continue to grow because the increasing complexity of technology driven production requires an approach of this type to control hazards inherent in those protection processes. The revolutionary approach to product safety that started with S 2 -91 will continue to expand because the needs of technology driven industries demand it. 12 12 July 2006 SEMI STEP: Introduction to SEMI S 2 -0706