3 D Nanostructures Group Prof Dr Yong Lei

3 D Nanostructures Group Prof. Dr. Yong Lei yong. lei@tu-ilmenau. de Sensitive gas sensor device obtained from the combination of 3 D surface nano-patterns technique with atomic layer deposition Zhibing Zhan 1, 2, Yan Mi 1, 2, Hui Sun 1, 2, Fabian Grote 1, 2, Huaping Zhao 1, 2, Yong Lei 1, 2, * 1. Fachgebiet 3 D-Nanostrukturierung, Institut für Physik & IMN (Zentrum für Innovationskompetenz, Macro. Nano®), Technische Universität Ilmenau, Heliosbau 1102, Prof. Schmidt. Straße 26, 98693 Ilmenau. 2. Institut für Materialphysik, Westfälische Wilhelms-Universität Münster, 48149 Münster, Germany. Result and Discussion Introduction Surface nano-patterning has been intensively investigated due to the wide applications in fabricating different nano-devices. There are fabrication and application restrictions for existing surface patterning techniques (EBL, selfassembly, SPM, and imprinting). Therefore, the realization of a new surface nano-patterning with a process characterized by flexibility, high throughput, low cost and high structural controllability presents an important issue. Recently, using a novel surface nano-patterning technique – the UTAM (ultra-thin alumina masks) surface nano-patterning, large-scale ordered arrays of surface nano-structures (nanodots, nanoholes, nanowires, and nanotubes) were fabricated [1 -6]. 1. IDK + Zn. O(ALD) 2. UTAM + Zn. O(ALD) 3. Attached UTAM + Zn. O(ALD) UTAM ordered nanodots (d 1) Nanodots (top view) (d 2) Nanoholes (top view) Schematic outline of the fabrication processes of nanodot (a-b 1 -c 1 -d 1) and nanohole (a-b 2 -c 2 d 2) arrays on Si substrates. 4. Connected UTAM + Zn. O(ALD, On-chip grown) 5. Conclusion and future work Ultrathin alumina membranes for surface nanopatterning in fabricating quantum-sized nanodots [3] Highly ordered Zn. O nanotube arrays using atomic layer deposition References: 1. Lei Y. , et al. , Chem. Soc. Rev. , 40, 1247 -1258 (2011). 2. Lei Y. , Cai W. P. , Wilde G. , Prog. Mater. Sci. , 52, 465 -539 (2007). 3. Wu M. H. , Wen L. Y. , Lei Y. , et al. , Small, 6, 695 -699 (2010). 4. Lei Y. , Chim W. K. , Chem. Mater. , 17, 580 (2005). 5. Lei Y. , Chim W. K. , J. Am. Chem. Soc. , 127, 1487 (2005). 6. Lei Y. , Chim W. K. , Sun H. P. , Wilde G. , Appl. Phys. Lett. , 86, 103106 (2005).