Weir PSFM Zspin side analysis Dataset IntegratedFEMVS 4Modified
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Weir PSFM Zspin side analysis Dataset: Integrated_FEM_V_S 4_Modified. csv Features: Focus Dose Matrix TEA Systems Corp. 65 Schlossburg St. Alburtis, PA 18011 610 682 4146 TZavecz@TEAsystems. com www. TEAsystems. com March 2005 Weir PSFM/ Zspin March 25, 2005
Tests 1 -4 - Xreg • Examined only the Xreg values for tests 1 -4 • Tracking is good March 2005 Weir PSFM/ Zspin TEA Systems Corp. Confidential 2
Zspin, 4 sites in upper left • Y-reg data for sites 1 -4 March 2005 Weir PSFM/ Zspin TEA Systems Corp. Confidential 3
Yreg behavior – sites 1/113 March 2005 Weir PSFM/ Zspin TEA Systems Corp. Confidential 4
X-reg tests 1 -113 March 2005 Weir PSFM/ Zspin TEA Systems Corp. Confidential 5
Select & re-arrange “good” points • Changed sign on 2 nd measurement and • Condensed to ½ total measurements March 2005 Weir PSFM/ Zspin TEA Systems Corp. Confidential 6
Test 1 & 113 • Now see repeatability of measurement and have two points per site. Xreg Yreg March 2005 Weir PSFM/ Zspin TEA Systems Corp. Confidential 7
At field Center March 2005 Weir PSFM/ Zspin TEA Systems Corp. Confidential 8
X vs Y response March 2005 Weir PSFM/ Zspin TEA Systems Corp. Confidential 9
Astigmatism (pre-Conversion) March 2005 Weir PSFM/ Zspin TEA Systems Corp. Confidential 10
