Vibration Isolation for Vacuum Pumps Academic Advisor Dr

Vibration Isolation for Vacuum Pumps Academic Advisor: Dr. Dave Turcic Sponsoring Company: Edwards Vacuum Ltd. Team Members: Ron Pahle Khoa T. Tran Duc M. Le Thanh Q. Nguyen Shafi Alhajri Contact Engineers: Mark Romeo Bree Edwards

Overview �Project Background �Mission Statement �Project Plan �Customer Identification �PDS Requirements �House of Quality �Risk Mitigation �Questions

Project Background �Edwards Vacuum Ltd. is contracted by Intel Corporation to provide pumps designed for atmospheric control in sensitive microchip fabrication processes. �These manufacturing processes have a strict tolerance in the range of the nanoscale.

Project Background �There is evidence that Edward’s Vacuum pumps are a cause of unwanted vibrations, and could effect the manufacturing tools used in Intel’s microchip fabrication processes. �Edwards has a current vibration isolation plan implemented, but would like to pursue an improved product to stay at the top of the vacuum pump supply industry.

Edwards Pump/Frame System

Mission Statement �Derive a solution to minimize the vibration propagated from the pump system, through the steel frame and to the surrounding workplace. �This solution will consist of a working prototype, supporting data, detailed drawings and a final report.

Mission Statement �Access to Intel Corporation’s manufacturing facility is not available. This requires that the solution derived be tested and applied at Edward’s facility. �The solution will then be applied to new systems and tested and improved by Edward’s Engineers.

Project Plan Highlights of our Gantt Chart. �PDS Document- 2/9 �Research- 2/21 �Diagnostic Testing- 3/1 �Concept Evaluation- 3/13 �Detail Design- 4/10 �Prototyping and Testing- 5/1 �Finalized Solution- 5/22 �Design Reviews- 2/21, 3/13, 5/22

Customer Identification �External Customers Primary- Edwards Vacuum Ltd. Secondary- Intel Corporations �Internal Customers Portland State University Faculty Capstone Courses ME 491/492/493

PDS Requirements High Priority Requirements �Vibration Reduction- 25% (Edwards) �Clean Room Compatible (Intel) �Power Consumption- 0 Watts (Edwards) �Timeline- 5/22 (Edwards/PSU) Medium Priority Requirements �Cost- <1000$/Pump (Edwards) �Size- Must fit within frame (Intel) �Ease of Use- Totally Passive (Edwards)

House Of Quality �No current solution to compare to.

Risk Mitigation �Attempting to reduce the risk in the following categories

Questions