半導體專題實驗 實驗三 Van Der Pauw量測與霍爾效應 Van Der Pauw measurement and Hall effect 1
Hall effect have got two Nobel Prize in Physics Klaus von Klitzing Robert B. Laughlin Horst L. Störmer Daniel C. Tsui 1985 "the quantized Hall effect" 1998 " the fractional quantum Hall effect " 2
實驗目的 o 利用 Van Der Pauw 四點探針法和霍爾效應 (Hall effect),量測半導體中多數載子濃度與 遷移率μ (mobility) 。 The Van Der Pauw Method Original paper by L. J. van der Pauw in 1958 http: //electron. mit. edu/~gsteele/vanderpauw. pdf 3
霍爾效應 (Hall Effect) For p-type: Remember, Hall effect is used to measure majority carrier density. For minority carrier density, we use Haynes-Shockley experiment. 6
霍爾效應 (Hall Effect) 由Lorentz force balance: 得到 (positive for ptype) 又 其中 故 稱 Hall coefficient (positive for ptype) (d為導體厚度) : Hall voltage : Hall field : Hall coefficient 7
霍爾效應 (Hall Effect) For n-type: 同理可得 (for n-type) (negative for ntype) 8