Universal Microsystems Gas Flow Restrictors for the Semiconductor

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Universal Microsystems Gas Flow Restrictors for the Semiconductor Industry Company founded in 1999 Partnership

Universal Microsystems Gas Flow Restrictors for the Semiconductor Industry Company founded in 1999 Partnership with TEM Filter 3350 Scott Blvd. Santa Clara, CA Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054

Uses for Gas Flow Restrictors • Replace MFC in fixed process applications – steady

Uses for Gas Flow Restrictors • Replace MFC in fixed process applications – steady pressure, single flow set point • Safety — limit flow in case of line failure • Tamperproof needle valve replacement • Flow splitting • eliminates multiple MFCs • Back fill a chamber in a fixed time Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054

UMS Gas Flow Restrictors • Orifice inside 316 L SS container • High accuracy

UMS Gas Flow Restrictors • Orifice inside 316 L SS container • High accuracy calibration (± 1. 0%) • Three orifice materials available – SS, & Single crystal sapphire or silicon • Quick turn production Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054

Orifice Flow vs Pressure Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA

Orifice Flow vs Pressure Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054

Orifice Characteristics • • Completely stable No Particle Generation Minimal dry down time Precision

Orifice Characteristics • • Completely stable No Particle Generation Minimal dry down time Precision of flow at specified pressure – +/- 5% standard, +/- 2% available • Orifice will not clog like a filter Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054

Restrictor body types available • • • 1/4 “ Male/Male VCR 1/8” Male/Male VCR

Restrictor body types available • • • 1/4 “ Male/Male VCR 1/8” Male/Male VCR 1/4” Female/Male VCR 1/4” Bulk. Head VCR Ni media Filter/Restrictor Combination 1 1/8” surface mount sandwich Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054

B-Series M/M VCR Flow Restrictor 22 -161414 -00 . 625” 1. 55” . 75”

B-Series M/M VCR Flow Restrictor 22 -161414 -00 . 625” 1. 55” . 75” • VCR Male Union • Flow Direction Arrow • External Part No. Label Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054

F/M or M/F Versions • Gland to gland 1. 80” • Diameter 0. 75”

F/M or M/F Versions • Gland to gland 1. 80” • Diameter 0. 75” • Wrench Flats 5/8” Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054

Filter/Restrictor Combination Precise flow at a specified pressure • Specifications âNo more than 1

Filter/Restrictor Combination Precise flow at a specified pressure • Specifications âNo more than 1 particle/ft 3 âLess than 10 ppb THC âLess than 10 ppb moisture â 99. 9999999% removal rating at rated flow âHe leak check to 10 -9 atm sccm/sec Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054

Surface Mount Sandwich Restrictor Top ¼” Flow • Restrictor can be inserted into either

Surface Mount Sandwich Restrictor Top ¼” Flow • Restrictor can be inserted into either port • 3 Port version available 2 -port IGS configuration 1 1/8” body size Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054

UMS Flow Restrictor Specifications • • Surface finish, 7 -8 Ra electropolish Base Material,

UMS Flow Restrictor Specifications • • Surface finish, 7 -8 Ra electropolish Base Material, 316 L SS, Orifice material, Si, Sapphire, or SS Seal for Si (Viton or Kalrez) He leak check 10 -9 atm-cc/sec Maximum pressure, 200 psia Temperature range, 50 to 250 o. F Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054

Sapphire Orifices Orifice diameters from 0. 003” to 0. 040” Variation in diameter is

Sapphire Orifices Orifice diameters from 0. 003” to 0. 040” Variation in diameter is +/- 2. 5µm Nozzle side Cross. Section Different manufacturing runs likely to see different means but tight distribution -2. 5 µm +2. 5 µm Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054

Silicon Orifices • Used for diameters < 0. 003” Cross-section nozzle side – or

Silicon Orifices • Used for diameters < 0. 003” Cross-section nozzle side – or non-integer. 001” units • • 50 µm Flow from nozzle side 10 -15% greater Avoid placing downstream from F plasma Option: sputter deposit Al 203 (both sides) Opportunity to enlarge undersized orifices – Oxidation and strip - 50 - 1000 nm Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054

Stainless Steel Orifices Cross-section 250 µm • Mechanical drill OK down to 0. 030”

Stainless Steel Orifices Cross-section 250 µm • Mechanical drill OK down to 0. 030” Use EDM down to 0. 004” • EDM precision is +/- 1. 5% at. 008” • EDM most expensive of three types Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054

Standard Orifices & N 2 flow @ 20 psig • Flow range -15 sccm

Standard Orifices & N 2 flow @ 20 psig • Flow range -15 sccm to 40 slm • Flow steps in ~ 10% • Sapphire orifices designated with N or R, SS orifices with F and Si orifices with S • N orifices nozzle side inlet R orifices nozzle side outlet Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054

How to find required orifice • This procedure converts the application gas flow at

How to find required orifice • This procedure converts the application gas flow at the application pressure into the equivalent N 2 flow at 20 psig • Match the converted flow to the flow table Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054