TMREES Conference Series 2020 Ti NAl 2 O

TMREES Conference Series 2020 Ti. N@Al 2 O 3/Al Nanocapacitor Based on Anodic Aluminum Oxide Template Laboratory of Renewable Energy – Department of Physics, College of Science, Mustansiriyah University, Baghdad, Iraq. Ahmed Al-Haddad*, Zainab J. Kadhim, Salam A. Khudhair, Ali Mohammed Ali, Ali O. Muhsen, Faiza M. Salim and Bahjat B. Kadhim June 2020 E-mail: ahmed. al-haddad@uomustansiriyah. edu. iq

Outline 1 AAO Templates 2 Ti. N Nanotube Deposition 3 4 5 Slide 2 Ti. N@Al 2 O 3/Al Nanocapacitor Arrays Conclusion Acknowledgement E-mail: ahmed. al-haddad@uomustansiriyah. edu. iq February 20, 2021

Template Conclusion Nanocapacitor Arrays Ti. N nanotube AAO Slide 3 E-mail: ahmed. al-haddad@uomustansiriyah. edu. iq February 20, 2021

Slide 4 SEM images of anodic aluminum oxide template, top view (a) and cross-sectional view (b) of the template prepared in oxalic acid at 40 V. (c) Schematic diagram of AAO template. Ø Ø Ø Ø Hexagonal pore arrays. Pore diameter (5 -800 nm). Pore length (nanometers to 100 s micrometers). High pore density (108 to 1011 cm-2). High aspect ratio (2. 5× 104). Large area over 10” Short-range order (1 μm). Al-Haddad et al. , ACS Nano 2015, 9, 8584. E-mail: ahmed. al-haddad@uomustansiriyah. edu. iq February 20, 2021 AAO Template Conclusion Nanocapacitor Arrays Ti. N nanotube Anodic Aluminum Oxide (AAO) template

Perfect with diverse pores of AAO template Slide 5 AAO Template Conclusion Nanocapacitor Arrays Ti. N nanotube Al-Haddad et al. , ACS Appl. Mater. Interfaces 2016, 8, 23348. (IF= 8. 456) E-mail: ahmed. al-haddad@uomustansiriyah. edu. iq February 20, 2021

Slide 6 Nanodot Arrays Shadow Mask Core-Shell Nanodot arrays Nanomesh AAO Template Nanostructure Arrays Conclusion Nanocapacitor Arrays Ti. N nanotube Diverse nanostructure arrays using AAO template Nanowire Arrays Substrate Nanotube Arrays Core-Shell Nanowire arrays E-mail: ahmed. al-haddad@uomustansiriyah. edu. iq February 20, 2021

Ti. N@Al 2 O 3 using AAO template Pore Nano-embossed anodization in 0. 3 M Oxalic AAO acid at 40 volt Template Removal of anodization in H 3 PO 4 + H 2 Cr. O 4 1 st ALD Ti. N Ø Ø Ø Polishing of Al foil. 1 st anodization for long time. Removing the 1 st anodization. 2 nd anodization for precise time. Widening the pore size. 2 nd anodization 1. AAO Preparation High ordered nanopores Specific pore size Enlarge the pores in H 3 PO 4 2. Ti. N nanotube Preparation Ø Ti. N deposition by ALD. Slide 7 E-mail: ahmed. al-haddad@uomustansiriyah. edu. iq February 20, 2021 Template 1 st Ti. N nanotube AAO Conclusion Nanocapacitor Arrays Al 2 O 3

Slide 8 FIGURE 3. SEM images of: (a) top view of the AAO template with large area, (b) Ti. N layer deposited by ALD, FIGURE 4. Cross-section SEM image of the sample(c) shows thethe exact etching surface layer of thickness of Al 2 O 3 and Ti. N lied on the left Aluminum foil. Ti. N to measure the Ti. N thickness and (d) cross-section view of the prepared sample. E-mail: ahmed. al-haddad@uomustansiriyah. edu. iq February 20, 2021 Template FIGURE 2. (a) Al foil, (b) polished Al foil, (c) first anodization (d) removed the first anodization and (e) highly ordered AAO template 5 min. through second anodization. Ti. N nanotube AAO Conclusion Nanocapacitor Arrays Ti. N@Al 2 O 3 using AAO template

Template Nanocapacitor Arrays Ti. N nanotube AAO Conclusion Ti. N@Al 2 O 3 /Al Nanocapacitor Arrays FIGURE 5. Variation of (a) Capacitance as a function of electric field for 21, 19, 18, 17. 5, and 17 nm of Al 2 O 3 BL thicknesses, (b) Specific capacitance vs. BL thicknesses, (c) the dielectric constant of BL for the prepared samples. FIGURE 6. Leakage current density as a function of electric field fabricated using ALD, (a) at low electric field, (b) after hard dielectric breakdown. Slide 9 E-mail: ahmed. al-haddad@uomustansiriyah. edu. iq February 20, 2021

Slide 10 E-mail: ahmed. al-haddad@uomustansiriyah. edu. iq Template Ø Through a unique features of AAO templates and facile tunability of its pore, Ti. N nanotube arrays have been synthesized using ALD. Ø The anodic aluminum oxide templates could be improved in the future research, and their applications has no limit yet. Ø The results suggest that the interfacial layer can still form at the interface of Ti. N@Al 2 O 3 that prepared using atomic layer deposition. Ø Moreover, the interfacial layer will be effected directly on the dielectric properties of Al 2 O 3 barrier layer. Precisely, the interfacial layer at the Ti. N@Al 2 O 3 interface still defective with Al 2 Ox on which the barrier layer of Al 2 O 3, resulting a high dielectric constant of ~9. 1 for the 17 nm thick BL Al 2 O 3 films and soft breakdown of the dielectric impute to the mobile defects in the IL/Al 2 O 3 Conclusion Nanocapacitor Arrays Ti. N nanotube AAO Conclusion February 20, 2021

Acknowledgement Mustansiriy ah University 1 Slide 11 College of Science 2 Renewabl e Energy 3 TMREES Conf. Series E-mail: ahmed. al-haddad@uomustansiriyah. edu. iq 4 EURACA 5 February 20, 2021

Slide 12 E-mail: ahmed. al-haddad@uomustansiriyah. edu. iq February 20, 2021