Thin Film Deposition Types of Thin Films Used
- Slides: 32
Thin Film Deposition
Types of Thin Films Used in Semiconductor Processing Thermal Oxides Dielectric Layers Epitaxial Layers Polycrystalline Silicon Metal Films
Uses for Deposited Films
Dielectric Films • Used for insulation and passivation • Typically deposited via atmospheric pressure CVD, low pressure CVD, and plasma-enhanced CVD • Typical films include: – Silicon Dioxide – Silicon Nitride – Low dielectric constant materials – High dielectric constant materials
Epitaxy • Related to silicon crystal growth • Single-crystal semiconductor layer is grown on a single-crystal substrate • Homeoepitaxy if grown layer and substrate layer are the same • Heteroepitaxy if the grown layer and substrate layer are different • Done via: – Chemical Vapor Deposition (CVD) – Molecular Beam Epitaxy (MBE)
Lattice Matching Issues in Epitaxy
Critical Layer Thickness for Defect. Free Strained Layer Epitaxy
Why use Polysilicon?
Metal Connections
Deposition Requirements
Deposition Issues
Deposition Issues
Deposition Issues Are Related to Aspect Ratio of Features
Industry Roadmap
Deposition Tools
Atomospheric Pressure Chemical Vapor Deposition (APCVD) Hardware
Improving APCVD Uniformity
Steps in a CVD Process
Silicon Doping with Arsenic and CVD Film Growth process
Silicon APCVD Growth Rates
APCVD Modeling
Alternative Hardware (Low Pressure CVD – LPCVD)
LPCVD vs. APCVD
Plasma Enhanced CVD
High Density Plasma CVD
Physical Vapor Deposition (PVD)
PVD
PVD
DC Sputter Deposition
RF Sputter Deposition
Benefit of an RF Sputter Deposition Tool
Deposition Tools and Conditions for Common Films
- Working title films films produced
- Sputtering thin film
- Film adhesion test
- Bulge test thin films
- Thin film characterization techniques
- Thick and thin film preparation
- Interference in thin film
- What is thin film in physics
- Interference in thin film
- Fiber texture pole figure
- First minima in diffraction
- Pvc membrane film
- Thick and thin film ic
- What is thin film
- Film interference
- Standard coating pan diagram
- Thin film interference
- Wedge film journal bearing
- Purpose of lead foil sheet in the film packet
- How to analyze a movie
- The tempest film cast
- Readymade films
- Hollywood renaissance films
- Typical codes and conventions of short films
- Beiniex
- Characteristics of a documentary
- Expository documentary films
- Usenet films
- Interactive movie maker
- Multi camera production examples
- No wave cinema
- Yandex film ru
- Yandex film b****