Thin Film Deposition Methods Physical processes evaporation resistive

Thin Film Deposition Methods Physical processes • evaporation : resistive heating, induction heating, electron beam, laser ablation, MBE, ion plating • sputtering : RF, DC, Magnetron, Ion beam Chemical processes • vapor process : CVD (APCVD, LPCVD, PECVD, Photo CVD) • liquid process : sol-gel, electroplating, electroless plating c. f. ) Thick film processes : Thermal spraying (Flame, Plasma), dipping, spraying, spinning, printing, painting of slurry or paste ; power coating + thermal treatment.

스퍼터링 (Sputtering)

sol-gel method