Thermoelectric Effect Measurement TEC Controller TEC Driver TEC

Thermo-electric Effect Measurement TEC Controller TEC Driver TEC: Thermoelectric cooler 3

1. TEC Controller: Temperature range: -40~140 ℃ Resolution: 0. 1 ℃ Power Supply: AC 100~240 V, 50/60 Hz 2. TEC Driver: Power Supply: AC 100~240 V, 50/60 Hz 4

Resistivity Measuring Instrument 數位薄膜電阻計 5

QTI-5601 TSR sheet resistance tester Working voltage Overload protection: AC 90 V~264 V, 50/60 Hz <15 VA AC 330 Vrms Maximum Display 150000(sheet resistance Ω/□) 33000(normal resistance Ω) 6

QT-50 manual test stage QH-1026 Probe Maximum current: 1000 m. A QT-SW standard resistance Range: 200 m Ohm to 5 K Ohm Probe Standard resistance 7

Thermal Evaporation Deposition Machine 電阻式蒸鍍機 Chamber Mechanical Pump (~5 E-2 torr) Diffusion Pump (~5 E-6 torr) 8

Vacuum Gauge 真空計 Ionization Vacuum Gauge Control Pirani Vacuum Gauge 9

1. Pirani Vacuum Gauge (ULVAC GP-1 S → GP-1 G) Measurable pressure range: 0. 4~2700 Pa Accuracy: ± 3% of full scale (linear scale conversion) Power supply voltage: AC 100 to 240 V, 10 VA 2. Ionization Vacuum Gauge Control (ULVAC GI-TL 3 → GI-M 2) Measurable pressure range: 5. 00× 10 -8 ~ 9. 99× 100 Pa(3. 75× 10 -10 ~ 7. 49× 10 -2 torr) Accuracy: ± 15% Power supply voltage: AC 100± 10 V 50/60 Hz, 60 VA 10

Deposition Controller 成膜控制器 ULVAC CRTM-6000 Film thickness/rate resolution: 0. 041 Å (5 MHz)/ 0. 029 Å (6 MHz) Sampling rate: 125 ms Power supply voltage: AC 85 to 230 V 50/60 Hz 11

Power Supply 電源供應器 Connected to the switchgear 12

Water Chiller 冰水機 13

Mini Lamp Annealer ULVAC MILA-3000/MILA-5000 (MILA-5000) Temperature Range: RT~1200℃ (high temperature type) RT～ 800℃ (uniform temperature type) Sample Size: 20 × 2 (mm) (W×L×t) Atmosphere: Air, Vacuum, Gas flow 14

Sputter Deposition Machine 濺鍍機 15

MDX 500 16

Mechanical Pump (~5 E-2 torr) Turbo Pump (~5 E-6 torr) 17

Hall Effect Measurement System Magnet 18

Fume Hood 通風櫃 Switch 19

Ultrasonic Cleaner 超音波洗淨機 DELTA DC 80 H Oscillation frequency: 40 k. Hz (range: 28 k. Hz ~ 160 k. Hz) Power: 80 W Power supply voltage: AC 100~120 V / 60 HZ or AC 220~240 V / 50 Hz Timer : Continuous & 30 min Heater power: 45 W Temperature: Highest 65℃ 20

Microscope 顯微鏡 21

HDMI Camera HDMI攝錄機 MICROTECH i. Cam Plus Resolution: 1920*1080 P Power supply: DC 12 V 500 m. A 22

Reverse Osmosis Water System 逆滲透水處理系統 23

Microprocessor Water Quality Monitor 水質監視器 SUNTEX EC-410 Measuring Range Conductivity: 0. 00 μS/cm ~ 200. 0 m. S/cm in 5 ranges Resistivity: 0. 00~20. 00 MΩ‧cm Temperature: -10~110. 0°C Resolution Conductivity: 0. 01 μS/cm Resistivity: 0. 01 MΩ‧cm Temperature: 0. 1°C 24

Accuracy Conductivity: ± 1% (± 1 Digit) Resistivity: ± 1% (± 1 Digit) Temperature: ± 0. 5°C Power Supply: 100 V~240 VAC ± 10%, 50/60 Hz 25

Switchgear 配電盤 Thermal Evaporation Deposition Machine Air Conditioner in Room 306 Sputter Machine 2 Water Chiller 26

Semiconductor Characterization System 半導體參數分析儀 27

Keithley 4200 -SCS I-V Source Measure Units (SMUs) ± 210 V/100 m. A or ± 210 V/1 A modules 100 f. A measure resolution , 10 a. A with optional preamp 10 m. Hz – 10 Hz very low frequency capacitance measurements 100 μF load capacitance C-V Multi-frequency Capacitance Units (CVUs) AC impedance measurements (C-V, C-f, C-t) 1 k. Hz – 10 MHz frequency range ± 30 V (60 V differential) built-in DC bias, expandable to ± 210 V (420 V differential) Simple switching between I-V and C-V measurements with the optional CVIV Multi. Switch Power supply: 100 V to 240 V, 50 to 60 Hz 28

Pump 29

Keysight B 1500 A Measurement range: 0. 1 f. A ~ 1 A 0. 5 µV ~ 200 V Frequency range: 1 k. Hz ~ 5 MHz 30

Keysight E 5250 A Low-leakage Switch Mainframe 31

Auto Drybox 電子防潮箱 32

Reference Thermo-electric effect measurement TEC controller: https: //www. ebay. com/itm/WISE-LIFE-TECH-TEC-CONTROLLERTCS 061 RRA-THERMAL-COUPLE-TYPE-K-0721 TCS 131 -/223519421913 TEC driver: https: //www. ebay. com/itm/WISE-LIFE-TECHNOLOGY-TEC-DRIVER-TDS 60020 A 0710 TDS 131/323809233706 Resistivity measuring instrument http: //www. quatek. com. tw/Tn/product/inproduct/id/636/catid/249. html http: //www. quatek. com. hk/Public/Uploads/uploadfile 2/files/20180413142417 _5 ad 04 d 1191 dd 8. pdf Vacuum gauge https: //showcase. ulvac. co. jp/cn/how-to/comparative-table-of-old-and-newmodels/vacuum-gauge-relative-table. html Pirani vacuum gauge: https: //showcase. ulvac. co. jp/cn/products/vacuum-gauge/generalpurpose/general-purpose-pirani-vacuum-gauge/gp-g-series/gp-1 g%20. html Ionization vacuum gauge control: https: //showcase. ulvac. co. jp/cn/products/vacuumgauge/general-purpose/ionization-vacuum-gauge/gi-series/gi-m 2. html 47

Deposition controller https: //showcase. ulvac. co. jp/en/products/deposition-controller/depositioncontroller/crtm-series/crtm-6000 g. html https: //www. ulvac. co. jp/download/wp-content/uploads/thin-film-measurement/crystal -oscillation-type-deposition-controller/crtm-6000 g/1708 E_CRTM 6000 G. pdf Mini lamp annealer Sputter deposition machine https: //showcase. ulvac. co. jp/cn/products/heat-treatment-and-thermalproperties/infrared-gold-image-furnace-rta/tabletop-lamp-heating/mila-5000 series. html MDX 500: https: //www. advancedenergy. com/globalassets/resources-root/datasheets/mdx-series-500 -w-data-sheet. pdf Hall effect measurement system https: //www. lihyuan. com. tw/hms-3000 -undefined-26 p. html https: //www. lihyuan. com. tw/attach/hms-3000 -undefined__a_1__26. pdf 48

Fume hood Ultrasonic cleaner https: //www. yt-technology. com/products/? act=data&id=41 HDMI camera https: //en. wikipedia. org/wiki/Fume_hood http: //www. microscopes. com. tw/shop/print_product_info. php? products_id=1177&Tw esid=fdzwjmrknc Microprocessor water quality monitor http: //www. suntex. com. tw/Product. Detail. Info. php? brand=3&cate=21&pid=141&exp=0 http: //www. suntex. com. tw/UPLOAD/e. DM/c 4 ca 4238 a 07 c 965993962 f 6 ba 4 ecb 1 eaf 38 f 4 b 44 a 0. pdf 49

Semiconductor characterization system Keithley 4200 -SCS: https: //tw. tek. com/keithley-4200 a-scs-parameter-analyzer-manual-8 Keysight B 1500 A: https: //www. keysight. com/zh-TW/pd-582565 -pn. B 1500 A/semiconductor-device-analyzer? cc=TW&lc=cht Keysight E 5250 A Low-leakage Switch Mainframe: https: //www. keysight. com/zh-TW/pd 116397 -pn-E 5250 A/low-leakage-switch-mainframe? pm=PL&nid=34003. 536883163&cc=TW&lc=cht Auto drybox https: //www. drytech. com. tw/shop. html? gclid=Cj 0 KCQjww_f 2 BRCARIs. AP 3 zar. FNCTpt. I 2 ou 5 J_xcl 4 OUGn. Q 4 AUTb 4 zkwrx. MX 3 Gb. Eir 6 gby 8 TTWGr 3 sa. Amr. NEALw_w c. B 用戶用電設備裝置規則 https: //law. moj. gov. tw/Law. Class/Law. All. aspx? pcode=J 0030018 50

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