Thermal Processes School of Microelectronic Engineering Thermal Processes

































































- Slides: 65
Thermal Processes School of Microelectronic Engineering
Thermal Processes in IC Fabrication ` School of Microelectronic Engineering
Thermal Processes: Definition School of Microelectronic Engineering
School of Microelectronic Engineering
Oxidation: Introduction School of Microelectronic Engineering
Oxidation: Introduction School of Microelectronic Engineering
Oxidation: Application School of Microelectronic Engineering
Oxidation: Application – Diffusion Barrier School of Microelectronic Engineering
Oxidation: Application – Passivation Surface School of Microelectronic Engineering
Oxidation: Application – Screen Oxide School of Microelectronic Engineering
Oxidation: Application – Pad & Barrier Oxides in STI Process School of Microelectronic Engineering
Oxidation: Application – Pad Oxide School of Microelectronic Engineering
Oxidation: Application – Device Isolation School of Microelectronic Engineering
Oxidation: Application – Blanket Field Oxide Isolation School of Microelectronic Engineering
Oxidation: Application – LOCOS School of Microelectronic Engineering
Oxidation: Application – LOCOS Process School of Microelectronic Engineering
Oxidation: Application – Sacrificial Oxide School of Microelectronic Engineering
Oxidation: Application – Device Dielectric School of Microelectronic Engineering
Oxidation: Application – Device Dielectric School of Microelectronic Engineering
Oxidation: Mechanisms School of Microelectronic Engineering
Oxidation: Oxide Growth Rate Regime School of Microelectronic Engineering
Oxidation: < 1 0 0 > Silicon Dry Oxidation School of Microelectronic Engineering
Oxidation: Wet (Steam) Oxidation School of Microelectronic Engineering
Oxidation: < 1 0 0 > Silicon Wet Oxidation Rate School of Microelectronic Engineering
Oxidation Rate School of Microelectronic Engineering
Oxidation Rate: Temperature School of Microelectronic Engineering
Oxidation Rate: Wafer Orientation School of Microelectronic Engineering
Oxidation Rate: Wet Oxidation School of Microelectronic Engineering
Oxidation Rate: Dopant Concentration School of Microelectronic Engineering
Oxidation Rate: Differential Oxidation School of Microelectronic Engineering
Oxidation Process School of Microelectronic Engineering
Dry Oxidation System School of Microelectronic Engineering
Dry Oxidation School of Microelectronic Engineering
Gate Oxidation Steps I School of Microelectronic Engineering
Gate Oxidation Steps II School of Microelectronic Engineering
Wet Oxidation Process School of Microelectronic Engineering
Wet Oxidation Process Steps I School of Microelectronic Engineering
Wet Oxidation Process Steps II School of Microelectronic Engineering
Rapid Thermal Oxidation School of Microelectronic Engineering
Oxide Measurement School of Microelectronic Engineering
Oxidation: Summary School of Microelectronic Engineering
School of Microelectronic Engineering
Diffusion: Introduction School of Microelectronic Engineering
Diffusion Doping: Illustration School of Microelectronic Engineering
Diffusion Doping: Illustration School of Microelectronic Engineering
Diffusion Doping: Illustration School of Microelectronic Engineering
Diffusion Doping Process I School of Microelectronic Engineering
Diffusion Doping Process II School of Microelectronic Engineering
Diffusion Doping Process II School of Microelectronic Engineering
Diffusion Doping Process Steps I School of Microelectronic Engineering
Diffusion Doping Process Steps II School of Microelectronic Engineering
Diffusion Doping Process Steps III School of Microelectronic Engineering
Diffusion Doping Process Steps IV School of Microelectronic Engineering
Diffusion Doping Process Steps V School of Microelectronic Engineering
Diffusion Doping Process Steps VI School of Microelectronic Engineering
Dopant Oxide Deposition School of Microelectronic Engineering
Cap Oxidation School of Microelectronic Engineering
Drive-In School of Microelectronic Engineering
Drive-In School of Microelectronic Engineering
Strip Oxide School of Microelectronic Engineering
Diffusion: Limitations & Applications School of Microelectronic Engineering
Diffusion: Applications – Drive In School of Microelectronic Engineering
Diffusion: Applications – Well Implantation & Drive In School of Microelectronic Engineering
Diffusion: Applications – Boron USJ Formation School of Microelectronic Engineering
Diffusion: Applications – Boron USJ Formation School of Microelectronic Engineering