Theres Plenty of Room at the Bottom By
There's Plenty of Room at the Bottom ! By Richard Feynman , APS Annual Meeting, 29 Dec. 1959, at the California Institute of Technology (Caltech). http: //www. zyvex. com/nanotech/feynman. html 1. “. . Computing machines are very large. They fill rooms. Why can’t we make them very small ? … For instance the wires should be 10 or 100 atoms in diameter and the circuits should be a few thousand angstroms across…. ” 2. “The electron microscope is not good enough. … It can only resolve 10 Angstroms. I would like to try and impress upon you…. The importance of improving the electron microscope by 100 times. It is not impossible. It is not against the laws of diffraction of the electron…. So, it should be possible to see individual atoms” 3. “ I am not afraid to consider the final question as to whether, ultimately, in the great future, we can arrange the atoms the way we want, the very atoms, all the way down !”
First Bipolar transistor Shockley, Bardeen and Brattain (1947)
ﺃﻮﻝ ﺩﺍﺋﺮﺓ ﻣﺪﻣﺠﺔ First Integrated Circuit J. S. Kilby (TI) 1961
MOSFET Gate Drain Source poly. Si N+ oxide p-Si N+ channel
Today’s MOSFET CPU CMOS
Electron Beam Lithography and Photolithography EBL and EUVL Electron Beam, 200 k. V, 10 nm, 50 k. Hz PMMA Si. O 2 Silicon
3 -5 nm lines obtained by Electron Beam Lithography on PMMA Vieu et al. Appl. Surf. Sci. 164, 2000 (111)
EUV Lithography
EUV Lithography l = 13 nm
2005 MOSFET Today’s MOSFET 2014 CMOS
Carbon Nanotubes
ﺃﻨﺎﺒﻴﺐ ﻣﺘﻌﺪﺩﺓ ﺍﻟﺠﺪﺭﺍﻥ : ﺃﻨﺎﺒﻴﺐ ﺩﺍﺧﻞ ﺃﻨﺎﺒﻴﺐ http: //www. lbl. gov/Science-Articles/Research-Review/Magazine/2001/Fall/features/02 Nanotubes. html
Carbon Nanotubes Metals if (n, n) and (n-m)=3 k Semiconductors otherwise
Carbon Nanotubes K. Hirahara, K. Suenaga, S. Bandow, H. Kato, T. Okazaki, H. Shinohara, and S. Iijima http: //www. snf. ch/NFP 36/RFFranzoesisch. pdf Phys. Rev. Lett. 85, 5384 (2000)
Nanotube Field Effect transistor (2001) http: //www. research. ibm. com/nanoscience/fet. html
Snail cells Plastic pegs http: //www. nature. com/nsu/010830 -7. html#1
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