The user IO interface uses a 25 pin

The user I/O interface uses a 25 -pin, D-type connector. All analog signals are 0 -5 V in and out. All digital signals are 0 -15 V CMOS compatible 13 INTLK. D User access to digital interlock string. Referenced to pin 19 PIN NAME DESCRIPTION 14 REFLECTED. A POWER Analog out put representation of reflected power. Referenced to pin 18 1 DC BIAS. A+ (+) Differential analog feedback input for dc bias regulation 15 LOAD POWER. A 2 DC BIAS. A - (-) Differential analog feedback input for dc bias regulation Analog output representation of load power, based on a user-provided signal. Referenced to pin 18 16 DC BIAS. A Analog output representation of chamber dc bias measured by user. Referenced to pin 18 3 OFF/RESET. D Digital remote input off/reset command. Referenced to pin 19 4 ON. D* Digital remote input pulse output command. Referenced to pin 19 17 FORWARD POWER. A Analog output representation of forward power. Referenced to pin 18 5 PULSE ON. D Digital remote input on command. Referenced to pin 19 18 SIGNAL COMMON Common of all analog input/output signals 6 CEX TOGGLE. D* Digital input enable fore common exciter. Referenced to pin 19 19 POWER COMMON Digital and control common 7 PHASE ANGLE. A Analog input representation of phase angle. Represented to pin 18 20 TUNER OK. D 8 PHASE. D (+) (-) Digital input representation indication the sign of the phase angle, based on a user-provided signal. Referenced to pin 19 Digital input indication of satisfactory tuner operation from ATX tuner. Referenced to pin 19 21 NOT USED PLASMA. D Digital input indication of plasma presence from ATX tuner. Referenced to pin 19 22 NOT USED LOAD POWER IN. A Analog input representation of load power, based on a user-provided signal. Referenced to pin 18 23 NOT USED 11 REMOTE PROGRAM. A LEVEL Analog remote input power adjust. Referenced to pin 18 24 NOT USED 12 TUNER ARC. D SENSE* Digital input indication of chamber ARC, based on a user-provided signal. Referenced to pin 19 25 NOT USED 9 10 * Negative true logic

PC running Lab. View Any port 10 analog 10 digital NI control device Look at table for I/O pin specifications. All analog signals are 0 -5 V in and out. All digital signals are 0 -15 V CMOS compatible RFX 600 25 pin D-type connector