The EX 5 Excimer Laser A total metal

The EX 5 Excimer Laser A total metal ceramic excimer laser with many advantages • Low cost Mini laser • Long gas lifetime • Low cost of operation • Computer controlled • Air cooled • High power in a compact table top package GAM LASER, INC. 2009 1

TYPE II SUPERCHAMBER Performance Highlights n n n n Total Metal/ceramic design Corona preionization New chamber material New direct drive blower New electrode design Active optics filtering for longer optics lifetime Improved optics material Increased bearing lifetime Increased gas lifetime Linear power with repetition rate Higher repetition rate 1% pulse to pulse stability Reduced parts count gas handling system Solid state thyratron GAM LASER, INC. 2009 2

EX 5 -F 2 157 nm PERFORMANCE n n n n Vacuum Ultraviolet at 157 nm Single Fill gas lifetime Static gas lifetime Energy Average power Stability KF/16 purge flange included GAM LASER, INC. 2009 10 million pulses 10 Days 2 m. J. 65 W <2% RMS 3

EX 5 Specifications PARAMETER F 2 Ar. F Kr. F Xe. Cl Xe. F Wavelength nm 157 193 248 308 351 Energy Max. m. J 1. 5/2 12 20 8 6 Peak Power k. W 250 1500 2500 1000 750 Average Power @ 250 Hz 0. 4 2. 4 4. 0 1. 4 1. 3 Average Power @ 500 Hz 0. 65 4. 0 8. 0 2. 5 2. 4 20 E 6 15 E 6 Repetition Rate Max. Hz 2 Dynamic gas lifetime Pulses to 50% energy Shelf life to 50% energy 250/500/750 10 E 6 12 E 6 18 E 6 10 days 20 days 30 days Pulse Length n. S >3 Months 30 Days 8 Stability <3% Standard Deviation Tube Service 2 Billion Pulses Beam Size, mm 3 X 6 Divergence, m. Rad full angle 1 X 2 Cooling AIR Timing Jitter 2 n. S Standard Deviation Weight 15 kg GAM LASER, INC. 2009 4

Dynamic Gas Lifetime GAM LASER, INC. 2009 5

Repetition Rate Performance GAM LASER, INC. 2009 6

Pulse to Pulse Stability 0. 77% rms Stability @ 200 Hz, 13. 5 m. J Kr. F 248 nm GAM LASER, INC. 2009 7

EX 5 Running Costs Running costs for 2 billion pulses Ar. F Kr. F n Refurbishment after 2 billion pulses $7500 Premix gas cylinders $1500 Optics exchanges $7000 $7500 $1200 $1150 n Totalcosts $9850 n n n $16000 n Cost per Thousand pulses $0. 008 Running cost per hour at 200 Hz $5. 76 $0. 0049 $3. 53 n Cost per pulse 0. 49 e-5 ¢ n 0. 8 e-5 ¢ GAM LASER, INC. 2009 8

GAM LASER, INC. 2009 9