The Business of Science Quantum Technology Supplying the

The Business of Science® Quantum Technology: Supplying the Picks and Shovels Dr John Burgoyne Quantum Control Engineering: Mathematical Solutions for Industry – Open for Business Event 7 th August 2014, 12. 30 -17. 00, Isaac Newton Institute, Cambridge © Oxford Instruments 2014 Page 1

Why “picks and shovels”? The Business of Science® 20 February 2006 …Tools enable discovery © Oxford Instruments 2014 Page 2

Behind the metaphor The Business of Science® New ideas + New tools © Oxford Instruments 2014 = New science Page 3

© Oxford Instruments 2014 Von Hippel (1986), Mgt Science, 32 7, 791 Von Hippel

A suite of materials, metrology and measurement tools for QT MBE & UHV sputtering fabrication The Business of Science® Surface analysis - chemical SEM Qbit measurement Surface analysis - structural Plasma deposition and etch © Oxford Instruments 2014 Qbit manipulation Page 5

The Business of Science® Device fabrication © Oxford Instruments 2014 Page 6

Enabling device fabrication via a suite of advanced techniques and processes • The Business of Science® Growth • MBE • Nanowires/nanotubes • High temperature plasmaenhanced chemical vapour deposition (PECVD) • • Deposition • PECVD • Inductively coupled plasma (ICP) deposition • Ion beam deposition • Atomic layer deposition (ALD) Etch • ICP etch • Reactive ion etch (RIE) • Ion beam etch © Oxford Instruments 2014 Page 7

Capabilities from research to pilot-scale and production – solutions that grow with the technology 50 mm Wafer size The Business of Science® 450 mm Open load Wafer handling Production – cassette to cassette © Oxford Instruments 2014 Page 8

Multi-tool clusters The Business of Science® PECVD Sputter ALD (thermal & plasma) ICP-CVD #1 Hex handler with integrated Kelvin Probe ICP-CVD #2 Kelvin probe © Oxford Instruments 2014 Page 9

Our process advantage The Business of Science® • Process library of > 6, 000 processes developed over 25 years • Accessible to all our customers • Close collaboration with major Universities and R&D facilities TEOS based Si. O 2 deposition Typical Ga. N etched feature (PR remains intact) Waveguide etch HB LED substrate etch Si. C metal mask etch High rate Si. Nx at 8 0ºC • Caltech, Cornell, LBNL, TU Eindhoven, IMEC, Southampton University, Cambridge University, … • Process guarantees for key parameters • Including wafer-to-wafer repeatability for rate and uniformity © Oxford Instruments 2014 Page 10

Extreme aspect ratio conformal deposition via Atomic Layer Deposition • The Business of Science® Unique capability of ALD for monatomic/ mono-molecular layer control over extremely high aspect ratio features • Example (top): ALD of Al 2 O 3 on carbon nanotubes (CNT) • Using TMA and O 2 plasma • O 2 plasma just enough to react • Trench corner with TMA but not etch CNT No additional functionalisation of CNT necessary Hf. O 2 Si • Example (bottom): 20 nm Hf. O 2 onto 25: 1 AR Si trenches Trench bottom • Conformality ~ 100% Hf. O 2 Si © Oxford Instruments 2014 Page 11

Deposition UHV multi-chamber tool: Institute for Quantum Computing, University of Waterloo, Canada © Oxford Instruments 2014 The Business of Science® Page 12

Deposition UHV multi-chamber tool: Institute for Quantum Computing, University of Waterloo, Canada The Business of Science® • MBE and UHV sputtering • methods on multiple materials within the same device • Metals, metal oxides, superconductors, topological insulators… XPS (X-ray photoelectron spectroscopy) analysis of samples • Oxford Instruments Omicron ARGUS analyser • In-process analysis • Enables layer-by-layer quality control of the MBE and sputtering growth processes © Oxford Instruments 2014 Page 13

The Business of Science® Device physics and characterisation © Oxford Instruments 2014 Page 14

A key enabler for QT/QIP R&D: the Triton. TM Cryofree® dilution refrigerator platform • • The Business of Science® QT device physics needs low (ultra-low) temperatures The initial, “obvious” advantage: no liquid cryogens • No compromise on performance • • Base temperature <10 m. K • Cooling power up to 400 µW at 100 m. K Attraction for QT science emerged: greatly enhanced sample space vs. ‘wet’ • 240 mm diameter mixing chamber plate • Open structure for easy experimental access • Ease of use • Sample in vacuum with only a single room • • temperature O-ring seal (no IVC) Fully automatic cool-down from room temperature to base Remote control through TCP/IP protocol © Oxford Instruments 2014 Page 15

What else is needed for QIP ‘read/write’ control • • • The Business of Science® ULT plus… Electrical • Wide bandwidth electronics • GHz pulse sequences • Low noise amplification • Low temperature filtering and amplification • Low electron temperatures Magnetic • Homogeneous fields • Gradient fields • 3 D Vector fields • AC fields Optical • Low vibration • HV/UHV • fs pulse sequences • Single photon emitters • Optical windows • Spectroscopic detectors Atomic • UHV • Gas injection • Ion/electron beam • Rapid scan SPM © Oxford Instruments 2014 Page 16

Triton DR: typical experimental services The Business of Science® 4 K plate 2 off optical fibres 10 off UT-85 rigid coaxial cables 96 off dc lines Still plate 100 m. K plate 10 off S 1 flexible coaxial cables Mixing chamber plate, <10 m. K © Oxford Instruments 2014 Page 17

Experimental services, heat sinking and available cooling powers The Business of Science® “Fully loaded” Triton DR: base temperature < 15 m. K © Oxford Instruments 2014 Page 18

Triton DR integrated 3 -axis superconducting magnets © Oxford Instruments 2014 The Business of Science® Page 19

Multiple Triton DR systems: Centre for Quantum Devices, Niels Bohr Institute, University of Copenhagen, Denmark © Oxford Instruments 2014 The Business of Science® Page 20

Multiple Triton DR systems: TU Delft, Netherlands © Oxford Instruments 2014 The Business of Science® Page 21

Fast throughput: top-loading sample exchange © Oxford Instruments 2014 The Business of Science® Page

30 mm top-loading sample puck The Business of Science® • • 4 off 18 GHz 25 off dc lines © Oxford Instruments 2014 Page 23

Fast throughput with larger sample space: bottom-loading sample exchange The Business of Science® OVC break Sample puck Magnet Vacuum lock and gate valve Drive rods © Oxford Instruments 2014 Page 24

70 mm bottom-loading sample puck The Business of Science® • • • 14 off 40 GHz 50 off dc lines < 8 hours cool-down time © Oxford Instruments 2014 Page 25

Fast throughput with larger sample space: bottom-loading sample exchange The Business of Science® MC plate Coaxes routed from MC plate to docking station Repeat connect/disconnect cycles Docking station Field centre Sample holder © Oxford Instruments 2014 Page 26

Sample instrumentation The Business of Science® © Oxford Instruments 2014 Page 27

New platform for yet greater capacity and capability: Triton. XL 706 mm The Business of Science® 1003 mm Ø 240 mm Ø 430 mm © Oxford Instruments 2014 Page 28

Triton. XL: sample space and wiring access The Business of Science® Triton • Ø 240 mm • 1 x 50 mm + 2 × 40 mm + 1 x 65 mm Lo. S ports Triton. XL • Ø 430 mm • 6 x 50 mm + 1 x 100 mm Lo. S ports © Oxford Instruments 2014 Page 29

And finally… The Business of Science® • The future • On-board cold electronics • Filtering, multiplexing, amplifiers, … • Enhanced measurement • Electron temperature thermometry • Standardised measurement pucks • Anticipating close participation in a number of QT Hubs • For discussion! • What are we not seeing yet in QC/QIP? • What are we not seeing yet in QT beyond QC/QIP? © Oxford Instruments 2014 Page 30