System Specification Clean Room Clean Room Area 11

System Specification Clean Room 一. Clean Room Area ： 11, 182 m 2 ( 8, 717 m 2 MAIN FAB) 二. Re. Humidity ： Photo : 43± 3% , Production : 43± 5% 三. Temperature ： Photo : 22± 0. 3℃ , Production : 22± 2℃ 四. Room Pressurization ： Class 1 : 5± 1 mm. Aq , Class 1000 : 3± 1 mm. Aq 3/5/2021 5

construction of FAB 3/5/2021 6

Fab內部負荷計算 Exhaust 風量 Q e = Q acid + Q alkaline + Q sol + Q general = 5, 590 + 509 + 1, 076 + 8, 302 = 15, 477 (CMM) Fresh 風量 Q m = Q photo + Q prod + Q imp + Q supp + Q gowning = 3, 518 + 6, 000 + 3, 218 + 2, 915 + 816 = 16, 467 (CMM) 3/5/2021 9

Fab內部負荷計算 INPUT: 設備用電為 7367 k. W = 6, 335, 620 kcal =2095. 1 RT INTERNAL LOAD: LIGHITING LOAD =317. 1 k. W =272, 706 kcal/hr =90. 1 RT FFU LOAD =160 W * 7, 270 =1, 163. 2 k. W =1, 000, 352 kcal =330. 8 RT 3/5/2021 10

OUTPUT: 1 排氣負荷Σq =ρQC△T §q GENERAL = 1. 19* 498, 120 * 2. 2 =1, 304, 078 k. J/hr =1, 304, 078 ÷ 4. 186 (k. J/Kcal) ÷ 860 (Kcal/k. W) = 362. 2 k. W §q ACID = 1. 19* 335, 400 *0. 3 =1, 19737. 8 k. J/hr = 33. 26 k. W §q ALKALINE = 1. 19* 30, 540 *0. 3 =10, 902. 78 k. J/hr = 3. 02 k. W §q SOLVENT = 1. 19* 59, 880 *4. 9 =349, 160. 26 k. J/hr = 96. 9 k. W 3/5/2021 11

OUTPUT: 2 PCW (q) =18, 700 LPM Δ T = 3. 2℃, IN=21. ℃ , OUT = 17. 8 ℃ 冷卻容量為 18, 700 LPM *3. 2*60 = 3, 590, 400 Kcal/hr =1, 187. 3 RT EXHAUST帶走的熱量 = 140. 77 RT 設備對FAB提供負荷= 2, 095. 1 – 1, 187. 3 – 140. 77 = 767. 03 RT 3/5/2021 12

DRY COIL帶走熱量(q): q =1. 19 * 109, 050 * (41. 87 - 40. 65) * 60 =9, 499, 127. 4 k. J/hr = 2, 269, 261. 2 kcal/hr =750. 4 RT MAU提供 RT: (無塵室溫度-出風口溫度) =1. 19* 16467 * (41. 46 - 34. 75)* 60 = 7, 889, 240. 8 k. J/hr = 623. 2 RT 3/5/2021 13

內部負荷計算表 3/5/2021 ◎ ( circulating Air System ) Dry coil 24 unit Dry coil (average load) 2, 094 k. Wh/Day Dry coil (average volume) 41, 167 m 3/hr FFU 7, 270 Unit FFU (average load) 27, 916 k. Wh/Day FFU (average volume) 900 m 3/hr FFU (static pressure ) 153 Pa 17

內部負荷計算表 Energy Consumption Of Cleaning (FFU) -- Circulating Times (Times / hr) -- (1) Moving Energy (k. W) 926. 93 (2) Cooling Energy (k. W) 1, 163. 17 (3) (4) Total Consumption (k. W) 2, 090. 09 (1) + (2) (6) / Internal Loads 0. 77 fan efficiency η=0. 3 3/5/2021 18

內部負荷計算表 Energy Consumption Of FFU Type For Class 1 and 1000 CLASS 1 (0. 1 um) 　 FFU input 160 (W) 160 FFU quantity 3117 (SETS) 4153 Floor area 2341 (M 2) 8841 Energy Consumption (k. W/M 2) 3/5/2021 CLASS 1000 (0. 1 um) 0. 213 0. 075 19

排氣處理的能源 SYSTEN STATIC PRESSURE (Pa) k. WH/m 3 CMM/m 2 TYPE VOLUME (CMH) ENERGY CONSUMPTION (KWH/DAY) ACID 335, 400 6, 885 -980 0. 0009 0. 500 GENERAL 498, 120 8, 599 -1, 009 0. 0007 0. 742 ALKALINE 30, 540 1, 843 -882 0. 0025 0. 046 SOLVENT 59, 918 3, 087 -300 0. 0021 0. 089 3/5/2021 20

製程冷卻水的製造及運送能源 Energy consumption of PCW (flow) (1) Cooling Loads (k. W) 4, 173. 00 Pump Energy (k. W) 447. 21 Total Cooling Loads (k. W) (1)＋(2) 4, 620. 21 Cooling Energy (k. W) 1, 071. 39 Energy Consumption of Pump (k. W) 447. 21 (4)＋(5) 1, 518. 6 Energy of Per unit (6)/ Volume (k. W/m 3) 1. 35 Energy of Per Cooling Loads (6)/(1) (k. W/k. W) 0. 36 PCW Consumption of Per Square (LPM /M 2) 1. 67 (2) (3) (4) (5) (6) (7) (8) Chiller (9) 3/5/2021 21

Per Square Area Energy Consumption of FAB 1 Average power consumption (k. W) 16, 793. 4 2 FAB total area (M 2) 11, 182. 0 3 Production area of FAB (M 2) 8, 717. 0 4 (1) /(3) (k. W/ M 2) 1. 5 5 (1) /(4) (k. W/ M 2) 1. 9 3/5/2021 22

Energy consumption benchmark Item REMARK 0. 7750 FFU Fresh air (k. W / m 3) 0. 0042 INCLUDING FAN POWER EXHAUST (k. W / m 3) 0. 0007 GENERAL 0. 0021 SOLVENT 0. 0010 ACID 0. 0021 ALKALINE Device cooling (k. W /k. W) Nitrogen (k. W / m 3) 0. 2209 Compressor (k. W / m 3) 0. 2250 PCW (k. W / m 3) 1. 3535 UPW (k. W / m 3) 9. 1502 CHILLER (k. W/k. W) 0. 1927 CHILLER COOLING TOWER + CHILLED PUMP +COOLIN WATER PUMP (kw/kw) 3/5/2021 0. 0640 23

外氣處理能源 Energy consumption of Fresh Air Energy Total Loads Energy per Average consumption of consumption unit Loads Per Fresh Air(max) of Fresh Air k. Wh/k. W year k. W / m 3 k. Wh/m 3 Cooling 0. 0136 0. 2567 1 0. 00350 Heating 0. 0032 0. 0147 1 0. 00005 Humidity 0. 0024 0. 0287 0. 3 0. 00002 Consumption of Per Square (CMM / m 2) Total 3/5/2021 1. 4726 Average of year 0. 0036 25

PCW節能設計 3/5/2021 36

製程冷卻水的節能 (1) Open system change to close system Open system 冷卻水溫度差△T為 3. 2℃，揚程為 56 M 冷卻水量則為 (18, 700 L/min)。 冷卻容量為 18, 700 LPM *3. 2*60 = 3, 590, 400 KCAL/Hr =1187. 3 RT 每日總耗電量為 10, 733 KWH 3/5/2021 37

製程冷卻水的節能 (3) Open system change to close system 節省電費: (10, 733 – 6, 816) * 365 * 1. 7 NTD/KWH (2002年平圴購電成本) =NTD 2, 430, 498 Per year 節約電力折算二氧化碳減少量: (10, 733 – 6, 816) * 365*0. 65/1000=929. 3噸/年 3/5/2021 39

Energy consumption of PCW(new) (flow) (1) Cooling Loads (k. W) 4, 174. 8 Pump Energy (k. W) 284. 00 Total Cooling Loads (k. W) (1)＋(2) 4, 458. 8 Cooling Energy (k. W) 1, 071. 85 Energy Consumption of Pump (k. W) 284. 00 (4)＋(5) 1, 355. 85 Energy of Per unit (6)/ Volume (k. W/m 3) 1. 44 Energy of Per Cooling Loads (6)/(1) (k. W/k. W) 0. 32 PCW Consumption of Per Square (LPM /M 2) 1. 40 (2) (3) (4) (5) (6) (7) (8) (9) Chiller 3/5/2021 40

改善效益: §降低排氣量: ACID: (5, 590 -4, 564)*60 = 61, 560 CMH AKALINE: (509 -450)*60 = 3, 540 CMH § 以MAU外氣平均耗能為 0. 0042 k. W/m 3計算 (61, 560+3, 540)*24*365*. 0042=2, 395, 159. 2 k. W/年 折算二氧化碳減少量為: 2, 395, 159. 2 k. W/年*0. 65/1000=1, 334. 4噸/年 3/5/2021 45

ENERGY OF EXHAUST (NEW) SYSTEN STATIC PRESSURE (Pa) KWH/ m 3 CMM / m 2 TYPE VOLUME (CMH) ENERGY CONSUMPTION (KWH/DAY) ACID 273, 840 6, 834 -744 0. 0010 0. 408 GENERAL 498, 120 8, 599 -1, 009 0. 0007 0. 742 ALKALINE 27, 000 1, 334. 50 -775 0. 0021 0. 040 SOLVENT 59, 918 3, 087 -300 0. 0021 0. 089 3/5/2021 46

SOLVENT熱能回收: (5) 液態天然氣(propane)比重: 1. 56 液態天然氣： 24, 320 kcal/m 3 =15, 589 kcal/kg 液態天然氣單價： 16. 6元/kg 液態天然氣用量： 442, 056. 8 kcal/hr / 15, 589 kcal/kg = 28. 3 kg/hr 節省費用： 28. 3 kg/hr *24 hr*16. 6元/kg *30(天) = 338, 241. 6元/月 折算二氧化碳減少量為: 442, 056. 8 kcal/hr*24*365/860=4502811. 1 KW/年*0. 65/1000=2926. 8噸/年 3/5/2021 53