Studies of LAICPMS on quartz glasses at different

Studies of LA-ICP-MS on quartz glasses at different wavelengths of a Nd: YAG laser 4조 김남영, 이근영, 김미형 J. S. Becker · D. Tenzler, Fresenius J Anal Chem (2001) 370 : 637– 640

목 차 � Ar-ICP � ICP-MS � LA-ICP-MS � Laser Ablarion(레이저 증발) � Nd: YAG Laser � 논문 해설 � References

Ar-ICP(유도쌍플라즈마) � Ar gas사용, 27. 13㎒영역 유도코일에 의해 플라즈마 발생 � 양이온과 전자로 이루어진 전도성 기체 Auxiliary gas Magnetic field Nebulizer gas + sample droplets Plasma Eddy current Plasma gas RF coil

Plasma Torch Gas Flow 세가지 Ar gas flow � Main/plasma gas flow : 15 L/min – Torch로의 접촉 방지 – Torch and RF coil의 냉각 � 보조 gas flow : 1 L/min – Plasma 점화 시 필요 – Plasma가 내려와 torch 용융 방지 � Nebulizer gas flow – Mist(aerosol)을 Plasma 속으로 도입

ICP-MS

ICP Plasma 과정 M+ Ion Atom 이온화 M 해리 Gas MX 증기화 Solid (MX)n 탈용매화 NAZ : Normal Analytical Zone IRZ : Initial Radiation Zone PHZ : Preheating Zone Aerosol (Solution) 분무 M(H 2 O)m+, X-

Vacuum에서 이온 들뜸 Skimmer cone Sampling cone Mach disk + Na + Na -e -e + + Ar -e Na Na Ar Ar -e -e -e + + Na Ar Ar Na -e Ar + -e -e Na -e Ar -e Auto Lens Shadow stop Vacuum Mach disk Vacuum Plasma

Quadrupole mass filter (사중극자 질량 분리)

Detector

LA-ICP-MS

고체시료 � 직접 시료 도입 � 전기가열 기화법 � Arc & Spark Ablation � Laser Ablation � Slurry Nebulization

LA-ICP-MS

Ablation site Si. O 2유리(λ = 266 nm, laser energy: 5 m. J)

Energy of laser beam 120 m. J 320 m. J wavelength of the laser λ = 1064 nm

Reference � 14. Becker JS, Pickhardt, Dietze H-J (2000) Mikrochim Acta 135: 71– 8 � DUSSUBIEUX, L. , VAN ZELST, L. , 2004, Applied Physics A 79, Materials Science & Processing, pp. 353 -356 � Detlef G¨unther. U, 1, Simon E. Jackson, Henry P. Longerich, Spectrochimica Acta Part B 54(1999) 381 -409

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