strip detector with surrounding guardring Dimension Details Entrance

strip detector with surrounding guardring Dimension Details Entrance window for x-rays 2415 um 6750 um (active edge boundaries) 6500 um active width (130 strips x 50 um)

Pad layout for strip detector w/surrounding Guard Ring Guard ring Pad opening 32 umx 192 um Pad opening: 32 umx 192 um Backside contact: opening 196 um x 46 um, both left and right bottom corner

Cross section of GR device Active device on support substrate 2415 um 50 um-100 um? 300 um (wafer-saw) Active device Support substrate 75 um (plasma diced)

Strip Detector w/Surrounding guard ring: entrance window “Dead” region = guard ring width + distance from guard ring to edge + ½ distance from guard ring to pixel =33 um Dead region boundary From guard ring to entrance window: 20 um Guard ring: 5 um wide From guard ring to pixel: 15 um

Old Baseline strip detector: 3 -sides guard ring Entrance window for x-rays 2445 um 6750 um (active edge boundaries) 6500 um active width (130 strips x 50 um) -2 outer strips tied to guard-ring

Cross section of old baseline device Active device on support substrate 2445 um 50 um-100 um? 300 um (wafer-saw) Active device Support substrate 75 um (plasma diced)

Old Baseline strip detector Strip pitch: 50 um 130 pixels, active width = 6500 um Pad opening: 32 umx 192 um Guard ring contact Backside contact: opening 196 um x 46 um, both left and right bottom corner

Old Baseline w/extra distance Topcell: top_extra_pad_distance Extra 350 um Total height 2775 um Guard ring contact Backside contact: opening 196 um x 46 um, both left and right bottom corner

Old Baseline entrance window (with or without extra pad distance) Pixel diffusion starts 50 um from entrance window, but “dead” region would be limited to sidewall p-diffusion on entrance window, ~1 um From pixel diffusion to entrance window: 50 um