State of the art in Microfabrication Jurriaan Schmitz

State of the art in Microfabrication Jurriaan Schmitz j. schmitz@utwente. nl -- www. utwente. nl/ewi/sc 1 -Dec-2010 Jurriaan Schmitz - VLSI Photonics Workshop 1

Contents § Microelectronics: Moore’s Law today § Technology advances inside the microchip § Other microfabricated devices § Prospects for radiation imaging TIPP 2014, Amsterdam

Images: Computer history museum The beginning: 1960 s 1958 Fairchild 1968 Fairchild First planar transistor 2 k. T SRAM chip 1965 Fairchild opamp 1962 RCA 16 T logic chip 1961 Fairchild 4 T 5 R flip-flop TIPP 2014, Amsterdam

Gordon Moore 1965 Transistors keep getting cheaper! § Smaller components § Bigger chips & wafers § Better skills “Moore’s Law”: The number of components on a chip doubles every year TIPP 2014, Amsterdam

Moore’s Law – chips, accelerators, fusion… +Brilliance of synchrotron sources, # channels in trackers… “technology driven progress” TIPP 2014, Amsterdam 5

GPU’s beat CPU’s How is Moore’s Law keeping up? 1 E+10 1 E+08 1 E+07 rs 1 E+06 1 E+05 ea r 1 E+04 ry D ub l in g 1 E+02 1 E+00 1949 2 pe 1 E+03 1 E+01 ng i l b ou r pe a ye Do Components per chip 1 E+09 1959 1969 1979 1989 1999 2009 TIPP 2014, Amsterdam 2019 Year

Moore’s Law: perspective § Transistor gate length scaling is slowing down (10% per generation) § 300 → 450 mm transition is delayed to 2020 § ITRS roadmap: multiple breakthroughs required by 2018 § … what happens next? TIPP 2014, Amsterdam

Microchips keep getting better § Design gap § Multicore processors § Transistor performance boosters TIPP 2014, Amsterdam

Contents § Microelectronics: Moore’s Law today § Technology advances inside the microchip § Other microfabricated devices § Prospects for radiation imaging TIPP 2014, Amsterdam

The CMOS chip Complexity is more than transistors alone: A cm 2 chip may contain ~20 km wires ~1010 contacts TIPP 2014, Amsterdam

Transistor evolution 1970 -2000: “the happy scaling era” § Keep everything the same, only miniaturize it: 1/√ 2 per generation Poly Si gate Silicon Intel Si. O 2 TIPP 2014, Amsterdam

Transistor evolution (2) 2000 -present: new technologies to boost performance Intel TIPP 2014, Amsterdam

Another performance booster: Permanent strain → active strain modulation § Switch strain on and off § Use piezoelectric material (e. g. PZT) § High on-current & low off-current T. Van Hemert et al. . , IEEE Trans. El. Dev. 2013 B. Kaleli et al. , IEEE Trans. El. Dev. 2014 TIPP 2014, Amsterdam

The art of microchips today § 1 -nm precision manufacturing § Atomary sharp interfaces § High-purity materials § Best mastered: § Aluminum, copper, tungsten § Silicon; Si. Ge alloys § Si. O 2, Hf. O 2, Si 3 N 4 Conventional wisdom: “If you can do it in CMOS, do it in CMOS” “If you can do it in silicon, do it in silicon” TIPP 2014, Amsterdam

Emerging technologies in microelectronics: Replacing good old silicon Ge PMOS In. Ga. As NMOS AIST Selective Ga. N on Si Ultra-thin semi-on-insulator LETI IBM TIPP 2014, Amsterdam

Emerging technologies in microelectronics: Replacing FLASH memory Competitors: • Resistive RAM • Phase-change RAM • STT Magnetic RAM TIPP 2014, Amsterdam

But meanwhile, FLASH is going 3 D TIPP 2014, Amsterdam

Contents § Microelectronics: Moore’s Law today § Technology advances inside the microchip § Other microfabricated devices § Prospects for radiation imaging TIPP 2014, Amsterdam

Microtechnology: more than chips Light Emitting Diodes Microfluidics Semiconductor lasers Photovoltaics Flat Panel Displays Sensors TIPP 2014, Amsterdam

Microtechnology: more than chips Steep market growth Ga. N-based technology Hetero-epitaxy Light Emitting Diodes Microfluidics Photovoltaics Haitz’Semiconductor Law lasers Flat Panel Displays Sensors TIPP 2014, Amsterdam

Microtechnology: more than chips High potential: Point-of-care medicine Internet-of-things Light Emitting Diodes Uses. Photovoltaics Semiconductor lasers mainstream technology Microfluidics Flat Panel Displays Sensors TIPP 2014, Amsterdam

…and sensors for radiation imaging! Microfabricated sensors in particle physics: § Silicon detectors § Charge-coupled devices § Silicon photomultipliers § CMOS-APS based detectors § … Focus on semiconductors for signal generation. § Scintillators? Gas? TIPP 2014, Amsterdam

In. Grid: a radiation imaging detector Time. Pix Images: Nikhef Al electrode SU-8 post Standard CMOS TIPP 2014, Amsterdam

Semiconductors on top of CMOS “TFA detector”, Andrea Franco et al. , IEEE Trans. Nucl. Sci. 2012 TIPP 2014, Amsterdam

Or vice versa? § Stack thin-film transistors on your sensor § Monocrystalline: 3 D electronics as developed e. g. by LETI (Batude et al. ) § Polycrystalline: e. g. I. Brunets et al. , IEEE Trans. El. Dev. 2009 § Low temp fabrication (~400 °C) U. Twente § High interconnect density >> TSV’s TIPP 2014, Amsterdam LETI

Advances in microfabrication: Consequences for Particle Physics § Miniaturized detector systems may boast § Improved resolution and speed § Reduced power consumption § Less X 0, lower mass § Onboard intelligence § “The interconnect benefit” § IC Future: new materials & lower-power circuits § New semiconductor materials: Ga. N, In. Ga. As, Ge, … § Performance in radiation imaging? TIPP 2014, Amsterdam

Thank you: § My coworkers at the University of Twente § Nikhef Detector R&D group § TIPP organizers § Dutch Technology Foundation STW, Min. Economic Affairs, FOM and EU TIPP 2014, Amsterdam

Questions? 1 -Dec-2010 Jurriaan Schmitz - VLSI Photonics Workshop 28

Semiconductor market: arguably the largest industry TIPP 2014, Amsterdam

CPU clock frequency § The transistor count on a microprocessor has not increased since 2005. § The clock frequency “ “ § The transistor gate length has hardly reduced since 2005. § Chipworks: only 9% per generation lately, not 30% § 90, 65, 45, 32, 22, 15 nm CMOS RC bottleneck in the chip’s wiring wikipedia TIPP 2014, Amsterdam

Trends like Moore’s “Law” are not forever Passenger airplanes But airplanes got much better since 1960! TIPP 2014, Amsterdam

Inside a Tri. Gate chipworks H 5 N 1 virus (same scale) TIPP 2014, Amsterdam