State of the art in Microfabrication Jurriaan Schmitz

State of the art in Microfabrication Jurriaan Schmitz j. schmitz@utwente. nl -- www. utwente. nl/ewi/sc 1 -Dec-2010 Jurriaan Schmitz - VLSI Photonics Workshop 1

Contents § Microelectronics: Moore’s Law today § Technology advances inside the microchip § Other microfabricated devices § Prospects for radiation imaging TIPP 2014, Amsterdam

Images: Computer history museum The beginning: 1960 s 1958 Fairchild 1968 Fairchild First planar transistor 2 k. T SRAM chip 1965 Fairchild opamp 1962 RCA 16 T logic chip 1961 Fairchild 4 T 5 R flip-flop TIPP 2014, Amsterdam

Gordon Moore 1965 Transistors keep getting cheaper! § Smaller components § Bigger chips & wafers § Better skills “Moore’s Law”: The number of components on a chip doubles every year TIPP 2014, Amsterdam

Moore’s Law – chips, accelerators, fusion… +Brilliance of synchrotron sources, # channels in trackers… “technology driven progress” TIPP 2014, Amsterdam 5

GPU’s beat CPU’s How is Moore’s Law keeping up? 1 E+10 1 E+08 1 E+07 rs 1 E+06 1 E+05 ea r 1 E+04 ry D ub l in g 1 E+02 1 E+00 1949 2 pe 1 E+03 1 E+01 ng i l b ou r pe a ye Do Components per chip 1 E+09 1959 1969 1979 1989 1999 2009 TIPP 2014, Amsterdam 2019 Year

Moore’s Law: perspective § Transistor gate length scaling is slowing down (10% per generation) § 300 → 450 mm transition is delayed to 2020 § ITRS roadmap: multiple breakthroughs required by 2018 § … what happens next? TIPP 2014, Amsterdam

Microchips keep getting better § Design gap § Multicore processors § Transistor performance boosters TIPP 2014, Amsterdam

Contents § Microelectronics: Moore’s Law today § Technology advances inside the microchip § Other microfabricated devices § Prospects for radiation imaging TIPP 2014, Amsterdam

The CMOS chip Complexity is more than transistors alone: A cm 2 chip may contain ~20 km wires ~1010 contacts TIPP 2014, Amsterdam

Transistor evolution 1970 -2000: “the happy scaling era” § Keep everything the same, only miniaturize it: 1/√ 2 per generation Poly Si gate Silicon Intel Si. O 2 TIPP 2014, Amsterdam

Transistor evolution (2) 2000 -present: new technologies to boost performance Intel TIPP 2014, Amsterdam

Another performance booster: Permanent strain → active strain modulation § Switch strain on and off § Use piezoelectric material (e. g. PZT) § High on-current & low off-current T. Van Hemert et al. . , IEEE Trans. El. Dev. 2013 B. Kaleli et al. , IEEE Trans. El. Dev. 2014 TIPP 2014, Amsterdam

The art of microchips today § 1 -nm precision manufacturing § Atomary sharp interfaces § High-purity materials § Best mastered: § Aluminum, copper, tungsten § Silicon; Si. Ge alloys § Si. O 2, Hf. O 2, Si 3 N 4 Conventional wisdom: “If you can do it in CMOS, do it in CMOS” “If you can do it in silicon, do it in silicon” TIPP 2014, Amsterdam

Emerging technologies in microelectronics: Replacing good old silicon Ge PMOS In. Ga. As NMOS AIST Selective Ga. N on Si Ultra-thin semi-on-insulator LETI IBM TIPP 2014, Amsterdam

Emerging technologies in microelectronics: Replacing FLASH memory Competitors: • Resistive RAM • Phase-change RAM • STT Magnetic RAM TIPP 2014, Amsterdam

But meanwhile, FLASH is going 3 D TIPP 2014, Amsterdam

Contents § Microelectronics: Moore’s Law today § Technology advances inside the microchip § Other microfabricated devices § Prospects for radiation imaging TIPP 2014, Amsterdam

Microtechnology: more than chips Light Emitting Diodes Microfluidics Semiconductor lasers Photovoltaics Flat Panel Displays Sensors TIPP 2014, Amsterdam

Microtechnology: more than chips Steep market growth Ga. N-based technology Hetero-epitaxy Light Emitting Diodes Microfluidics Photovoltaics Haitz’Semiconductor Law lasers Flat Panel Displays Sensors TIPP 2014, Amsterdam

Microtechnology: more than chips High potential: Point-of-care medicine Internet-of-things Light Emitting Diodes Uses. Photovoltaics Semiconductor lasers mainstream technology Microfluidics Flat Panel Displays Sensors TIPP 2014, Amsterdam

…and sensors for radiation imaging! Microfabricated sensors in particle physics: § Silicon detectors § Charge-coupled devices § Silicon photomultipliers § CMOS-APS based detectors § … Focus on semiconductors for signal generation. § Scintillators? Gas? TIPP 2014, Amsterdam

In. Grid: a radiation imaging detector Time. Pix Images: Nikhef Al electrode SU-8 post Standard CMOS TIPP 2014, Amsterdam

Semiconductors on top of CMOS “TFA detector”, Andrea Franco et al. , IEEE Trans. Nucl. Sci. 2012 TIPP 2014, Amsterdam

Or vice versa? § Stack thin-film transistors on your sensor § Monocrystalline: 3 D electronics as developed e. g. by LETI (Batude et al. ) § Polycrystalline: e. g. I. Brunets et al. , IEEE Trans. El. Dev. 2009 § Low temp fabrication (~400 °C) U. Twente § High interconnect density >> TSV’s TIPP 2014, Amsterdam LETI

Advances in microfabrication: Consequences for Particle Physics § Miniaturized detector systems may boast § Improved resolution and speed § Reduced power consumption § Less X 0, lower mass § Onboard intelligence § “The interconnect benefit” § IC Future: new materials & lower-power circuits § New semiconductor materials: Ga. N, In. Ga. As, Ge, … § Performance in radiation imaging? TIPP 2014, Amsterdam

Thank you: § My coworkers at the University of Twente § Nikhef Detector R&D group § TIPP organizers § Dutch Technology Foundation STW, Min. Economic Affairs, FOM and EU TIPP 2014, Amsterdam

Questions? 1 -Dec-2010 Jurriaan Schmitz - VLSI Photonics Workshop 28

Semiconductor market: arguably the largest industry TIPP 2014, Amsterdam

CPU clock frequency § The transistor count on a microprocessor has not increased since 2005. § The clock frequency “ “ § The transistor gate length has hardly reduced since 2005. § Chipworks: only 9% per generation lately, not 30% § 90, 65, 45, 32, 22, 15 nm CMOS RC bottleneck in the chip’s wiring wikipedia TIPP 2014, Amsterdam