STAR Cryoelectronics Celebrating 20 Years Founded 1999 12

STAR Cryoelectronics – Celebrating 20 Years • Founded 1999, 12 full-time employees • 8, 000 sq-ft facility with 2, 650 sq-ft cleanroom • LTS and HTS dc SQUID sensors • pc. SQUID™ - Advanced PC-based SQUID readout electronics • Mr. SQUID® Educational Demonstration System • Custom SQUID and thin-film fabrication services • Woven loom and superconducting flex cables

Cryogen-Free ADR Cryogenic Systems • Two cryogen-free ADR cryostat models for R&D • Energy dispersive spectrometers based on TES microcalorimeter detectors for X-ray microanalysis • High-resolution X-ray spectrometers based on Ta STJ detectors for synchrotron science applications ADR Control Electronics 112 -pixel STJ spectrometer for synchrotron science DRC-200 ADR Cryostat MICA-1600 Spectrometer for X-Ray Microanalysis

Thin-Film Facilities • • • Three multi-target sputter deposition systems (Lesker and Uni. Film Tech. ) Configured for dc and rf sputtering, 2", 3", 4" and 6" wafers In situ ion mill for controlled pre-sputter etch, film patterning 99% film thickness uniformity over entire wafer Reactive Co-Evaporation (RCE) system for Mg. B 2 films Two thermal evaporators (Bi, Al, Pb); magnetron sputter system for magnetic alloys Ion and Plasma Technologies PECVD system for oxide and nitride Plasma-Therm 790 Reactive Ion Etch (RIE) system Etch up to 8” wafers; config. with CF 4, SF 6, C 4 F 8, CHF 3, O 2, Ar, H Ion Tech Ar ion mill with PBN, up to 6" wafers Technics PE-II for oxygen plasma ash and descum, up to 8" wafers STS Multiplex ICP 6" DRIE; Xe. F 2 etcher for Si micromachining, up to 6" wafers Dektak III Step Profilometer; FSM 8800 Thin Film Stress Gauge; Hitachi S-4800 II SEM; Tencor 6200 Surfscan

Photolithography • Brewer Science 100 Coater with multiple auto-dispense controls Chucks for 6", 4", 3", and 2" wafers, 1 cm 2 substrates • AB-M Contact Mask Aligner Tooling for 6", 4", 3", 2", 1 cm 2 substrates, capability for up to 8" wafers Sub-micron resolution, better than 0. 5 micron accuracy IR camera for backside alignment • Wet bench with Tek-Vac PRC-2000 Photoresist Curing System, and ultrasonic and DI dump rinse stations • • M 150 -PC UV Resist Cure Station Tencor Surf-Scan 6200 for defect mapping

LTS and HTS SQUID Processes LTS • Nb/Al-Al. Ox/Nb trilayer process, 100 A/cm 2 typical Jc • Au. Pd resistors, 1 W/sq typical sheet resistance at 4 K • • Si. O 2, Si 3 N 4 dielectrics • Standard processes compatible with 4″ and 6″ wafers • • Nb. Ti. N, Mo. Si film capabilitiies Ten-layer (SNEP) Josephson junction process Mg. B 2 film development underway HTS • YBCO single-layer dc SQUIDs on STO bicrystals

Sensor and Detector Development Capabilities (b) Transition Edge Sensor (TES) detectors on Si. N membranes, fabricated on 100 -mm diam. , 200 -mm thick Si wafers 1 cm x 1 cm vector magnetometer assembly cube Four-channel Series SQUID Array amplifier package assembly for TES detector readout (four 2 mm x 3 mm die) Miniature magnetometer assembly Nine-channel pickup loop chip (3 x 3 mm) on quartz rod with 90 degree superconducting wire bonds to Nb leads on side of rod LTS planar dc SQUID gradiometers

Standard LTS dc SQUIDs • Widest range of standard LTS dc SQUIDs commercially available • Small 2 mm 3 mm chip size • Wide input inductance range up to 2600 n. H • Lowest equivalent input current noise available (0. 3 p. A/Hz½ (SQ 2600)) • Feedback may be coupled to the SQUID for flux-lock operation or to the input circuit for current-lock operation (requires superconducting load) using standard feedback electronics • Fabricated using a robust and reliable Nb/Al-Al. Ox/Nb trilayer Josephson junction technology • Compact package option with integral RC shunt across screw-terminal input; may be easily exchanged or replaced in the field Screened SQUID Ind. Ldc Input Inductance Li Max. Load Inductance Feedback Coupling: Current-Lock Flux-Lock Input Coupling 1/Mi Flux Noise SF½ Input Current Noise SI½ Energy Resolution ec SQ 100 39 112 Infinite SQ 180 187 183 200 47 28 0. 93 3 2. 8 3. 9 49 12 0. 35 3 1 1 SQ 300 SQ 600 S SQ 680 SQ 1200 SQ 2600 91 188 134 110 188 307 651 723 1162 2585 300 Infinite 700 1200 Infinite 41 7. 4. 44 3 3 2. 3 50. 5 10. 4 0. 20 3 0. 6 1. 1 44 7. 0 0. 20 3 0. 8 1. 9 45 8. 5 0. 13 3 0. 5 1. 6 50 10. 4 0. 10 3 0. 3 1. 1 Unit p. H n. H µA/F 0 µF 0/Hz½ p. A/Hz½ F 10 -31 J/Hz

Standard HTS dc SQUID Magnetometers • Single-layer YBCO direct-coupled dc SQUID magnetometers • Standard package assembly or compact “button” package • M 1000: <100 f. T/Hz ½, 8. 7 mm 7. 45 mm OD, 3. 8 mm 2. 7 mm ID pickup loop • M 2700: <300 f. T/Hz ½, 2. 7 mm OD, 0. 9 mm ID pickup loop

HTS SQUID Array Development • Collaboration with Stuart Berkowitz, Out of the Fog Research (2011 -2012) • Transimpedance amplifiers using bicrystal junction SQUID arrays - two arrays on 10 mm x 10 mm chip, with integrated Au control lines - 200 SQUIDs, ~10 p. H, 7. 3 m. Vpp SQUID detail showing integrated Au control lines Au 10 mm x 12 mm package Au

Cryogen-Free ADR Cryostats DRC-100 Cryostat DRC-200 Cryostat • Cryogen-free ADR design with 0. 7 W or 1 W pulse tube cooler • Fully automated ADR control and temperature regulation • 5 T, 20 A superconducting magnet with vanadium permendur shield • Base temperature <50 m. K, stability <10 µKrms at 100 m. K • Remote rotary valve and vibration isolation at 300 K, 60 K, and 3 K

ADR Cryostats – Hardware and Control Software • Rack cabinet houses all cryostat control hardware – Lake Shore 372 for thermometry – STARCryo MC-20 ADR Magnet Controller – STARCryo PA-20 Power Amplifier – Rackmount computer and UPS • Control software for turn-key operation – Start regenerations using preset parameters – Start regulation – Monitor key system parameters

MICA-1600 EDS Spectrometer A next-generation energy-dispersive X-ray spectrometer (EDS) with the energy resolution of a wavelength dispersive spectrometer (WDS) MICA-1600 X-Ray spectrometer mounted on a Hitachi S-4800 FE SEM

STJ X-ray Spectrometer X-Ray Absorption (EAS) Spectroscopy, Soft X-Ray Beamlines • R&D 100 2014 Award Winner • Exclusively from STAR Cryoelectronics • High count rate capability, up to ~1 Mcps • High energy resolution, <5 e. V FWHM at 525 e. V • 36 - and 112 -pixel STJ detector arrays • Snouts can be mounted to a standard 2. 75” or 6” conflat port