Shipley October 2001 SHIPLEY A ROHM AND HAAS

Shipley 干膜制程艺培训 October , 2001 SHIPLEY A ROHM AND HAAS COMPANY

培训内容 u Shipley 及其干膜简介 u Laminar® 5038干膜的特性 u Laminar® 5038干膜的艺运用与控制 u 实践中常见问题的解决 SHIPLEY A ROHM AND HAAS COMPANY

Shipley 及其干膜简介 SHIPLEY A ROHM AND HAAS COMPANY

Shipley 简介 Morton Shipley 成像系列内层制造 SHIPLEY A ROHM AND HAAS COMPANY 外层制造 Lea. Ronal 金属化系列构形制造电子 & 业表面处理

Shipley 干膜简介 u 第一类：抗蚀或抗镀干膜 > 抗蚀干膜 l l 抗酸蚀干膜 ---- 801 Y 30, 801 Y 40, 102 J 30, 102 J 40 抗碱蚀干膜 ---- FL(20, 33 um), 1400(20, 30 um) > 抗镀干膜 l 抗镀铜/锡(锡铅)干膜 ---- KE(38, 50, 62 um), l 7700(30, 38, 50 um) 抗镀镍金干膜 ---- 5000(25, 33, 38, 50, 75 um), 7300(13, 20, 25, 30, 38, 50, 75 um) SHIPLEY A ROHM AND HAAS COMPANY

Shipley 干膜简介 u 第二类干膜 > 阻焊干膜 ---- Conformask 2515 u 第三类：先进的感光绝缘材 > LDI干膜 ---- Uitra. Direct 630 Ultra. Direct 730/740 > 运用于HDI及封装制造的干膜 ---- NIT 200 (25, 30 um), NIT 1025 SHIPLEY A ROHM AND HAAS COMPANY

Shipley 干膜产品的应用 SHIPLEY A ROHM AND HAAS COMPANY

Laminar® 5038干膜的特性 SHIPLEY A ROHM AND HAAS COMPANY

Laminar® 5038干膜的艺运用与控制 SHIPLEY A ROHM AND HAAS COMPANY

5038干膜的艺运用与控制表面处理 Copper - As Supplied Chemical Clean, 90 in Etch SHIPLEY A ROHM AND HAAS COMPANY 500 Grit Mechanical Scrub Combination Chem. /Mech. 320 Grit Mechanical Scrub Pumice Scrub

5038干膜的艺运用与控制贴膜 Cu++与羧酸基团作用 R C O R O H 2 O O CO Cu Cu O OH 2 O C O R SHIPLEY A ROHM AND HAAS COMPANY Cu++与未饱和的有机化合物作用 (生成双键) OL OCl Cl. O Cu O Cl o O OL Cu O O Cl LO Cu O OCl O L Cl

5038干膜的艺运用与控制贴膜速度对干膜填覆性的影响: L/S=8/10 mils , Depth=6 um Speed=1 m/min SHIPLEY A ROHM AND HAAS COMPANY Speed=2. 5 m/min

5038干膜的艺运用与控制贴膜膜下的碎片 SHIPLEY A ROHM AND HAAS COMPANY

5038干膜的艺运用与控制显影 u 浓度、PH、溶膜量之间的关系： CA R New Bath = 11. 3 - 11. 6 BO NA TE [CO 3]= ON B AR BIC E AT Dry Film Loading SHIPLEY A ROHM AND HAAS COMPANY p. H Spent Bath = 10. 2 -10. 4 Dry Film loading

5038干膜的艺运用与控制显影 SIDEWALL CONFIGURATION a) a) Over Exposed Under Developed b) b) Correct Exposure Correct Breakpoint c) c) Under Exposed Over D eveloped SHIPLEY A ROHM AND HAAS COMPANY