SES Wet Station Inspection Results KH Technology LLC

SES Wet Station Inspection Results KH Technology, LLC Cupertino, CA 95014, U. S. A. Oct 17, 2012 1 KH Technology, LLC.

SES Wet Stations for sale Equip. ID 2 Maker Model Process Inspecti on Results Location Status 1. WOS 02 SES (New list) Sugai special Organic Strip Station Good Kiheung Korea On Sale 2. WOSC B 5 (New list) SES 300 mm BW 3000 Organic (300 mm) Strip Station Good Kiheung Korea On Sale 3. WNSS 01 SES (5 Chem. bathes) PEGAS US Excellent Milpitas CA, U. S. A. On Sale 4. WOES 03 SES (5 Chem. Bathes) BW 2000 Pre Diffusion Station Excellent Milpitas CA, U. S. A. On Sale KH Technology, LLC. Nitride Strip Station

Equip. ID Maker Model process Serial No. Inspector SWOS 02 SES 200 mm Sugai Special Solvent Strip Station O-1996 Daniel K. Lee Summary of inspection results 3 KH Technology, LLC.

Packing List 4 KH Technology, LLC. SWOS 02

Bath configuration of SWOS 02 5 KH Technology, LLC. Main body of SWOS 02

Electric Rack and bath inside 6 KH Technology, LLC.

Equip. ID Maker Model process Serial No. Inspector WOSCB 05 SES 300 mm BW 3000 Solvent Strip Station HE 4072 A Daniel K. Lee Summary of inspection results 7 KH Technology, LLC.

Packing List 8 KH Technology, LLC. WOSCB 05

Main body & Blue boxes (parts)of WOSCB (SES BW 3000, 300 mm wet station) 9 KH Technology, LLC.

10 KH Technology, LLC.

WNSS 01 Inspection Results Equip. ID Maker Model process WNSS 01 SES PEGASUS Nitride Strip O-2006 Station (PR Strip) 5 Chemical bathes Summary of inspection results 11 KH Technology, LLC. Serial No. Inspector Daniel K. Lee

Packing List 12 KH Technology, LLC. WNSS 01

WNSS 01 Pictures of WNSS 01 Packing Status of WNSS 01 Bath Module, Plumbing 13 KH Technology, LLC. WNSS 01 open to be inspected Track

Blue Box --- Parts Box H 3 PO 4 Quartz bath 14 KH Technology, LLC. WNSS 01

Pictures of Electric Rack 15 KH Technology, LLC. WNSS 01

IPA Dryer Operation and Maint. Manual Komatsu DIW heater Packing tag of Komatsu DIW heater 16 KH Technology, LLC.

WOES 03 Inspection Results Equip. ID Maker Model process WOES 03 SES BW 2000 Pre diffusion clean 5 Chemical bathes Summary of inspection results 17 KH Technology, LLC. Serial No. Inspector Daniel K. Lee

WOES 03 Packing List 18 KH Technology, LLC.

Pictures of WOES 03 Packing Status of WOES 03 Bath Module, Plumbing 19 KH Technology, LLC. WOES 03 Electric Cable Bath Module, Plumbing

Blue Box --- Parts Box 20 KH Technology, LLC. WOES 03

Pictures of WOES 03 21 KH Technology, LLC. WOES 03

Pictures of WOES 03 22 KH Technology, LLC. WOES 03

Pictures of Loader Module 23 KH Technology, LLC. WOES 03