Semiconductor Curve Tracer Suitable for various semiconductor IV
Semiconductor Curve Tracer Suitable for various semiconductor I-V curve measurement such as IGBTs, MOS-FETs, Transistors, Diodes, etc. Curve tracer model: CS-10800 CS -10400 Curve tracer model: CS-5300 CS-5200 CS-3300 CS-3200 Curve tracer model: CS-5100 CS-3100 Iwatsu Test Instruments Corp. - Contribute to development of the power electronics – Curve tracer CS series 1
The Device MAP IPM IGBT MOSFET Device map : up to 10, 000 V/8, 000 A - Contribute to development of the power electronics – Curve tracer CS series 2
CS series applications on the Device MAP CS-10000 series (Custom made) CS-5000 series (Custom made) CS-3000 series Device map : up to 10, 000 V/8, 000 A - Contribute to development of the power electronics – Curve tracer CS series 3
What is measurement item of the curve tracers? The Semiconductor is that… IGBTs, MOSFETs, Transistors, Diodes, LEDs etc. Measurement is that… Semiconductors are evaluated by ”Current (I) - Voltage (V)” VF Vdss, Idss Vce(sat) VR RDS(on), Vth Igss For example, “Current - Voltage” characteristics of the MOSFET have four kinds of areas, ON area, OFF area, Saturation area and Breakdown area. Characteristics of these four areas can be observed by the Curve Tracer. - Contribute to development of the power electronics – Curve tracer CS series 4
Variation of measuring instruments for device tests Testers Source meters Curve Tracers Semiconductor parameter analyzers - Contribute to development of the power electronics – Curve tracer CS series 5
Measurement range of measuring equipments to be used for semiconductor measurement (1) Tester Semiconductor Parameter analyzer B 1505 Curve tracer CS-3000 series Source meter - Contribute to development of the power electronics – Curve tracer CS series 6
Measurement range of measuring equipments to be used for semiconductor measurement (2) - Tester - Curve tracer - Parameter analyzer - Source meter - Contribute to development of the power electronics – Curve tracer CS series 7
Breakdown Test: evaluation examples - Curve Tracer vs Tester - Results of breakdown test of IGBTs (1, 200 V spec. ) characteristics Breakdown == GOOD == Breakdown characteristics == Rejected == 1, 200 V 250μA Test result by a tester 1, 240 V/250 u. A == GOOD == - Contribute to development of the power electronics – Curve tracer CS series 8
Operability of instruments Curve Tracers Digital oscilloscope - Contribute to development of the power electronics – Tester Digitizer Curve tracer CS series 9
Front panel of the CS series Color LCD display & individual control knobs, excellent operability by buttons - Contribute to development of the power electronics – Curve tracer CS series 10
Historical Curve Tracers and IWATSU models (1 -2) Tektronix Curve Tracers (Discontinued) IWATSU Curve Tracers 371 A 3000 V/40 m. A, 30 V/400 A Option(50 V/1000 A) 370 A 2000 V/100 m. A, 16 V/20 A Leakage mode CS-3200: 3000 V/75 m. A, 40 V/400 A CS-3300: 3000 V/75 m. A, 40 V/1000 A CS-3100 3000 V/75 m. A, 30 V/15 A - Contribute to development of the power electronics – Curve tracer CS series 11
Historical Curve Tracers and IWATSU models (1 -2) Specifications High Voltage MODE (1) High Voltage MODE (2) High Current MODE (1) High Current MODE (2) Collector Supply MODE AC Rectified Sine DC LEAKAGE Step Generator Max. step no. Pulse width (HV) Pulse width (HC) Max. Data Point Time Axis Waveform Measurement point Display SWEEP MODE Data Storage Tektronix MODEL 371 A MODEL 370 A 3000 V/40 m. A 2000 V/100 m. A 300 V/4 m. A 16 V/20 A IWATSU CS-3300/3200 CS-3100 3000 V/75 m. A 30 V/ 15 A 30 V/400 A N/A 40 V/400 A 50 V/1000 A N/A 40 V/1000 A YES YES YES N/A YES 10 -step 20 -step 250 us Fixed 80 us to 300 us 40 us to 400 us 500 us Fixed N/A 40 us to 400 us 1024 fixed 20 to 1000 N/A Vbe/Vce/Ic Variable (View PULSE) Fixed 7. 0 -inch CRT 8. 4 -inch color LCD LIMITED UP/DOWN/COSTOM FDD USB/LAN - Contribute to development of the power electronics – N/A YES YES 20 -step 40 us to 400 us N/A 20 to 1000 Vbe/Vce/Ic Variable (View PULSE) 8. 4 -inch color LCD UP/DOWN/CUSTOM USB/LAN Curve tracer CS series 12
Historical Curve Tracers and IWATSU models (2 -1) KOKUYO Curve Tracers IWATSU Curve Tracers CS-3100 3000 V/75 m. A, 30 V/15 A TCT-2004 2000 V/75 W, 20 V/20 A - Contribute to development of the power electronics – Curve tracer CS series 13
Historical Curve Tracers and IWATSU models (2 -2) Specifications High Voltage MODE (1) High Voltage MODE (2) KOKUYO (KDK) TCT 2004 2000 V/100 m. A 20 V/20 A High Current MODE (1) High Current MODE (2) Collector Supply MODE AC Rectified Sine DC LEAKAGE Step Generator Max. step no. Pulse width (HV) Pulse width (HC) Max. Data Point Time Axis Waveform Measurement point Display SWEEP MODE Data Storage N/A YES YES N/A 10 -step 80 us to 300 us N/A 1024 fixed N/A Fixed 6. 0 -inch CRT LIMITED FDD IWATSU CS-3300/3200 CS-3100 3000 V/75 m. A 30 V/ 15 A 40 V/400 A 40 V/1000 A YES YES 20 -step 40 us to 400 us 20 to 1000 Vbe/Vce/Ic N/A YES YES 20 -step 40 us to 400 us N/A 20 to 1000 Vbe/Vce/Ic Variable (View PULSE) 8. 4 -inch color LCD UP/DOWN/COSTOM USB/LAN 8. 4 -inch color LCD UP/DOWN/CUSTOM USB/LAN 14
FEATURES of CS-3000/5000/10000 series curve tracers ■ CS-10800/CS-10400/CS-5300/CS-5200/CS-5100/ CS-3300 / CS-3200 / CS-3100 eight models line-up ■ Max. peak voltage at 10, 000 V (CS-10000 series) Max. peak voltage at 5, 000 V (CS-5000 series) Max. peak voltage at 3, 000 V (CS-3000 series) ■ Max. peak current at 8, 000 A(CS-10800) Max. peak current at 4, 000 A(CS-10400) Max. peak current at 1, 000 A(CS-5300, CS-3300) Max. peak current at 400 A(CS-5200, CS-3200) ■ 4 kinds of Collector supply MODE for High Voltage mode AC, Rectified Sine, DC, Leakage (with 1 p. A cursor resolution) ■ USB I/F for saving display image, waveform data (CSV) and measurement setup ■ LAN I/F for remote control - Contribute to development of the power electronics – Curve tracer CS series 15
General specifications of CS-3000 series MODEL CS-3100 CS-3200 CS-3300 Collector supply MODE High Voltage Mode (HV mode) Waveform AC, +/- Rectified Sine, +/-DC, +/-LEAKAGE Measurement Range Maximum peak current Max. peak voltage 75 m. A (150 m. A) 3, 000 V 750 m. A (1. 5 A) 7. 5 A (15 A) 300 V 30 V (Max. peak pulse current) High Current Mode (HC mode) Waveform Measurement Range +/- PULSE Max. peak current voltage 40 V 400 A 40 V 40 A Max. peak current voltage 40 V 1, 000 A 400 A 40 V 40 A 40 V - Contribute to development of the power electronics – Curve tracer CS series 16
General specifications of CS-5000 series MODEL CS-5100 CS-5200 CS-5300 Collector supply MODE High Voltage Mode (HV mode) Waveform AC, +/- Rectified Sine, +/-DC, +/-LEAKAGE Measurement Range Maximum peak current Max. peak voltage 25 m. A (25 m. A) 5, 000 V 750 m. A (1. 5 A) 7. 5 A (15 A) 300 V 30 V (Max. peak pulse current) High Current Mode (HC mode) Waveform Measurement Range +/- PULSE Max. peak current voltage 40 V 400 A 40 V 40 A Max. peak current voltage 40 V 1, 000 A 400 A 40 V 40 A 40 V - Contribute to development of the power electronics – Curve tracer CS series 17
General specifications of CS-10000 series MODEL CS-10400 CS-10800 Collector supply MODE High Voltage Mode (HV mode) Waveform Measurement AC, +/- Rectified Sine, +/-DC, +/-LEAKAGE Range Maximum peak current (Max. peak pulse current) 400 m. A (+DC only) 10, 000 V 75 m. A (150 m. A) 3, 000 V 750 m. A (1. 5 A) 7. 5 A (15 A) Max. peak voltage 300 V 30 V High Current Mode (HC mode) +/- PULSE Waveform Measurement Range 4, 000 A 60 V 8, 000 A 60 V 4000 60 V 4, 000 A 60 V 40 A 60 V Max. peak current voltage Max. peak current voltage 4000 400 - Contribute to development of the power electronics – Curve tracer CS series 18
Semiconductor Curve Tracer CS-3000 series Suitable for various semiconductor I-V curve measurement such as IGBTs, MOS-FETs, Transistors, Diodes, etc. Curve tracer model: CS-3300 & CS-3200 Curve tracer model: CS-3100 Iwatsu Test Instruments Corp. - Contribute to development of the power electronics – Curve tracer CS series 19
CS-3100 Curve Tracer Configuration of CS-3100 CS-3100 Main unit Fixture-S Option accessories for CS-3100 - Contribute to development of the power electronics – Curve tracer CS series 20
CS-3300 & CS-3200 Curve Tracer Configuration of CS-3300/3200 Main unit Fixture-M - Contribute to development of the power electronics – Curve tracer CS series 21
Measurement examples High Voltage MODE (HV) - Package Products - High Current MODE (HC) Cables + Patch panel + TO Type Test adaptor (Option) Cables + Small Alligator Clips (option) Power MOSFET IGBT Option IPM Power MOSFET Option - Contribute to development of the power electronics – Curve tracer CS series 22
CS-3000 applications on the Device MAP Curve Tracer CS-3200 /CS-3300 Curve Tracer CS-3100 Device map : up to 1, 000 V/500 A - Contribute to development of the power electronics – Curve tracer CS series 23
What is measurement item of the curve tracers? (2) ■ Evaluation of I-V characteristics ■ Comparison with catalog and actual performance - Contribute to development of the power electronics – Curve tracer CS series 24
Main features of CS-3000 series (1) ■ 4 Collector supply modes: AC, +/- Rectified Sine, +/-DC, +/-LEAKAGE AC +DC +Rectified Sine +LEAKAGE - Contribute to development of the power electronics – Curve tracer CS series 25
Main features of CS-3000 series (2) ■ Max. 20 -step measurement Step Generator: Available to set 0 to 20 step for more efficient measurements - Contribute to development of the power electronics – Curve tracer CS series 26
Main features of CS-3000 series (3) ■ Sweep functions Sweep at 1, 000 points Sweep at 50 points (less visible) Maximum display points setting from 20 points up to 1, 000 points for more efficient measurements - Contribute to development of the power electronics – Curve tracer CS series 27
Unique functions of CS-3000 series (1) ■ Graphical configuration block diagram for the measurement system Conf. 1 for I-V Curve measurement Conf. 3 for BREAK DOWN measurement - Contribute to development of the power electronics – Curve tracer CS series 28
Unique functions of CS-3000 series (2) ■ Two of viewing modes: TRACE & WAVE TRACE mode (I-V Curve display) WAVE mode (Vbe, Vce, Ic) - Contribute to development of the power electronics – Curve tracer CS series 29
Unique functions of CS-3000 series (3) ■ Variable setting conditions: Large current mode: 1. Output pulse: variable from 50μs to 400μs 2. Measurement points: 20 points to 1, 000 points 3. Repetitive cycle: variable from 80 ms to 1, 000 ms - Contribute to development of the power electronics – Curve tracer CS series 30
Built-in option program of CS-3000 series ■ CS-800 Semiconductor Parameter search (option) LIMIT SWEEP Semi-Automatic SWEEP measurement can be performed after set the Vertical and Horizontal limit Example of MOSFET breakdown voltage measurement Vth/h. FE SETUP Semi-Automatic Vth, h. FE measurement can be performed after set the parameters Example of MOSFET Vth measurement - Contribute to development of the power electronics – Curve tracer CS series 31
Software options of CS-3000 series ■ CS-810 Semiconductor Parameter measurement (option) Option program used with a PC (option) and a main unit that equipped CS -800 via LAN. GO/NOGO judgment can be performed. ■Reference level setting level 1: <1 u. A level 2: <10 u. A level 3: <20 u. A - Contribute to development of the power electronics – Curve tracer CS series 32
Reference waveform of CS-3000 series << Display example >> Yellow-colored line = Current waveform Gray-colored lien = Reference waveform - Contribute to development of the power electronics – Curve tracer CS series 33
USB interface of CS-3000 series Data image of “CSV” format. “CSV” = comma separated value Measurement results can be saved to USB device as CSV format. Configuration = BSGEN HCHV_Unit = HC Collect_Mode = +HC Variable = 21. 6% ~ 0. 0% Stepgen_Mode = PULSE Stepgen_Range = +2 V Stepgen_Offset = +4. 00 V Vbe_Acq. Range = 5. 00 V / div Vce_Acq. Range = 1. 00 V / div Ice_Acq. Range = 10. 0 A / div Sweep_Mode = COLLECTOR step 0 0 0 0 0 0 1 1 index 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 0 1 2 3 Vbe 4. 003 4. 007 4. 003 4. 014 4. 007 4. 003 4. 007 4. 01 4. 007 4. 003 6 6 - Contribute to development of the power electronics – Vce -0. 021 0. 525 1. 069 1. 602 2. 095 2. 547 2. 797 3. 145 3. 59 4. 129 4. 381 4. 734 5. 167 5. 802 6. 188 6. 697 7. 228 7. 754 8. 283 8. 774 9. 999 -0. 018 0. 523 1. 01 1. 55 Ic 0. 53 -0. 17 -0. 58 0. 25 -0. 57 -0. 17 0. 3 0. 1 -0. 71 -0. 69 -0. 18 -0. 82 -0. 03 -0. 32 0. 06 0. 16 -0. 4 -0. 5 -0. 32 -0. 53 -0. 65 0 0. 63 0. 16 Curve tracer CS series 34
Remote control tool free ware (via LAN I/F) CS-3000 Curve tracers are capable to output results and settings into USB port on front panel. Also a copy of the screen, measurement results in the CSV format, and other data can be directly transferred to the PC via LAN I/F. CSV SETUP COPY COMMAND - Contribute to development of the power electronics – Curve tracer CS series 35
Curve tracer I/F option CS Fix connector box CS to Prober Cable (Custom made) CS side connector Prober side connector - Contribute to development of the power electronics – Curve tracer CS series 36
Curve tracer applications: Fixture with a HOT PLATE = room temperature to 200 -digree = - Contribute to development of the power electronics – Curve tracer CS series 37
CS series applications on the Device MAP CS-10000 series (Custom made) CS-5000 series (Custom made) CS-3000 series Device map : up to 10, 000 V/8, 000 A - Contribute to development of the power electronics – Curve tracer CS series 38
Thank you for your interests! - Contribute to development of the power electronics – Curve tracer CS series 39
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