SEMI TECHNICAL EDUCATION PROGRAM SEMI S 2 and

SEMI TECHNICAL EDUCATION PROGRAM – SEMI S 2 and What is New For 2006 SEMI S 2 Revision Management SEMICON West 2006 James Beasley Intel Assignee to International SEMATECH ESH Division Jan 1, 2006 Event, Venue information

Background – SEMI S 2 Revision • SEMI regulations require review of EHS Guidelines every 5 years • Technical and editorial changes can be approved by the EHS Committee on any ballot cycle – 7 ballot cycles a year 2 Jan 1, 2006 Event, Venue information

Problem Statement • After the publication of SEMI S 2 -0200 equipment and end users became frustrated with the EHS Committee’s perceived inability to control revision of SEMI S 2 – S 2 -93 A, S 2 -0200 E, S 2 -0302, S 21102, S 2 -0303, S 2 -0703 • Difficult to control purchase and configuration specs • MESSC was asked in September 2002 to develop a solution to allow the EHS committee to manage technical changes to SEMI S 2 – Solution would be consistent with SEMI Regulations – Editorial changes could continue with letter changes, i. e. S 2 -93, S 2 -93 A, etc. 3 Jan 1, 2006 Event, Venue information

Proposed Solutions • Option 1: Effectivity and Withdrawal Dates – Line item change processed under the current methods with the exception that the balloted line item would also have an "Effectivity Date" and "Withdrawal Date" identified as part of the balloted text. – Once the line-item has passed the ballot, the document will be updated, HOWEVER, the original text would remain in the original document until the balloted "Withdrawal Date". – No impact on existing Standards regulations. EXAMPLE: Line item change to Section X. Y. Z {Existing Text} This section will be withdrawn on MM/YYYY Section X. Y. Z. A {Balloted Change} This section has an Effectivity Date of MM/YYYY and will replace the existing X. Y. Z text. 4 Jan 1, 2006 Event, Venue information

Proposed Solutions • Option 2: Publish balloted and approved changes as Related Information attached to current revision of S 2 – Would have required implementation of a regulation change – Voting on each item twice raised the possibility that a particular change may not be accepted for the overall text of the revised document • This option was not selected 5 Jan 1, 2006 Event, Venue information

Dates of Effectivity for S 2 Revisions • Benefit of “Dates of Effectivity” approach – EHS Committee determines the effectivity date of balloted text without impeding the regular process of balloting and approving changes within existing SEMI regulations – Approved Changes are easily available for industry readiness • 6 changes were successfully integrated into S 2 -0703 with Delayed Effectivity (new version S 20706) 6 Jan 1, 2006 Event, Venue information