SEMI S 2 Section 26 Laser Safety SEMI

SEMI S 2 Section 26 Laser Safety SEMI S 2 Section 26 Changes Laser Data Sheet John O’Donnell Texas Instruments Jan 1, 2006 Event, Venue information

Objective • Communicate the rationale for and changes to the laser safety section of SEMI S 2 0706 2 June 13, 2006 SEMI Step

Laser Safety Task Force • The Laser Task Force scope was limited to: – Relocating needed information from Related Information 9 (Laser Data Sheet) to an Appendix (7) – Making suitable changes to Section 26 and RI-9 to reflect the relocation of the Laser Data Sheet – Addressing any international or regulatory changes. • This move would provide the equipment users needed information about lasers in equipment 3 June 13, 2006 SEMI Step

Rationale for Change • The original purpose of the S 2 Laser Data Sheet was to provide a standard format to communicate laser equipment hazards and control measures information to the user. • Located in Related Information 9, the Laser Data Sheet was not being used. • The change to S 2 was made to get appropriate laser information to the people that need to use it to establish control measures during the use, maintenance, and service of semiconductor manufacturing equipment • Equipment users needed access to laser hazard and control data in order to implement effective laser safety programs. 4 June 13, 2006 SEMI Step

Rationale for Change • The User Perspective – A standard format would communicate critical information on laser hazards and controls needed for installation and maintenance personnel to control laser hazards. • Efficient Use of Resources – Suppliers perform a laser hazard analysis once per model – Every user would have to perform an analysis for each tool that they have from every equipment manufacturer • ESH has few enough resources and needs to maximize the ability to provide a safe & healthy workplace 5 June 13, 2006 SEMI Step

Who is affected? • Equipment manufacturers – Laser equipment requirements in SEMI S 2, Section 26. • Third Parties – Evaluate control measures and laser hazards documented on Laser Data Sheet • Device manufacturers – Source of laser safety information to use in workplace laser safety programs 6 June 13, 2006 SEMI Step

From Information To Requirement • The original Laser Data Sheet was published in Related Information 9 but remained there unused by equipment manufacturers • The laser line item required essential laser data to be documented on the Laser Data Sheet. • This change was approved in March 2004, but the effective date was delayed until July 2006 • Effective July 1, 2006, the Laser Data Sheet is Appendix 7, documentation for requirements of Section 26 7 June 13, 2006 SEMI Step

Laser Data Sheet 8 June 13, 2006 SEMI Step

Section 26 Changes • 26. 1 Requirement for laser product class and applicable standard documented on Laser Data Sheet • 26. 1. 1 Alternate formatting option for Laser Data Sheet • 26. 1. 3 Laser and equipment labeling requirement 9 June 13, 2006 SEMI Step

Section 26 Changes (continued) • 26. 1. 4 Maintenance and service task information with access above MPE • 26. 1. 4. 1 Information on laser hazards, control measures and PPE documented on Laser Data Sheet. (Exceptions: Proprietary Information, Stand Alone system components) • 2. 1. 5 Identification of laser source locations in user documentation 10 June 13, 2006 SEMI Step

Summary • Laser equipment classification and hazard information is now a requirement • Maintenance and Service task hazards and control measures are required to be documented • Laser Data Sheet provides format to document required information • This change was approved over 2 years ago 11 June 13, 2006 SEMI Step