Secondary Ion Mass Spectroscopy Mass Spectroscopy Outline l

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Secondary Ion Mass Spectroscopy & Mass Spectroscopy 원리 반도체 및 나노 응용 연구실 발표자:

Secondary Ion Mass Spectroscopy & Mass Spectroscopy 원리 반도체 및 나노 응용 연구실 발표자: 이성우

Outline l l l 개략도 SIMS의 종류 MS MS의 분석 방법 l l l

Outline l l l 개략도 SIMS의 종류 MS MS의 분석 방법 l l l Primary ion beam source 질량 분석기의 종류 SIMS / MS 장, 단점

Sims / Ms Spectroscopy 개략도 Sample Ion source • Ar • Xe • N

Sims / Ms Spectroscopy 개략도 Sample Ion source • Ar • Xe • N 2 • Cs+ Mass Spectroscopy • TOF • Quadrupole • Magneticsector Detector • Micro-channel Plate • Electron Multiplier • Faraday cup • PEM Data System • PC’s

Dynamic SIMS Secondary ion counts A silicon sample containing a boron implant (secondary ion

Dynamic SIMS Secondary ion counts A silicon sample containing a boron implant (secondary ion intensity versus sputtering) Times (sec)

Static SIMS Negative mass spectrum from polyphenylene sulfide

Static SIMS Negative mass spectrum from polyphenylene sulfide

Static SIMS Positive mass spectrum from polyethylene

Static SIMS Positive mass spectrum from polyethylene

Primary ion beam source Ø Source 주로 비활성기체를 사용 Positive charged ions (Ar+, Xe+)

Primary ion beam source Ø Source 주로 비활성기체를 사용 Positive charged ions (Ar+, Xe+) Negative charged ions (Ar , Xe) or N 2+, O 2+ , Cs+등을 사용

Ion Association Ion pair formation Ion Association IonIon Association Ion pair formation Ion Association Ion
Mass Spectrometry Inlet system Ion Source Mass IonMass Spectrometry Inlet system Ion Source Mass Ion
Mass Spectrometry MS Secondary ion mass spectrometry SIMSMass Spectrometry MS Secondary ion mass spectrometry SIMS
chemicallygated ion channel ligandgated ion channel transmittergated ionchemicallygated ion channel ligandgated ion channel transmittergated ion
Ion Beam Lithography Focused Ion Beam Ion ProjectionIon Beam Lithography Focused Ion Beam Ion Projection
ION IMPLANTATION Ion Implantation Process What is IonION IMPLANTATION Ion Implantation Process What is Ion
COMMON ION EFFECT COMMON ION an ion commonCOMMON ION EFFECT COMMON ION an ion common
Ion Beam Lithography Focused Ion Beam Ion ProjectionIon Beam Lithography Focused Ion Beam Ion Projection
Mass Spectroscopy 2 RGA Mass Spectroscopy II ApplicationsMass Spectroscopy 2 RGA Mass Spectroscopy II Applications
Mass Spectroscopy 2 RGA Mass Spectroscopy MS ApplicationsMass Spectroscopy 2 RGA Mass Spectroscopy MS Applications
molecular ion peak mass spectrometryMS isotopic ion peakmolecular ion peak mass spectrometryMS isotopic ion peak
Atomic Mass and Formula Mass Atomic mass massAtomic Mass and Formula Mass Atomic mass mass
4 Secondary Data Nature of Secondary Data Secondary4 Secondary Data Nature of Secondary Data Secondary
Secondary Storage Management Hank Levy Secondary Storage SecondarySecondary Storage Management Hank Levy Secondary Storage Secondary
Reactive Ion Etching Outline Reactive Ion Etching RIEReactive Ion Etching Outline Reactive Ion Etching RIE
ION EXCHANGE Presentation Outline n Ion Exchange ReactionsION EXCHANGE Presentation Outline n Ion Exchange Reactions
Secondary Ion Mass Spectrometry A look at SIMSSecondary Ion Mass Spectrometry A look at SIMS
Secondary Ion Mass Spectrometry and Remote Sensing inSecondary Ion Mass Spectrometry and Remote Sensing in