Scanning Electron Microscopy What is an SEM What

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Scanning Electron Microscopy

Scanning Electron Microscopy

What is an SEM?

What is an SEM?

What is an SEM? • A Scanning Electron Microscope is an instrument that investigates

What is an SEM? • A Scanning Electron Microscope is an instrument that investigates the surfaces of solid samples by using a beam of electrons in a vacuum.

What is an SEM? • A Scanning Electron Microscope is an instrument that investigates

What is an SEM? • A Scanning Electron Microscope is an instrument that investigates the surfaces of solid samples by using a beam of electrons in a vacuum. • The image is generated by the secondary emissions from the sample.

Advantages of using an SEM instead of a light microscope

Advantages of using an SEM instead of a light microscope

Advantages of using an SEM instead of a light microscope • Imaging – high

Advantages of using an SEM instead of a light microscope • Imaging – high resolution (because of short wavelength) - >1. 4 nm

Advantages of using an SEM instead of a light microscope • Imaging – high

Advantages of using an SEM instead of a light microscope • Imaging – high resolution (because of short wavelength) - >1. 4 nm – Secondary electron imaging for topology

Advantages of using an SEM instead of a light microscope • Imaging – high

Advantages of using an SEM instead of a light microscope • Imaging – high resolution (because of short wavelength) - >1. 4 nm – Secondary electron imaging for topology – Backscatter electron imaging for chemistry

Advantages of using an SEM instead of a light microscope • Imaging – high

Advantages of using an SEM instead of a light microscope • Imaging – high resolution (because of short wavelength) - >1. 4 nm – Secondary electron imaging for topology – Backscatter electron imaging for chemistry – High depth of field

Advantages of using an SEM instead of a light microscope • Imaging – high

Advantages of using an SEM instead of a light microscope • Imaging – high resolution (because of short wavelength) - >1. 4 nm – Secondary electron imaging for topology – Backscatter electron imaging for chemistry – High depth of field • Elemental Analysis – EDXS (Energy-dispersive X-ray analysis)

Advantages of using an SEM instead of a light microscope • Imaging – high

Advantages of using an SEM instead of a light microscope • Imaging – high resolution (because of short wavelength) - >1. 4 nm – Secondary electron imaging for topology – Backscatter electron imaging for chemistry – High depth of field • Elemental Analysis – EDXS (Energy-dispersive X-ray analysis) • Structural Analysis – EBSD (Electron Back-scatter Diffraction analysis)

Advantages of using an SEM instead of a light microscope • Imaging – high

Advantages of using an SEM instead of a light microscope • Imaging – high resolution (because of short wavelength) - >1. 4 nm – Secondary electron imaging for topology – Backscatter electron imaging for chemistry – High depth of field • Elemental Analysis – EDXS (Energy-dispersive X-ray analysis) • Structural Analysis – EBSD (Electron Back-scatter Diffraction analysis) • Ease of sample preparation since most SEMs only require the sample to be conductive.

Sample Constraints

Sample Constraints

Sample Constraints • Must fit in chamber (!)

Sample Constraints • Must fit in chamber (!)

Sample Constraints • Must fit in chamber • Must be compatible with vacuum (even

Sample Constraints • Must fit in chamber • Must be compatible with vacuum (even for ESEM samples)

Sample Constraints • Must fit in chamber • Must be compatible with vacuum (even

Sample Constraints • Must fit in chamber • Must be compatible with vacuum (even for ESEM samples) • Must have conductive surface (not necessary for ESEM samples)

JEOL 5910 General-Purpose SEM

JEOL 5910 General-Purpose SEM

FEI XL 30 FEG-ESEM

FEI XL 30 FEG-ESEM

JEOL 6320 High-resolution SEM

JEOL 6320 High-resolution SEM

Secondary Electron Images Give information about sample's topography

Secondary Electron Images Give information about sample's topography

BSE Images Give information about sample's chemistry

BSE Images Give information about sample's chemistry

EDS Spectra Give information about sample's composition

EDS Spectra Give information about sample's composition

X-Ray Maps Give information about elemental distribution in the sample SE Cu Pb Sn

X-Ray Maps Give information about elemental distribution in the sample SE Cu Pb Sn

Electron beam strikes a crystalline material tilted at 70° Backscatter patterns composed of intersecting

Electron beam strikes a crystalline material tilted at 70° Backscatter patterns composed of intersecting bands Indexable patterns

Center for Materials Science and Engineering Electron Microscopy SEF Location: 13 -1012 Normal Working

Center for Materials Science and Engineering Electron Microscopy SEF Location: 13 -1012 Normal Working Hours: 8: 30 am – 4: 45 pm on M-F 24 hr accessible for evening/weekend users (not for undergraduates) Staff: Dr. Anthony (Tony) Garratt-Reed (TEM, STEM) Dr. Yong Zhang (TEM, STEM) Mr. Patrick Boisvert (SEM, Microtome)