Resonant Frequencies of a Nanoscale Fractal Resonator V

Resonant Frequencies of a Nanoscale Fractal Resonator V. Tzanov 1 , J. Llobet 1 2, 3 , F. Torres 1 , F. Perez-Murano 3 , N. Barniol 1 Faculty of Electronics Engineering, Universitat Autonoma de Barcelona (UAB), Spain 2 International Iberian Nanotechnology Laboratory (INL), Braga, Portugal 3 Institut de Microelectronica de Barcelona (IMB-CNM CSIC), Spain Contact: vassiltzanov@gmail. com Linkedin: www. linkedin. com/in/vtzanov/ This work is supported by P-SPHERE project (UAB), COFUND-2014 (H 2020 Marie-Curie Actions) and the TEC 2015 -66337 -R (MINECO/FEDER) project, Spanish Government and EU.

Si-based electromechanical fractal nanoresoantor 2µm Vac+Vdc

Laser-doppler vibrometer characterisation Q=518 Q=806 Q=937 Q=544 Q=739 MHz

Eigenfrequency study with COMSOL * ** * Tuning piezoresistive transduction in nanomechanical resonators by geometrical asymmetries, Appl. Phys. Lett. 2015, 107, 073104 ** Multi-Frequency Resonance Behaviour of a Si Fractal NEMS Resonator, Nanomaterials 2020, 10(4), 811

COMSOL models of untensioned structure

Summary By using COMSOL FEM software we have analysed important material properties and features of the complex geometry of our NEMS device. - The Young modulus of the NEMS resonator was predicted. - We have shown how the symmetry of the device affects the frequency spectrum. - We have shown how the residual stress affects the distribution of the mechanical modes. - It was numerically confirmed that the piezoresistivity can be used for electrical characterisation of our fractal nanoresonaor. Such an electrical detection of resonant peaks is a key feature that allows practical applications.