RECFA NIKHEF Industrial Collaboration PANalytical Techtransfer Applications and

RECFA @ NIKHEF Industrial Collaboration: PANalytical Tech-transfer, Applications and new Developments in X-ray Materials Analysis PANalytical K. Bethke, R. de Vries, V. Kogan, J. Vasterink, R. Verbruggen, J. Bethke P. Kidd, P. Fewster PAN Sussex Research RECFA Meeting, Sept. 05 1

Outline • • • Background / Company Medipix Tech-Transfer First highlights on detector properties Expectations for XRD applications New EUREKA project “RELAXD” Conclusions (Relevance of collaborations, funding) RECFA Meeting, Sept. 05 Sept. 05 2 2

Main Activities X-ray Diffraction and Fluorescence for Science and Industry Winning by Sharing know-how and experience in X-ray diffraction and fluorescence RECFA Meeting, Sept. 05 Sept. 05 3 3

Main Activities • XRF (Industry and Research) – – – • Elemental Analysis (qualitative and quantitative) Applications: Cement, Petrochemical, Plastics, Steel, Aluminium, Environmental, Geology Automation XRD (Research and Industry) – – Phase Analysis (qualitative and quantitative) Some applications: Pharmaceuticals, Cement, Minerals Advanced Materials, Thin Films and Semiconductors, Nanotech, Automation RECFA Meeting, Sept. 05 Sept. 05 4 4

Product range XRF (Elemental Analysis) Mini. Mate Cubi. X Axios Mini. Pal 2 Venus RECFA Meeting, Sept. 05 Sept. Magi. X FAST 05 5 5

(First) Collaboration XR F & D RECFA Meeting, Sept. 05 Sept. 05 6 6

Key Modules RECFA Meeting, Sept. 05 Sept. 05 7 7

XRD: X’Pert PRO MRD • Advanced X-ray analysis for new materials research and development • For thin films, semiconductors and microstructures, nano-research RECFA Meeting, Sept. 05 Sept. 05 8 8

X’Pert PRO MRD XL • X-ray analysis for research and process development of advanced materials • Analysis of wafers up to 300 mm diameter • Automatic wafer loading RECFA Meeting, Sept. 05 Sept. 05 9 9

X’Pert PRO MRD XL • X-ray analysis for research and process development of advanced materials • Analysis of wafers up to 300 mm diameter • Automatic wafer loading RECFA Meeting, Sept. 05 Sept. 05 10 10

X’Celerator • The standard in X-ray powder diffraction • Speed and resolution • Rapid data collection of complete powder diffractograms RECFA Meeting, Sept. 05 Sept. 05 11 11

CSI MIAMI • FORENSIC SCIENCE RECFA Meeting, Sept. 05 Sept. 05 12 12

Outline • • Background Medipix Tech-Transfer First results on detector properties Expectations for XRD applications First results of Medipix in XRD New EUREKA project “RELAXD” Conclusions RECFA Meeting, Sept. 05 Sept. 05 13 13

Acknowledgement NIKHEF team Jan Visschers Hans Verkooijen, Ton Boerkamp CERN team Michael Campbell Xavier Llopart Erik Heijne CERN ETT Marilena Streit-Bianchi Beatrice Bressan Ministry EZ / Netherlands RECFA Meeting, Sept. 05 Leader Medipix group @ NIKHEF + partnership new RELAXD project Chip design PANalytical Spokesman Medipix coll. K. Bethke, R. de Vries, Tech-transfer V. Kogan, J. Office Vasterink, +combined exhibitions R. Verbruggen, J. Bethke IEEE/Rome, Salon Paris Funding RELAXD IS 051 010 P. Kidd, P. Fewster PAN Sussex Research 14

PARIS: Salon de la Recherche et l’Innovation RECFA Meeting, Sept. 05 Sept. 05 15 15

Medipix Collaboration - Univ + INFN Cagliari - CEA-LIST Saclay - CERN Genève - Univ d'Auvergne - Univ Erlangen - ESRF Grenoble - Univ Freiburg - Univ Glasgow - IFAE Barcelona - Mitthoegskolan Sundsvall - MRC-LMB Cambridge - Univ + INFN Napoli - NIKHEF Amsterdam - Univ + INFN Pisa - FZU CAS Prague - IEAP CTU Prague - SSL Berkeley RECFA Meeting, Sept. 05 Sept. 05 Spokespersons: Michael CAMPBELL CERN Jan VISSCHERS NIKHEF 16 16

Medipix 2 chip / detector RECFA Meeting, Sept. 05 Sept. 05 17 17

Comparison with state-of-art detectors RECFA Meeting, Sept. 05 Sept. 05 18 18

First shot: direct beam RECFA Meeting, Sept. 05 Sept. 05 19 19

Direct beam Linear scale RECFA Meeting, Sept. 05 Sept. 05 Logarithmic scale 20 20

R&D: Medipix collaboration - PANalytical RECFA Meeting, Sept. 05 Sept. 05 21 21

Micro–high-resolution wafer mapping “Static” measurement geometry for wafer screening of Cd. Hg. Te diode arrays for thermal imaging cameras Signal peak <0. 25 photons/s Single 100 m sampled region X-rays <00 l> Background noise after 100 s count time ~0. 005 photons/s <624> Linear array Si Strip detector RECFA Meeting, Sept. 05 Sept. 05 Discrimination on every photon separates very weak scattering from random noise in measurement • Signal peak gets enhanced with counting time • Random residual noise statistically cancels with counting time • Results in an enhanced dynamic range 22 22

Still weaker signals; very small residual noise Signal peak ~0. 1 photons/s Single 50 m sampled region Background after 100 s count time <0. 002 photons/s RECFA Meeting, Sept. 05 Sept. 05 Signal peak ~0. 06 photons/s Single 50 m sampled region Background after 100 s count time <0. 001 photons/s 23 23

Outline • • Background Medipix Tech-Transfer First results on detector properties Expectations for XRD applications First results of Medipix in XRD New EUREKA project “RELAXD” Conclusions RECFA Meeting, Sept. 05 Sept. 05 24 24

RELAXD High REsolution Large Area X-ray Detector Fully tiled X-ray imager need pitch adapter Gbit/s serial readout Innovation Project Funded RECFA Meeting, Sept. 05 Sept. 05 25 25

RELAXD Partners RELAXD Consortium • CANBERRA Olen, Belgium • IMEC Leuven, Belgium • NIKHEF Amsterdam, Netherlands • PANalytical as Penholder: Almelo, Netherlands RECFA Meeting, Sept. 05 Sept. 05 26 26

The Future: Medipix 2 tiling through-via etching wafer thinning 3 D stacking RECFA Meeting, Sept. 05 Sept. 05 27 27

Financials / Funding of RELAXD Cost & Subsidy – 2690 k. E total project ===================== – 1138 k. E PAN 60% funding => 683 k. E EZ – 922 k. E NIKHEF => 553 k. E EZ ===================== – 633 k. E CANBERRA ~50% funding => 331 k. E IWT – 0 IMEC funded by CAN mainly and also by PAN ===================== – Status: • approved in NL, already started since Sept 1 st • in the approval phase in Belgium • Jan ‘ 06 Eureka labelling RECFA Meeting, Sept. 05 Sept. 05 28 28

Meaning of RELAXD Relevance: PAN Detector Center CANBERRA Medipix 2 IMEC Detector chip production NIKHEF CMOS process (0. 25 m) Medipix + , ++ 0. 13 mu, 0. 09 mu CMOS …. Super-chip, >RELIABLE< Plus spin-offs RECFA Meeting, Sept. 05 Sept. 05 PANalytical (MCNC) Large® area Pixel intelligence CERN Various shapes&sizes PANalytical (+Canberra) 29 29

Conclusions portunity Observations to R & I & G (Research / Industry / Government) • Relevance of Collaborations R&I – Developments of high degree of complexity – high-tech products only possible together (good tech-transfer) – Money reflow into the special research groups – Spin-off activities improve processes in e. g. yield, stability, and performance of devices (with input from both, R&I) RECFA Meeting, Sept. 05 Sept. 05 30 30

Conclusions cont. portunity Observations to R & I & G (Research / Industry / Government) • Relevance of Funding – – Financial means of both, R&(medium sized) I, are limited Order of millions for a R&D project requires involvement of funding Improve compatitive strength of Europe Enabling technologies are essential and contribute to the benefit for the society RECFA Meeting, Sept. 05 Sept. 05 31 31