Reactive sputtering Some references on Ti N sputtering
- Slides: 8
Reactive sputtering • Some references on Ti. N sputtering models – Berg et al. J. Appl. Phys. 63 (1988) 887 – Larsson Vacuum 39 (1989) 949 • Some references on Ti. N sputtering for vacuum chambers by SLAC, BNL (also for KEKB) – Kennedy et al. Proc of PAC 1997 – He et al, Proc. of PAC 2001 – Todd et al, Proc. of PAC 2005 • Reference on properties of BNL coatings – He et al. Proc. of PAC 2003 Sergio Calatroni TS/MME 1
Metal sputtering (from P. Costa Pinto) The NEG thin film is obtained by ion bombarding a target made of inter twisted wires of titanium, zirconium and vanadium. The atoms of the target are then sputtered and deposited on the beam pipe walls. -U Kr+ Ti, Zr, V Kr+ beam pipe wall 3 mm wires of Ti, Zr and V Kr+ Kr+ Kr+ Before coating after coating Kr+ Kr+ Kr++ Kr Kr+ Kr+ Kr+ Sergio Calatroni TS/MME 2
Reactive sputtering Sergio Calatroni TS/MME 3
Composition control BNL results Theory Sergio Calatroni TS/MME 4
Magnetron sputtering setup at BNL (SLAC -> pure diode) • • • Ti 1 N 1 considered as best choice “Gold” colour (smooth surface) provides higher SEY/lower outgassing than “brown” colour (rougher surface) Composition control along length/cross section seen as the most difficult practical aspect Sergio Calatroni TS/MME 5
SPS prototype? (Drawing from G. Arduini) Sergio Calatroni TS/MME 6
LSS facility • • Chambers of diameter 130 mm or 156 mm could be coated in the LSS facility (length up to ~ 7 m) Modifications of the coating system are well understood (most hardware already available) Design and procurement/manufacturing of cathode and nitrogen distribution line are the main item and could take 2 -3 months Setup of coating parameters for operation at the chosen working point could be achieved in 1 month (FTE…) Sergio Calatroni TS/MME 7
SEM picture of standard coating (1. 3 x 10 -3 mbar, 150ºC) on copper SEM picture of high pressure coating (1 x 10 -1 mbar, 150 ºC) on copper Sergio Calatroni TS/MME 8
