QUASI CONFOCAL EXTENDED FIELD SURFACE SENSING Joseph COHENSABBAN
QUASI CONFOCAL EXTENDED FIELD SURFACE SENSING Joseph COHEN-SABBAN, Pierre-Jean CREPIN, Jérôme GAILLARD-GROLEAS STIL SA Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 - Email : stil. sa@wanadoo. fr Sciences et Techniques Industrielles de la Lumière
CONFOCAL IMAGING The « SINGLE POINT » viewing system S point source Confocal imaging consists in : 1) Imaging a point source S into a sharply focused point S’ 2) Reversely, imaging this sharply focused point S’ onto a tiny spatial filter S’’ spatial filter Such an optical setup is absolutely blind for all the space except for the sharply focused point S’. L S’ Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 - Email : stil. sa@wanadoo. fr Sciences et Techniques Industrielles de la Lumière
CONFOCAL IMAGING The Property of « Optical Sectioning » S S’’ S A’ B’ S’’ L L sharp focus position S’ A defocused specular object B defocused backscattering object Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 - Email : stil. sa@wanadoo. fr Sciences et Techniques Industrielles de la Lumière
« Z-axis » FIELD EXTENSION IN CONFOCAL IMAGING The SINGLE LINE viewing system S Polychromatic Point Source The field extension can be obtained by stretching the chromatic aberration of the focusing lens L. The new optical system is then the assembling of an infinity of purely confocal systems, one for each wavelength. S’’ Spatial filter Such a compound system is absolutely blind for all the space except for the sharply focused color coded segment [S’(l 1), S’(ln)]. L l 1 li ln Continuum of monochromatic images S’ (li) Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 - Email : stil. sa@wanadoo. fr Sciences et Techniques Industrielles de la Lumière
EXTENDED FIELD CONFOCAL IMAGING The property of PERFECT FOCUS The SINGLE LINE viewing system presents the unique property of « PERFECT FOCUS » over all the chromatic EXTENDED FIELD since at any given point of the axial field of view there is only one wavelength perfectly focused on the object, all the other wavelengths being absolutely inactive. L Extended field Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 - Email : stil. sa@wanadoo. fr Sciences et Techniques Industrielles de la Lumière
EXTENDED FIELD CONFOCAL SCANNING OPTICAL MICROSCOPY EF - CSOM AVOIDS THE Z-AXIS STEPPING PROCESS USED TO GENERATE CONFOCAL SLICES THAT ARE COLLECTED TO CREATE A PERFECTLY FOCUSED IMAGE AVOIDS THE TIME CONSUMING COMPUTER RECONSTRUCTION OF THE OBJECT IMAGE CAN PROVIDE HIGHLY ACCURATE 3 D SURFACE METROLOGY WHEN AN ADEQUATE SPECTRAL DECODING IS IMPLEMENTED Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 - Email : stil. sa@wanadoo. fr Sciences et Techniques Industrielles de la Lumière
EXTENDED FIELD CONFOCAL IMAGING 3 D SURFACE METROLOGY (1) 3 D SURFACE METROLOGY CAN BE ACHIEVED WHEN SUCCESSIVELY PERFORMING THE FOLLOWING STEPS. SPACE CODING By stretching the axial chromatic aberration of the illuminating beam SPACE DECODING By analysing the spectral content of the backscattered / backreflected beam Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 - Email : stil. sa@wanadoo. fr Sciences et Techniques Industrielles de la Lumière
EXTENDED FIELD CONFOCAL IMAGING 3 D SURFACE METROLOGY (2) S The confocal spatial filter limits the wavelengths bandwidth Dl to a narrow band centered on the wavelength li coming in perfect focus onto the object surface. Spectrometer Polychromatic Point Source Spatial Filter S’’(li) monochromatic image The spectral decoding is performed by the spectrometer (position of the return quasi monochromatic beam on the CCD linear array). I L Dl li l 1 l. I ln l Object Surface Continuum of monochromatic images S’ (li) S’ Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 - Email : stil. sa@wanadoo. fr Sciences et Techniques Industrielles de la Lumière
EXTENDED FIELD CONFOCAL IMAGING 3 D SURFACE METROLOGY (3) The system is volontarily rendered Quasi-Confocal by enlarging the Point Source and the Spatial Filter pinholes. I Consequently, the filtered bandwidth Dl is enlarged in order to enable a highly resolved post processing and to get 30000 resolved points along the color coded segment [S’(l 1), S’(ln)]. li l Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 - Email : stil. sa@wanadoo. fr Sciences et Techniques Industrielles de la Lumière
EXTENDED FIELD CONFOCAL IMAGING CHR 150 BLOCK DIAGRAM OPTOELECTRONIC CABINET Polychromatic light source Spectrometer Digital Signal Processing Fiberoptic coupler Analogic and digital outputs l 1 Fiberoptic link ln Optical pen Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 - Email : stil. sa@wanadoo. fr Sciences et Techniques Industrielles de la Lumière
EXTENDED FIELD CONFOCAL IMAGING CHR 150 OPTICAL PENS * With an optical fiber of 10 microns core diameter ** On specular surfaces. For scattering surfaces the maximum angular slope can reach 80 degrees Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 - Email : stil. sa@wanadoo. fr Sciences et Techniques Industrielles de la Lumière
EXTENDED FIELD CONFOCAL IMAGING CHR 150 SIGNAL OUTPUTS (1) MEASURING MODE : * Single Surface mode : - Intensity, Height : Both data are acquired simultaneously * Double Surface mode : - Intensity and height of the first surface - Intensity and height of the second surface - Thickness : calculated in real time acquired simultaneously Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 - Email : stil. sa@wanadoo. fr Sciences et Techniques Industrielles de la Lumière
EXTENDED FIELD CONFOCAL IMAGING CHR 150 SIGNAL OUTPUTS (2) Analog Signals : - 2 configurable outputs 0 - 10 V Digital Signals: - RS 232 serial link at 115200 bauds. - Birectionnal link used to : . transmit the measuring data to a PC. configure and drive the sensor from a PC Synchronization input and output : - 5 V TTL signals. Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 - Email : stil. sa@wanadoo. fr Sciences et Techniques Industrielles de la Lumière
EXTENDED FIELD CONFOCAL IMAGING CHR 150 Optical Sensor Optoelectronic Cabinet Optical pens Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 Sciences et Techniques Industrielles de la Lumière
CHR 150 Optical Sensor 80 µm depth of field optical pen Diamond machined Diffractive Germanium lens 3 D surface mapping Height measurement Photorealistic rendering Intensity measurement Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 Sciences et Techniques Industrielles de la Lumière
CHR 150 Optical Sensor 20 µm depth of field optical pen Diamond machined Diffractive Germanium lens 3 D surface mapping - Height measurement Profile extracted along the black line Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 Sciences et Techniques Industrielles de la Lumière
CHR 150 Optical Sensor 80 µm depth of field optical pen Holographic Transmission diffraction grating (Zn. Se) 3 D surface mapping Height measurement Photorealistic rendering Intensity measurement Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 Sciences et Techniques Industrielles de la Lumière
CHR 150 Optical Sensor 20 µm depth of field optical pen Groove top of a Holographic Transmission diffraction grating (Zn. Se) Groove top area Roughness component filtered with a 0. 04 mm cut-off Waviness component filtered with a 0. 04 mm cut-off Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 Sciences et Techniques Industrielles de la Lumière
CHR 150 Optical Sensor 80 µm depth of field optical pen CCD matrix area 3 D surface metrology of a CCD matrix area Surface waviness of the same CCD matrix area Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 Sciences et Techniques Industrielles de la Lumière
CHR 150 Optical Sensor 80 µm depth of field optical pen CCD matrix area 3 D surface metrology of a CCD matrix area Surface waviness of the same CCD matrix area Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 Sciences et Techniques Industrielles de la Lumière
CHR 150 Optical Sensor 80 µm depth of field optical pen Photogravure processed in LIGA technology Photorealistic rendering Intensity measurement 3 D surface mapping Height measurement Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 Sciences et Techniques Industrielles de la Lumière
CHR 150 Optical Sensor 80 µm depth of field optical pen Optical Waveguide 3 D surface mapping Height measurement Photorealistic rendering Intensity measurement Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 Sciences et Techniques Industrielles de la Lumière
CHR 150 Optical Sensor 350 µm depth of field optical pen Ball Grid Array (BGA) Zoom on one bumps line 3 D surface mapping Height measurement Profile extracted along the white line Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 Sciences et Techniques Industrielles de la Lumière
CHR 150 Optical Sensor 20 µm depth of field optical pen Field Emission Display flat screen 3 D surface mapping Height measurement Photorealistic rendering Intensity measurement Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 Sciences et Techniques Industrielles de la Lumière
CHR 150 Optical Sensor 20 µm depth of field optical pen Micro Opto Electro Mechanical System (MOEMS) 3 D surface mapping Height measurement Photorealistic rendering Intensity measurement Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 Sciences et Techniques Industrielles de la Lumière
CHR 150 Optical Sensor 20 µm depth of field optical pen Microlens array 3 D surface mapping - Height measurement Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 Sciences et Techniques Industrielles de la Lumière
CHR 150 Optical Sensor 300 µm depth of field optical pen Molded microlens 3 D surface mapping Height measurement Photographic representation Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 Sciences et Techniques Industrielles de la Lumière
CHR 150 Optical Sensor 300 µm depth of field optical pen Scratch on a Germanium lens 1 Extracted profile n° 2 2 3 3 D surface mapping Height measurement Extracted profile n° 3 Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 Sciences et Techniques Industrielles de la Lumière
CHR 150 Optical Sensor 80 µm depth of field optical pen Gold deposition on Alumina substrate 3 D surface mapping Height measurement Photorealistic rendering Intensity measurement Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 Sciences et Techniques Industrielles de la Lumière
CHR 150 Optical Sensor 80 µm depth of field optical pen Laser marking on a component packaging 3 D surface mapping Height measurement Profile extracted from the black line Photorealistic rendering Intensity measurement Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 Sciences et Techniques Industrielles de la Lumière
CHR 150 Optical Sensor 20 µm depth of field optical pen Paper 3 D surface mapping Height measurement Photorealistic rendering Intensity measurement Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 Sciences et Techniques Industrielles de la Lumière
CHR 150 Optical Sensor 350 µm depth of field optical pen Microwave Generator Gold Alumina 3 D surface mapping Height measurement Photorealistic rendering Intensity measurement Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 Sciences et Techniques Industrielles de la Lumière
THICKNESS MAPPING DUAL SURFACE ROUGHNESS MAPPING Polychromatic point source Advantages * * Spectrometer single side information pick-up purely optical measurement very fast very accurate White light l 1 Roughness of S 2 Thickness mapping : e=e(x, y) l 2 S 1 S 2 Dedicated software l 1 l 2 Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 - Email : stil. sa@wanadoo. fr Sciences et Techniques Industrielles de la Lumière
ABSOLUTE 3 D SURFACE MAPPING Advantages * * * Polychromatic point source thickness measurement mode single side information pick-up purely optical measurement very fast very accurate Spectrometer White light l 1 l 2 Reference Surface : S 1 Dedicated software Thickness mapping e =e (x, y) l 1 l 2 Object surface : S 2 = S ( x , y ) Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 - Email : stil. sa@wanadoo. fr Sciences et Techniques Industrielles de la Lumière
OPTICS MANUFACTURING QUALITY CONTROL Single Shot, FRONT and BACK SURFACES PICK-UP Polychromatic point source Advantages * * no need to reverse the lens purely optical measurement very fast very accurate Spectrometer White light l 1 Radiuses : R 1 R 2 Tilt, Centering diameter f Central thickness l 1 l 2 R 1 Dedicated software diameter f R 2 Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 - Email : stil. sa@wanadoo. fr Sciences et Techniques Industrielles de la Lumière
SINGLE SHOT SPHEROMETRY Advantages * * Polychromatic point source purely optical measurement no moving parts very fast very accurate Spectrometer White light l 1 l 2 z 2 (l 2) - z 1 (l 1) = R Spherical object Radius R C Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 - Email : stil. sa@wanadoo. fr Sciences et Techniques Industrielles de la Lumière
CONCLUSION Implementation of controlled axial chromatic aberration to CONFOCAL SCANNING OPTICAL MICROSCOPY opens new ways to the application fields of : * Perfect Focus Free Shape Surface Microscopy * Free Shape 3 D Surface Metrology The proposed optical setup is capable of giving both information simultaneously. Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46 th Annual Meeting - San Diego, CA 2 -3 August, 2001 STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone : 33 (0)4. 42. 39. 45. 85 - Télécopie : 33 (0)4. 42. 24. 38. 05 - Email : stil. sa@wanadoo. fr Sciences et Techniques Industrielles de la Lumière
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