Project Contact Information Professor Mongi Abidi 328 Ferris
Project Contact Information: Professor Mongi Abidi 328 Ferris Hall, The University of Tennessee Knoxville, TN 37996 -2100 Phone: (865) 974 -5454; Fax: (865) 974 -5459 abidi@utk. edu http: //imaging. utk. edu 1. Comparison of Microscopic Modalities for the 3 D Model Reconstruction of Nanodevices Optical 440 um 20 um AFM Range 5 um SEM Stereo 120 um 2. UTK IRIS Capabilities Related to Topic § The IRIS Lab has extensive expertise in data acquisition, sensor fusion, and applied computer vision. § In depth work has already been conducted with algorithms for LCSM and SEM microscopy in constructing 3 D models of varying types of samples. § Alignment and fusion of multi-modal data will be performed using familiar concepts such as registration, integration, and optimization techniques to create accurate 3 D models and measurements of target areas. LSCM Multifocus 3. Objectives and Technical Approach § Collect data from multimodal microscopes: atomic force (AFM) , scanning electron (SEM), and laser scanning confocal (LSCM). § Construct 3 D models using reconstruction algorithms developed for specific microscopy technologies. 4. Applications § Visualization of MEMS devices in 3 D with more information than any one microscopy technology alone can provide § Use for educating others on MEMS functionality by providing quality 3 D models to help in their understanding § Check accuracy of constructed models by reconstructing 3 D models of calibration samples where the ground truth is known § Inspection of MEMS devices, allowing designers to view a 3 D model of their sample and ensure that surface features are built to correct specifications in all three dimensions § Develop methods to fuse information from constructed 3 D models § Better determine structural and chemical compositions of MEMS by combining multimodal information
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