Portable Monitor for Airborne Particulates RMW 28 Justin

Portable Monitor for Airborne Particulates (RMW 28) Justin P. Black, Professor Richard M. White, and Dr. Mike G. Apte (LBNL) This project, funded by the California Air Resources Board and the California Energy Commission, entails research leading to a portable, compact monitor for airborne particles that will incorporate MEMS technology and measurement principles first demonstrated in an internally funded project at the Lawrence Berkeley National Laboratory. © 2006 University of California Prepublication Data Spring 2006

Conceptual Block Diagram of Particulate Monitor The proposed monitor will employ: ¨ the deposition of particulates from a sample stream onto a piezoelectric crystal by means of thermophoresis ¨ determination of the mass deposited by measuring the resonant frequency shift of the crystal ¨ simultaneous determination of the nature of the particulates from the absorption characteristics of the deposited film by the use of infrared and ultraviolet diode light sources and photodetectors © 2006 University of California Schematic of monitoring system (lid not shown) Air inlet Thermophoretic wires 1 cm FBAR chips Prepublication Data Spring 2006 Air flow

Particulate Detection with LBNL Prototype Film (central trace) deposited on 1 cm diameter quartz crystal microbalance (LBNL). Particulate detection versus time (LBNL) 1 cigarette every 4 hr in environmental chamber (20 m 3) © 2006 University of California Prepublication Data Spring 2006

FBAR Process Flow – Fabricated Device © 2006 University of California Prepublication Data Spring 2006

Real-Time Detection of Particles © 2006 University of California Prepublication Data Spring 2006

Characterization of Thermophoretic Precipitator © 2006 University of California Prepublication Data Spring 2006

FBAR Sensor Oscillator Circuitry © 2006 University of California Prepublication Data Spring 2006

Particle Monitor Packaging © 2006 University of California Prepublication Data Spring 2006