Plasmonique intgre pour circuits photoniques haute densit Mickal

Plasmonique intégrée pour circuits photoniques à haute densité Mickaël Février, Lukas Halagacka, Matthias Grangier, Yida Wen, Philippe Gogol, Abdelhanin Aassime, David Bouville, Navy Yam, Robert Megy, Béatrice Dagens Coll: LNIO (UTT) et CEA-LETI B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013

Integrated plasmonic : why ? Complex circuits Efficient devices Optical source Sensor area Optical detector Isolator Circulator µfluidic channel Optical interconnects, optical circuitry, nanoantennas Isolators, circulators Integrated bioplasmonic sensor Specific functions, miniaturized functions Efficient excitation Spatial separation of « active function » and excitation/detection system Principle: enhanced properties thanks to nanostructuration and guiding effects B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013 2

Outline Gold nanoparticles SOI waveguide • Integrated plasmonic : why ? • State of the art • Localized surface plasmon chains • SOI - LSP chain interfacing • From long to short plasmonic chains • Back to waveguide coupling • Chain mode harmonics • Application to biosensing B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013 3

• Integrated plasmonic : why ? • State of the art • Localized surface plasmon chains • SOI- LSP chain interfacing • From long to short plasmonic chains • Back to waveguide coupling • Chain mode harmonics • Application to biosensing State of the art : interfacing SOI and plasmonic waveguide Butt-joint coupling Chen et al, Opt. Lett. , 31, 2133, 2006 Tian et al, APL, 95, 013504, 2009 • reflexions losses Briggs et al, Nano. Lett. , 10, 4851, 2010 • Coupling efficiency between 15% and 30% B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013 4

• Integrated plasmonic : why ? • State of the art • Localized surface plasmon chains • SOI- LSP chain interfacing • From long to short plasmonic chains • Back to waveguide coupling • Chain mode harmonics • Application to biosensing State of the art : interfacing SOI and plasmonic waveguide Evanescent coupling Sederberg et al, APL 96, 121101, 2010 • Reduced reflections Delacour et al, Nano. Lett. , 10, 2922, 2010 • Coupling efficiency: 60% to 70% B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013 5

• Integrated plasmonic : why ? • State of the art • Localized surface plasmon chains • SOI- LSP chain interfacing • From long to short plasmonic chains • Back to waveguide coupling • Chain mode harmonics • Application to biosensing State of the art : localized surface plasmons nanoparticles deposited on a waveguide Bragg grating made of metallic nanoparticles Quidant et al, PRB 69, 085407 (2004) • successive metallic NP: correlated excitation through underlying dielectric waveguide (like in Bragg grating) • but no direct coupling between NP B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013 6

• Integrated plasmonic : why ? • State of the art • Localized surface plasmon chains • SOI- LSP chain interfacing • From long to short plasmonic chains • Back to waveguide coupling • Chain mode harmonics • Application to biosensing Localized surface plasmon (LSP) chains Plasmonic resonance generated by an electromagnetic excitation in a metallic nanoparticle (subwavelength dimension) Excited particle= oscillating dipole Near field excitation of the nearest particle: electromagnetic energy propagation Simsek, Optics Express , 18, 1722, 2010 Plasmonic resonance controlled by the size, shape, position of nanoparticles B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013 7

• Integrated plasmonic : why ? • State of the art • Localized surface plasmon chains • SOI- LSP chain interfacing • From long to short plasmonic chains • Back to waveguide coupling • Chain mode harmonics • Application to biosensing y ed Ellipsoidal MNP polarisability Response of MNP to electromagnetic field depends on polarisability a (for isolated MNP or for MNP assembly) Polarisability a includes static response (dielectric cstt, shape of the ellipsoid) z em x But also radiative effects (dimensions of the NP with respect to wavelength, retardation effects, …) with (ellipse semi-axis) B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013 8

• Integrated plasmonic : why ? • State of the art • Localized surface plasmon chains • SOI- LSP chain interfacing • From long to short plasmonic chains • Back to waveguide coupling • Chain mode harmonics • Application to biosensing Ellipsoidal MNP polarisability a is sensitive to MNP environment, shape and dimensions ax=40 nm, az=15 nm Polarisability (imag part) ay= 40 110 nm Eext y em z ay x ed B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013 9

• Integrated plasmonic : why ? • State of the art • Localized surface plasmon chains • SOI- LSP chain interfacing • From long to short plasmonic chains • Back to waveguide coupling • Chain mode harmonics • Application to biosensing (LSP) chains design Model “Couple Dipole Approximation” (in homogeneous medium) • each nanoparticle = one point, with polarisability a • radiative losses, NP geometry, gold index (Drude model) • long and short distance interaction Weber et al, PRB, 70, 125429, 2004 Koenderink et al, PRB, 74, 033405, 2006 P: dipolar moment E: external excitation α: polarisability ω: pulsation d: interparticle distance Contribution of other MNP 1/r, 1/r² and 1/r 3 interactions Gives the excitation profile along the finite chain (|pn|²~dissipated ohmic power) Defines collective oscillation of chain dipoles of the infinite or finite chain : eigenmodes (En(ext)=0) in homogeneous medium: dispersion curve B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013 10

• Integrated plasmonic : why ? • State of the art • Localized surface plasmon chains • SOI- LSP chain interfacing • From long to short plasmonic chains • Back to waveguide coupling • Chain mode harmonics • Application to biosensing (LSP) chains modelling (in homogeneous medium) Dispersion curves of the infinite chain : Dispersion curves of the finite chain : 20 MNP chain in homogeneous media B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013 11

• Integrated plasmonic : why ? • State of the art • Localized surface plasmon chains • SOI- LSP chain interfacing • From long to short plasmonic chains • Back to waveguide coupling • Chain mode harmonics • Application to biosensing Designed and realized device • • Design: analytical and then FDTD models Telecom wavelength, TE mode: ellipsoidal shape E-beam lithography (alignment) + lift-off process 30 nm thick gold nanorods 2 ay~ 220 nm 2 ay 2 ax~ 80 nm 2 ax Localized surface plasmon excitation ? Chain = waveguide ? B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013 12

• Integrated plasmonic : why ? • State of the art • Localized surface plasmon chains • SOI- LSP chain interfacing • From long to short plasmonic chains • Back to waveguide coupling • Chain mode harmonics • Application to biosensing 20 MNP: transmission spectrum Transmission setup (IEF) • Resonance transmission minimum • « noise » : FP modes • FDTD simulation (experimentally fitted Drude model): 5 d. B extra losses Chain excitation ? Coupling mechanisms ? B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013 13

• Integrated plasmonic : why ? • State of the art • Localized surface plasmon chains • SOI- LSP chain interfacing • From long to short plasmonic chains • Back to waveguide coupling • Chain mode harmonics • Application to biosensing Near-field : tra. NSNOM (LNIO, UTT) B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013 14

• Integrated plasmonic : why ? • State of the art • Localized surface plasmon chains • SOI- LSP chain interfacing • From long to short plasmonic chains • Back to waveguide coupling • Chain mode harmonics • Application to biosensing (a) (b) (c) M. Fevrier et al. Nano Lett. 12, 1032, 2012 B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013 15

• Integrated plasmonic : why ? • State of the art • Localized surface plasmon chains • SOI- LSP chain interfacing • From long to short plasmonic chains • Back to waveguide coupling • Chain mode harmonics • Application to biosensing Dispersion curves of a chain in homogeneous medium and of the SOI waveguide FDTD calculation extracted dispersion curve of the 20 MNP chain on SOI Coupled modes (anticrossing) chain=waveguide B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013 16

• Integrated plasmonic : why ? • State of the art • Localized surface plasmon chains • SOI- LSP chain interfacing • From long to short plasmonic chains • Back to waveguide coupling • Chain mode harmonics • Application to biosensing From 5 to 50 MNP chain - transmission: similar spectral shape, wider for longer chains - much lower transmission at 5 MNP: cavity effect B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013 17

• Integrated plasmonic : why ? • State of the art • Localized surface plasmon chains • SOI- LSP chain interfacing • From long to short plasmonic chains • Back to waveguide coupling • Chain mode harmonics • Application to biosensing From 5 to 50 MNP chain Intensity profiles at transmission minimum - 20 and 50 MNP: clear waveguide coupling - 10 MNP: intermediate case - 10 to 50 MNP: same coupling length - 5 MNP: too short for re-coupling ; total energy transfer into the fourth MNP (<500 nm) B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013 18

• Integrated plasmonic : why ? • State of the art • Localized surface plasmon chains • SOI- LSP chain interfacing • From long to short plasmonic chains • Back to waveguide coupling • Chain mode harmonics • Application to biosensing Dipole excitation: experimental validation Very short chains (5 MNP) sufficient to implement plasmonic functions B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013 19

• Integrated plasmonic : why ? • State of the art • Localized surface plasmon chains • SOI- LSP chain interfacing • From long to short plasmonic chains • Back to waveguide coupling • Chain mode harmonics • Application to biosensing Record coupling length 2 Lc Lc ≈ 560 nm κ ≈ 2805 mm-1 Waveguides Coupling length (Lc) SOI/nanoparticle chain ≈ 560 nm (measure, Fevrier et al. Nano Lett. ) SOI/delocalized plasmonic waveguide ≈ 1 µm (measure, Delacour et al. Nano Lett. ) 2 dielectric waveguides ≈ 100 µm (theory, Sun et al. Optics Lett. ) B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013 20

• Integrated plasmonic : why ? • State of the art • Localized surface plasmon chains • SOI- LSP chain interfacing • From long to short plasmonic chains • Back to waveguide coupling • Chain mode harmonics • Application to biosensing LSP chain on Si 3 N 4 waveguide § Waveguide coupling § Longer coupling length in Si 3 N 4 waveguide case M. Février et al, submitted to JLT B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013 21

• Integrated plasmonic : why ? • State of the art • Localized surface plasmon chains • SOI- LSP chain interfacing • From long to short plasmonic chains • Back to waveguide coupling • Chain mode harmonics • Application to biosensing Excitation near or far of the light line Lc = λ/[2(neff antisym − neff sym)] B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013 22

Strong interaction due to device geometry Mode distortion, especially in dielectric waveguide M. Février et al, submitted to JLT B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013 23

• Integrated plasmonic : why ? • State of the art • Localized surface plasmon chains • SOI- LSP chain interfacing • From long to short plasmonic chains • Back to waveguide coupling • Chain mode harmonics • Application to biosensing Excitation up to « non guided » mode Low guiding in Si 3 N 4 Antisymmetric supermode with index higher than material index M. Février et al, submitted to JLT B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013 24

• Integrated plasmonic : why ? • State of the art • Localized surface plasmon chains • SOI- LSP chain interfacing • From long to short plasmonic chains • Back to waveguide coupling • Chain mode harmonics • Application to biosensing Excitation up to « non guided » mode appears on transmission curve B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013 25

• Integrated plasmonic : why ? • State of the art • Localized surface plasmon chains • SOI- LSP chain interfacing • From long to short plasmonic chains • Back to waveguide coupling • Chain mode harmonics • Application to biosensing Guiding based on resonances and near-field coupling 1 rst Brillouin zone kb kb= 2 p d d=150 nm chain d SOI Spatial harmonics : - generated by chain periodicity - includes decreasing phase contribution - may be as intense as fundamental component B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013 26

• Integrated plasmonic : why ? • State of the art • Localized surface plasmon chains • SOI- LSP chain interfacing • From long to short plasmonic chains • Back to waveguide coupling • Chain mode harmonics • Application to biosensing Specific collective chain modes 1 rst et 2 nd Brillouin zones FDTD Strong excitation of spatial harmonics in chain waveguide 2, 56 1, 6 Heterodyne SNOM (LNIO, UTT) - -40 -30 A. Appuzzo, accepted for publication in Nano Letters -20 -10 0 Neff 10 20 30 B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013 40 27

• Integrated plasmonic : why ? • State of the art • Localized surface plasmon chains • SOI- LSP chain interfacing • From long to short plasmonic chains • Back to waveguide coupling • Chain mode harmonics • Application to biosensing Biochips : plasmonics waveguides Bio-plasmonics for molecular interaction with localized plasmons Possible detection in transmission Compatibility with further integration with “lab-on-chip” systems: thiols molecules grafting on gold; thiols can “capture” element to be detected Plasmonics response strongly modified by the presence of these elements (molecules, . . . ) SAM thiol/or or Silice Si 02 SAM silane / Si. O 2 B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013 28

Toward biosensing Calculation: chain of 5 gold nanoparticles coated with dielectric material. experiment Mickaël Février, et al, « Integration of short gold nanoparticles chain on SOI waveguide toward compact integrated bio-sensors, » B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013 Optics Express Vol. 20, Iss. 16, pp. 17402– 17409 (2012) 29

Conclusion and perspectives • Integration of localized plasmon waveguide on SOI demonstrated, at telecom wavelength • Several efficient excitation and propagation regimes identified • Very short chains (5 MNP) sufficient to implement plasmonic functions • Similar behaviours with Si. N guide (compatible with visible wavelength) Short chain = reduced losses, compactness Plasmonic= energy concentration (non-linear functions, sensing, …) Toward magneto-plasmonic (Au/Co/Au) B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013 30

Thanks for your attention B. Dagens, Journées thématiques Gd. R Ondes, Grenoble, 17 et 18 janvier 2013