Piezoelectric Al N Vibrating RF MEMS for Radio

Piezoelectric Al. N Vibrating RF MEMS for Radio Front-End Gianluca Piazza Project Number: APP 62 DARPA MTO CSAC Faculty Advisor: Prof. A. P. Pisano Towards a Single-Chip MEMS Radio • Use contour-mode Al. N resonators to replace existing off-chip and bulky components used in wireless communication devices • Tremendous impact in terms of form factor (5 X reduction), power saving, manufacturing costs (2 X reduction) and final integration with electronics Pierce Oscillator IF Filters RF Filters fc=223. 9 MHz Rx ~ 56 Ohm Q ~ 2, 400 In Air 10 μm • 3. 5 m. W at 2. 5 V supply, 0. 25 m CMOS • L(f) ~ -110 d. Bc / Hz at 10 k. Hz offset Contour-mode Al. N ring resonator shows very small motional resistance and high quality factor in air Circuit designe d by Justin Black fc=1. 94 GHz Rx~ 5 Ohm Q ~ 1, 000 In Air 8 Al. N width-extensional rectangular resonators were coupled in a low insertion loss ladder filter at 93 MHz Novel stacked 2 -port Al. N contourmode resonator solves feedthrough problem experienced by 1 -port contour-mode resonator and opens a promising path for low motional resistance, high-Q, GHz, contour-mode resonators • Po ~ -12 d. Bm • fo ~ 224. 1 MHz UCB contourmode Al. N ring resonator 224 MHz contour-mode Al. N ring resonator can be easily used in a standard Pierce oscillator circuit. The oscillator was experimentally demonstrated and showed very good phase noise performance © 2005 University of California Single FBAR-type resonators have been demonstrated in the GHz range with Q varying from 1, 000 to 2, 000. These resonators show the potential to demonstrate GHz filters next to contour-mode resonators 8 Al. N ring resonators were coupled in a low insertion loss ladder filter at 236 MHz 200 x 50 μm plate width-extensional mode fc=86. 1 MHz Q ~ 1, 700 Rx ~ 600 Ohm CF ~ 10 f. F Other CSAC Team Members: Philip Stephanou (APP 66) Carolyn White (APP 58) Prepublication Data Fall 2005