PHASED a Faster Smarter More Affordable Analysis Device
PHASED: a Faster, Smarter & More Affordable Analysis Device - Update U. Bonne, J. Detry, R. Higashi, K. Newstrom-Peitso, H. Pham, T. Rezachek and S. Swanson Honeywell Labs, Plymouth, MN 55441, USA ulrich. bonne@honeywell. com Definition: PHASED (= Phased Heater Array Structure for Enhanced Detection) presently integrates multi-stage pre-concentration, separation, flow sensing and detection of gas components on one chip. Project Objectives: Develop and demonstrate the operation of a PHASED sensor, via: - Thermophysical analysis and simulations - Design and assemble a setup to check out the individual components - Design and fabricate a preliminary version of PHASED, with PCB electronics - Design and fabricate an integrated version of PHASED-on-a-chip Acknowledgment: This work is supported by ORNL/Do. E Ulrich. bonne@honeywell. com
PHASED: Micro Gas Analyzer System Phased Heater Array Structure for Enhanced Detection Goal: Sensitivity <10 ppb, < 3 sec, ~ 1 in. 3, < 1 J/analysis, wireless output. Ulrich. bonne@honeywell. com
Multi-Stage. Physical PHASED: Pre-concentration Principle of Multi-Stage Pre-Concentr. Side Views of PHASED structure and Operation Cross section of PHASED structure Multi-stage release of analyte increases its concentration: ~100 -fold with 1 st stage ~100 x n-fold after n stages To Separator robert. higashi@honeywell. com
PHASED: Operation, Structure, Envisioned output Phased Heater Array Structure for Enhanced Detection Schematic Views of the Phased Heater Array with Individual Heaters, H 1, Hn, …. Hn-1, Hn, and a Thermal Conductivity Sensor, TC ulrich. bonne@honeywell. com
Thermal Modeling of PHASED (cont’d. ) Ulrich. bonne@honeywell. com
Thermal Modeling of PHASED (cont’d. ) Ulrich. bonne@honeywell. com
Thermal Modeling of PHASED (cont’d. ) burgess. johnson@honeywell. com
PHASED: Technical Progress • Simulations predicted: Speed, Separation, Flow control and # of Pre. Conc. Elements st • 1 gen. PHASED chips fabricated • Stat. film material survives 200 -250ºC in air Patterning demonstrated and Specific surface area ~800 m 2/g unaffected • Heater FET switch chips fabricated • 1 st gen. electronic circuit designed & built • Millisecond desorption response time feasible =600
PHASED: TC Detector Response Time PHASED TC Capability TC Sensor Length: 0. 03 cm Gas Velocity: 100 cm/s Response Time: < 1 ms PHASED Output: (t. R 100 ms) Resolution, t½~ t. R/R 3 ms Top View of Honeywell Microbridge Flow or TC Sensor Ulrich. Bonne@Honeywell. com
Thermal Modeling of PHASED (cont’d) Ulrich. bonne@honeywell. com
PHASED: Flow Control Ulrich. bonne@honeywell. com
PHASED Layout Proposed layout of 20 -Element Concentrator. Die: 7. 3 x 8 mm
PHASED Layout 20 Elements 100 mm Wafer robert. higashi@honeywell. com Honeywell Confidential and Proprietary
20 -Element Pre-Concentrator, Diff. TC, 20 -Element Separator Integrated Version of PHASED, Showing Sensors, Concentrator and Separator. robert. higashi@honeywell. com
PHASED: Progress with Chip Fabrication
PHASED: Progress with Chip Fabrication
PHASED: PCB w/Chip-PCBs Ulrich. bonne@honeywell. com
Performance Modeling of PHASED Ulrich. bonne@honeywell. com
Performance Modeling of PHASED (cont’d. ) Ulrich. bonne@honeywell. com
Predicted Output for Air Sample Analysis
Gas Chromatograph: Outputs of C 1 -C 3 in He k’ = (t. R - to) / to
PHASED: Simulated Outputs for C 1 -C 3 Gases in Air Ulrich. bonne@honeywell. com
PHASED: Simulated Outputs for C 1 -C 3 Gases in Air Ulrich. bonne@honeywell. com
Status of PHASED as of Jan. ‘ 2003 Conclusions: • Demonstrated: PHASED-I MEMS fabrication and flow control; operational demonstration is next • Operational feasibility risk reduction: Simulations, Materials, Fabrication: 1, 000 -10, 000: 1 -concentration gain, 15: 1 -Resolution, 3 -sec, 10 -ppb • Resolution: Adjust gas velocity for max. (=min. plate height) • Min. Time: Minimize film thickness w/o starving the capillary’s gasvolume MEMS Enablers Thin-film stationary phase enhances resolution and shortens analysis time Thin-film substrate reduces power MEMS enables integration GC components, multi-stage pre-con. & electr. injection Compatibility with Ne. SSI Challenges Most power is consumed by column temperature ramping Selectivity & peak ID; then pump and valve Ulrich. bonne@honeywell. com
PHASED Flow Calibration
- Slides: 26