Phase Transformations Thermodynamics of CVD ByeongJoo Lee POSTECH

Phase Transformations Thermodynamics of CVD Byeong-Joo Lee POSTECH - MSE calphad@postech. ac. kr Byeong-Joo Lee cmse. postech. ac. kr

Scope CVD 1. 2. 3. Too much changeable results depending on the condition Beyond Scientific Explanation for long time Process development has been mostly empirical Approach (by Nong Moon Hwang, KRISS/SNU) 1. How to define the driving force of CVD 2. Low pressure synthesis of Diamond 3. Charged Cluster Model in CVD References ▶ N. M. Hwang et al. , Diamond and Related Materials, 1 (1992) 191 -194. ; 3 (1993) 163 -167. ▶ N. M. Hwang et al. , J. Crystal Growth 135 (1994) 165 -171; 143 (1994) 103 -109; 160 (1996) 87 -97; 160 (1996) 98 -103; 162 (1996) 55 -68. Byeong-Joo Lee cmse. postech. ac. kr

Driving force of CVD Deposition - from N. M. Hwang, SNU ※ Example: Deposition of Silicon Si. H 4 + 2 Cl 2 = Si + 4 HCl Byeong-Joo Lee cmse. postech. ac. kr

Thermodynamic Paradox Diamond formation with simultaneous graphite etching in low pressure synthesis of diamond Byeong-Joo Lee cmse. postech. ac. kr

CVD Diamond - N. M. Hwang et al. , J. Crystal Growth 162, 55 (1996) Diamond deposited on silicon substrate Soot deposited on the iron substrate Byeong-Joo Lee cmse. postech. ac. kr

CVD Si - N. M. Hwang et al. , J. Crystal Growth 218, 27 (2000) Byeong-Joo Lee cmse. postech. ac. kr

CVD Si Nanowire - N. M. Hwang et al. , J. Crystal Growth 218, 33 (2000) Byeong-Joo Lee cmse. postech. ac. kr

Nucleation of clusters in gas phase - Diamond/Graphite The nucleation ratio is very sensitive to the variation of the surface energy ranging from 1010 to 10 -6 with σdia = 3. 7 and 4. 1 J/m 2 at 1200 K and σgra = 3. 1 J/m 2 → There must be some factor that modifies the surface energy of diamond → Creation of the Charged Cluster Model Byeong-Joo Lee cmse. postech. ac. kr