PEEM III Endstation Design Review Endstation Layout Support
- Slides: 19
PEEM III Endstation Design Review • • Endstation Layout Support System Vessel Magnetic Shielding
PEEM III Endstation Design Review Endstation Layout – Sector 11
PEEM III Endstation Design Review Endstation Layout
PEEM III Endstation Design Review Microscope Sample Prep and transfer General HV – UHV in Sample and Mirror Sections < 2 x 10 -7 Gauss AC Field Nanometer Scale Stability. Sample to Optics “Easy” access to internal components
PEEM III Endstation Design Review Microscope - Details Fiber-Optic Laser 5 -Axis Sample Manipulator Separator Replacement Optics Internal Support UHV Sub. Chamber 90 degree Optics and Mirror CCD Cameras
PEEM III Endstation Design Review Support System High stiffness - vibration isolated internal support • Semi-kinematic mounting • Epoxy-granite filled base • Visco-elastic damping • Isolated chamber and external components
PEEM III Endstation Design Review Support System - Assembly Install/Align base stand with visco-elastic damping pads Install/align filled base • Side mounting pads for jacks/ball plates Mount internal table support legs and align fiducialized table (or plate) Install/align struts and chamber
PEEM III Endstation Design Review Vacuum Vessel
PEEM III Endstation Design Review Vacuum Vessel - Details HV required – UHV desirable SS plate weldment Differentially pumped, double o-ring, window frame to lid seal “Standard” conflat ports
PEEM III Endstation Design Review UHV Sub-Chamber - Details Aluminum conductance limited UHV-HV subchambers • O-Ring base/lid seal • Glass viewing window • Be-Cu sheet interface
PEEM III Endstation Design Review UHV Sub-Chamber - Details
Table 5. Gas loading on the Main Peem 3 chamber and pressure after 100 hours with 10" OD tee pumping system, 800 l/s ion pump + 1000 l/s turbo Main PEEM 3 vacuum tank Outgassing rate 100 hrs Area Gas load fraction torr l/s/cm^2 torr l/s % Al tank 1. 00 E-10 33500 3. 35 E-06 4 Mu metal 1. 00 E-10 203225 2. 03 E-05 27 Al optic table 1. 00 E-10 5000 5. 00 E-07 1 Separator magnet 1. 00 E-10 3500 3. 50 E-07 0 Epoxy Castal E 301 KT, RT 75 2. 56 E-07 173 4. 43 E-05 59 kapton wires 1. 00 E-09 2000 2. 00 E-06 3 Viton O-ring double (cm) 3. 00 E-10 300 9. 00 E-08 0 Viton O-ring 20 KF 40(cm) 1. 80 E-08 251 4. 52 E-06 6 Total outgas rate Main tank pump l/s Pressure in main tank torr 7. 54 E-05 torr l/s 880. 95 8. 56 E-08 torr
Schematic arrangement of Peem 3 pumping for UHV sub-section and main tank Cu/Be rolled sheet Hole for electrons Main Pumping Tee Mu metal Stove Pipe Main Pumping Adaptor UHV Pump Tee Turbo UHV subchamber Window Valve UHV Pump bellows Ion Pump 2 Main microscope tank Ion Pump 1 Main Pumping Bellows
Table 7. Gas loading on the UHV sub-chamber and pressure after 100 hours with 8" OD tee pumping system and 800 l/s ion pump. Pressure in main tank = 8. 5 e-8 torr. Sub UHV chamber Al sub chamber tank Lenses Ceramic Sample manipulator Viton O-ring (cm) baked Box 20 x 20 cm - 1/2" Al plate with viton O ring seals Outgassing rate 100 hrs Area Gas load torr l/s/cm^2 1. 00 E-10 5. 00 E-10 2. 30 E-10 3. 00 E-10 cm^2 2400 180 400 240 Total outgass rate Leaks from main tank 25 um gaps in overlap sleeve walls fraction torr l/s 2. 40 E-07 9. 00 E-08 4. 14 E-08 9. 20 E-08 7. 20 E-08 % 36 14 11 81 area cm^2 length cm 5. 35 E-07 Conductanc e l/s 0. 25 1. 2 1. 12038 0. 0314 0 0. 36688 (2 x 4" and 3 x 1. 5" sleeves) 2 mm Aperture for electrons total leak conductance Gas load of leak torr l/s Total gas load UHV sub-ch pump l/s P in UHV subcham torr 1. 48726 l/s 1. 27 E-07 19 6. 63 E-07 100 269. 65 2. 46 E-09 l/s torr
PEEM III Endstation Design Review Magnetic Shielding
Magnetic Shielding requirements - require < 2 x 10 -7 Gauss AC -AC field on the floor of +-0. 3 m. Gauss (1 Hz) - Need attenuation of ~ 2500 - Crude cylinder model indicate -2 layers attenuate ~1600 -3 layers attenuate ~ 26000 -Better calculation by Amuneal suggest 3 layer attenuation ~ 7000 -Thickness of shield = 3 mm for mechanical rigidity - Shield spacing = 25 mm – as large as possible given space constrains -Degaussing of inner shield with AC and internal coils Model of mu metal shields with Vacuum chamber removed Magnetic field at Peem 3 location
PEEM III Endstation Design Review Magnetic Shielding 3 Concentric boxes with ~ 1’’ gap Assembled from outside – in Separated with aluminum spacers/handle mounts PEM fasteners @ ~3. 5” spacing No penetrations > 5 diameters in critical areas - tubulations ~ 3 diameters in 2 pump sections
PEEM III Endstation Design Review Magnetic Shielding Tubulation Details
PEEM III Endstation Design Review The End (Hopefully)
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