OrganicInorganic thin film multilayer on polymer films for

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED • Presented by: Jung Cho Flex-e Materials AIMCAL R 2 R Conference

Contents l Introduction Organic/Inorganic thin film multi-layer on polymer films for rollable OLED l OLED Structures l Markets l Technology l Fabrication Process • Presented by: Jung Cho Flex-e Materials l Evaluation (Microstructure & etc) l Summary AIMCAL R 2 R Conference

Introduction Organic/Inorganic thin film multi-layer on polymer films for rollable OLED Foldable [Merit of Rigid OLED Display] Rollable • Presented by: Jung Cho Flex-e Materials [OLED Display : Rigid Flexible ] • Cheap product cost • Light & unbreakable materials • Mass production • Easy to handle (folding & rolling) • Free size & Large area display AIMCAL R 2 R Conference • Free shape (rounding type)

Introduction Curved & Bendable Terms Stretchable Organic/Inorganic thin film multi-layer - Random change - Simple structure - Periodically transformation - Bio-medical insertion - Large area shaping - Easy displacement on polymer films for rollable OLED Applications Benefits Foldable & Rollable • Presented by: Jung Cho Flex-e Materials - Exclusive design - Increased visible immersion - High reslolution - High portability - Unlimit from phone to tablet - Simple installation (rollable) - Realized free form-factor - Multi-folding - Customized display AIMCAL R 2 R Conference

Markets Market size of foldable phone • • Galaxy X series : 8. 94 inch out-folding type Y 2016 ~ Launch to Curved (LG signature TV) Organic/Inorganic thin film multi-layer on polymer films for rollable OLED Huawei Mate X : 8. 4 inch 4 K in-folding type (dual display, fingerprint) • Market trends of Display Type Y 2020 ~ Dominant market to Foldable Display (12 ~ 14 inch Tablet) Y 2025 ~ established to Rollable Display (Signage & Public Display) Apple : plastic display (under testing) • Presented by: Jung Cho Flex-e Materials Rollable Foldable AIMCAL R 2 R Conference (Citation : HIS Market 2016)

Flexible OLED Structure Protection layer Organic/Inorganic thin film multi-layer on polymer films for rollable OLED Cover Plastic Color Filter Front Glass OLED (RGB) Oxide TFT Back Glass Cover Plastic Sputter layer Touch Film Flexible Color Filter Encapsulation Barrier Film WOLED + MOx TFT Substrateby: (PI Film) • Presented Jung Cho Carrier Film Flex-e Materials Monomer layer FEM Sputter layer Film Substrate Anti-reflection [Requirements of Products] • Degrees of Water vapor transport ratio as same as glass(OLED+O 2 = Degradation) : 10 -4 ~ 10 -6 g∙cm/day • Degrees of transmittance as same as glass : PET 90% ↑, COP 92% ↑ AIMCAL R 2 R Conference • Degrees of Anti-reflection ratio : reflectance 1. 0% ↓

Flexible OLED Process PET - Curl protection films before lift off glass - 188 micro PET film - 3 ~ 10 g adhesive properties Organic/Inorganic thin film multi-layer on polymer films for rollable OLED Adhesive (weak) Barrier Encapsulation OLED Oxide TFT Polyimide • Presented by: Jung Cho Flex-e Materials Glass weak to attack from water vapor or oxygen ITO Si. O 2 PC, COP or PET film - Enhanced barrier properties after glass remove - Transparent EMI shield properties - Properly adhesiveness between PI and ITO layer AIMCAL R 2 R Conference

Key Technology ▶ Main : SIO 2 and other various oxides sputtering of single or mulyi-layer using plasma & vacuum technology ▶ Key technology : - Low temperature sputtering (Polymer Film base) Organic/Inorganic thin film multi-layer on polymer films for rollable OLED - Gas distribution system (Optical & electrical properties decides) - Detail thickness Uniformity Controls (Max 1, 600 mm width within 3%) - Roll to Roll tension control (minimize film damage ) - Adhesion promotion between substrate film and coating layer - Optical design and simulation technology by Mclaud • Presented by: Jung Cho Flex-e Materials [R 2 R sputter system] AIMCAL R 2 R Conference

Key process Conventional Process FEM Process Vacuum ter targe t wet Coating t Spu tt targ er et tar e targ t Repeat Drying Oxide/Nitride Under coating PET film tter Spu et targ • Presented by: Jung Cho Defect Scratch Flex-e Materials Inclusion monomer Oxide/Nitride Under coating PET film Cover coat Sp ut e t tar r ge t Sput t Spu ter tar er ge Spu tte r get Organic/Inorganic thin film multi-layer on polymer films for rollable OLED Oxide/Nitride monomer Oxide/Nitride Under coating PET film AIMCAL R 2 R Conference Sput ter targe t tter Spu et targ

High Barrier structure Over-all Structure Organic/Inorganic thin film multi-layer on polymer films for rollable OLED PET • Presented by: Jung Cho Flex-e Materials Layer 1 Layer 2 Layer 3 Layer 4 H/C Layer 5 AIMCAL R 2 R Conference

High Barrier Structure FEM Inorg. /Org. /Inorg. Competitor Barrier Film Organic/Inorganic thin film multi-layer on polymer films for rollable OLED K-PET (12. 5㎛) PET(12㎛)+Al(30㎚) Ny (25㎛) Structure (SEM) AL foil (7㎛) PET(12㎛)+Al(30㎚) LLDPE (50㎛) • Presented by: Jung Cho Flex-e Materials OTR* (cc/㎡day) below 5 X 10 -5 5 X 10 -3 WVTR* (g/㎡day) 5 X 10 -4 5 X 10 -2 AIMCAL R 2 R Conference * OTR (Oxygen Transmission Rate), WVTR (Water Vapour Transmission Rate)

Reliability Test Results 1. Spikes : plastic & handling 2. Scratches : handling 3. Pits – arcing, possible contamination of plastics 4. Barrier cracking : local adhesion issues (pre-contamination Organic/Inorganic thin film multi-layer on polymer films for rollable OLED • Presented by: Jung Cho Flex-e Materials AIMCAL R 2 R Conference

Functional Layers for Flexible OLED Nanostructured oxide Organic/Inorganic thin film multi-layer on polymer films for rollable OLED Oxide layer PET oxide polymer multi layer barrier film Ø Transparent Flexible OLED (under development) Ø Permeation barrier degree B • UBPresented by: Jung Cho: 10 ~10 g/m /day (encapsulation properties) A S R Ø Silver nanowire type capacitive touch panel systems with COP substrates Flex-e Materials R T S Out A R Structure of multi-functional barrier encapsulation films T O U C H R A T E -2 I E R -5 2 Ø Anti-reflection layers by multi-layer sputter coating (5 or 7 -layers) T: 94. 5%, R: 0. 13%, Haze 0. 65% (substrates : PET) Ø Additional anti-finger, anti-smuggles or anti-corrosion coatings AIMCAL R 2 R Conference

Permeation Blocking Mechanism Environmental Test Water or Oxygen transportation mechanism Water penetration Organic/Inorganic thin film multi-layer on polymer films for rollable OLED Competitor Inorganic Wet coating Inorganic FEM Inorganic Monomer Inorganic <Competitor> • Presented by: Jung Cho Flex-e Materials <FEM> Vacuum coating monomer Inorganic AIMCAL R 2 R Conference 50 nm

Optical properties Slide Header T R T (%) L* a* b* Haze R (%) L* a* b* PET PC/PMMA COP 90. 2 96. 1 -0. 02 0. 26 0. 46 9. 41 36. 7 -0. 78 0. 43 89. 46 95. 77 -0. 01 0. 49 0. 14 10. 93 39. 46 -0. 5 -1. 7 91. 6 96. 6 0. 01 0. 13 0. 32 9. 21 36. 3 -0. 49 -0. 7 Organic/Inorganic thin film multi-layer on polymer films for rollable OLED WVTR (g/m 2·day) • Presented by: Jung Cho Flex-e Materials OTR (g/m ·day) 2 PET 5. 6 14. 1 PC/PMMA 4. 2 13. 6 COP 2. 1 12. 0 AIMCAL R 2 R Conference

Barrier Properties Organic/Inorganic thin film multi-layer on polymer films for rollable OLED • Presented by: Jung Cho Flex-e Materials AIMCAL R 2 R Conference

Flexibility & Mechanical properties Slide Header ITO Film Organic/Inorganic thin film multi-layer on polymer films for rollable OLED Bending/Rolling Axis ITO Film Bending Axis • Presented by: Jung Cho Flex-e Materials Tensile strength : 231 MPa Elongation : 65 % AIMCAL R 2 R Conference Tensile strength : 159. 3 MPa Elongation : 82 %

Inorganic layer Configuration Thickness Control od Silicone Oxide for low surface roughness < Si. Ox (1) > < Si. Ox (2) > < Si. Ox (3) > Organic/Inorganic thin film multi-layer on polymer films for rollable OLED Optical Properties of Silicone Oxide Sample No. 투 과 율 반 사 율 T (%) L* a* b* R (%) L* a* b* • Presented by: Jung Cho Si. Ox (3) 90. 77 89. 15 Flex-e Materials 96. 32 95. 64 Si. Ox (1) Si. Ox (2) 90. 04 96. 01 0. 49 0. 41 10. 45 38. 64 -2. 51 1. 57 1. 07 1. 22 9. 57 37. 06 -5. 49 -0. 5 0. 91 2. 33 9. 86 37. 6 -5. 39 2. 74 AIMCAL R 2 R Conference

Surface roughness Organic/Inorganic thin film multi-layer on polymer films for rollable OLED Surface Characteristics : Normal Surface Characteristics : After Treatment • Presented by: Jung Cho Flex-e Materials AIMCAL R 2 R Conference

Summary 1. Roll-to-Roll coating Barrier Film by 500 mm wet & dry coating systems - Formation of Inorganic / Organic / Inorganic multi-layer with vacuum conditions Organic/Inorganic thin film multi-layer on polymer films for rollable OLED - Surface roughness control and hydrophilic multi-layer condition of substrate to enhance moisture barrier property 2. Improvement of transmittance and optical characteristics - Since it is difficult to secure the optical characteristics as a basic process, it is possible to lower the reflectance Improved transmittance and other optical properties by coating the optical control layer on the opposite side of the • Presented by: Jung Cho - Developed non-yellowish barrier film by improving colors such as a * and b * Flex-e Materials barrier film 3. Development of multi-layer process technology - Monolayer high density thin film conditions to replace common wet organic coatings AIMCAL R 2 R Conference - Development of facility concept to coat wet and dry on-line at one time - Establishment of process to impregnate nano-particles finally after implementing multilayer film by dry process