New developments in vacuum system control HW SW

New developments in vacuum system control (HW, SW) Vacuum Technology Symposium CERN Geneva, March 2012 Ralf Funke Market Segment R&D and Analytics Oerlikon Leybold Vacuum Gmb. H, Germany

Agenda 1 Introduction – vacuum pumps meet automation 2 CRYOVISION – control and monitoring for COOLVAC cryopump systems 3 VACVISION – vacuum control at your fingertips 4 LEYASSIST – one PC software for all your vacuum control needs 5 COMBIVAC CM 52 – passive gauge controller from 10 -12 to 1000 mbar Page 2 Ralf Funke, Market Segment R&D and Analytics, OLV Germany

Agenda 1 Introduction – vacuum pumps meet automation 2 CRYOVISION – control and monitoring for COOLVAC cryopump systems 3 VACVISION – vacuum control at your fingertips 4 LEYASSIST – one PC software for all your vacuum control needs 5 COMBIVAC CM 52 – passive gauge controller from 10 -12 to 1000 mbar Page 3 Ralf Funke, Market Segment R&D and Analytics, OLV Germany

1 - Introduction Vacuum pumps meet automation Vacuum pumps are clearly a rather “mechanical” tool for industrial and scientific applications when considering their historical background. First air pump (1655) First Leybold pump (1906) World‘s first mag-lev turbo Leybold TMP 560 M (1975) However: Nowadays, vacuum pumps are more than just mechanical devices. Page 4 Ralf Funke, Market Segment R&D and Analytics, OLV Germany

1 - Introduction Vacuum pumps meet automation Today complex plants as well as small dedicated pumping system both in research and industry require analogue and or digital control: § Analogue I/O § Digital I/O § Field bus interfaces (Profibus, RS 485, USB, Ethernet/IP, …) These I/O and interface option are already widely available today. However, these control options operate on the “device level“, which means users also need to have control units one level above – the “control level”. Oerlikon Leybold Vacuum now does not only provide control options on the device level, but also on the control level – both in terms of hardware and software! Page 5 Ralf Funke, Market Segment R&D and Analytics, OLV Germany

Agenda 1 Introduction – vacuum pumps meet automation 2 CRYOVISION – control and monitoring for COOLVAC cryopump systems 3 VACVISION – vacuum control at your fingertips 4 LEYASSIST – one PC software for all your vacuum control needs 5 COMBIVAC CM 52 – passive gauge controller from 10 -12 to 1000 mbar Page 6 Ralf Funke, Market Segment R&D and Analytics, OLV Germany

2 – CRYOVISION Control and monitoring for COOLVAC cryopump systems Control and monitoring modules for COOLVAC cryo pump systems CRYOVISION Page 7 Ralf Funke, Market Segment R&D and Analytics, OLV Germany COOLVAC 10. 000 i. CL with COOL. DRIVE

2 – CRYOVISION Control and monitoring for COOLVAC cryopump systems The new control and monitoring system features … § COOLVAC i. CL Plug and Play operation due to integrated COOL. DRIVE for control and monitoring of single and multiple cryo pump system configurations § Optional CRYOVISION touch panel display unit for easy and customer orientated control and monitoring of single and multiple cryo pump system configurations § Easy update of existing COOLVAC CL to COOLVAC i. CL cryo pump systems by exchanging electronic components in field possible. § Innovative communication concept to meet current and future trends for easy integration in customer equipment - Standard: RS 232 and PLC 24 VDC - Optional: Profi. Bus module to be connected to RS 232 § Simple and less complicate cabling between components for easy installation Page 8 Ralf Funke, Market Segment R&D and Analytics, OLV Germany

2 – CRYOVISION Control and monitoring for COOLVAC cryopump systems Current single COOLVAC CL system configuration LAN SC RS 232 connection SC - PS PS - PM CP - PS COOLVAC SC – System Controller COOLVAC PS – Power Supply Unit Supply voltage: 200 / 230 V; 50 / 60 Hz CP - CV Helium Supply Helium Return COOLPAK 6000 Page 9 Ralf Funke, Market Segment R&D and Analytics, OLV Germany COOLVAC 10. 000 CL

2 – CRYOVISION Control and monitoring for COOLVAC cryopump systems New single COOLVAC i. CL system configuration RS 232 connection Remote Control RS 232 / PLC Option: Profi. Bus CP - CV COOLVAC 10. 000 i. CL COOL. DRIVE Supply voltage: 200 / 230 V; 50/60 Hz Helium Supply Helium Return COOLPAK 6000 Page 10 Ralf Funke, Market Segment R&D and Analytics, OLV Germany

2 – CRYOVISION Control and monitoring for COOLVAC cryopump systems New single COOLVAC i. CL system configuration with CRYOVISION RS 232 connection CAN Bus Remote Control RS 232 / PLC Option: Profi. Bus CRYOVISION CP - CV COOLVAC 10. 000 i. CL COOL. DRIVE Supply voltage: 200 / 230 V; 50/60 Hz Helium Supply Helium Return COOLPAK 6000 Page 11 Ralf Funke, Market Segment R&D and Analytics, OLV Germany

2 – CRYOVISION Control and monitoring for COOLVAC cryopump systems Current multiple COOLVAC CL system configuration Page 12 Ralf Funke, Market Segment R&D and Analytics, OLV Germany

2 – CRYOVISION Control and monitoring for COOLVAC cryopump systems New multiple COOLVAC i. CL system configuration with CRYOVISION RS 232 connection CAN Bus Remote Control RS 232 / PLC Option: Profi. Bus CRYOVISION CP - CV Helium Supply Helium Return COOLPAK 6000 Page 13 Ralf Funke, Market Segment R&D and Analytics, OLV Germany COOLVAC 2. 000 i. CL COOL. DRIVE Supply voltage: 200 /230 V; 50/60 Hz at each single pump

2 – CRYOVISION Control and monitoring for COOLVAC cryopump systems Front side Display view (example) Rear side 24 VDC Cryo Bus RS 232 USB Ether Net Power connection 24 VDC via external power supply or CAN Cryo Bus COOLVAC control - control and monitoring of single pumps - control and monitoring of multiple pumps Page 14 Ralf Funke, Market Segment R&D and Analytics, OLV Germany

Agenda 1 Introduction – Vacuum pumps meet automation 2 CRYOVISION – control and monitoring for COOLVAC cryopump systems 3 VACVISION – vacuum control at your fingertips 4 LEYASSIST – one PC software for all your vacuum control needs 5 COMBIVAC CM 52 – passive gauge controller from 10 -12 to 1000 mbar Page 15 Ralf Funke, Market Segment R&D and Analytics, OLV Germany

3 – VACVISION Vacuum control at your fingertips • Universal controller for the control of a complete (U)HV system • Simple configuration by touch screen • Plug-and-play and self-explanatory handling • Front USB socket for data download and software updates • Support of 24 V uninterruptible power supply • Internal data logger and possibility to download data Page 16 Ralf Funke, Market Segment R&D and Analytics, OLV Germany

3 – VACVISION Vacuum control at your fingertips VACVISION – technical features • Powering of fore-vacuum pump (100 -240 V, 750 W) (fore-vacuum pumps with > 750 W are powered via separate „e-box“) • Control and monitoring of HV pump (e. g. turbopump) • Reading of 3 active gauges • Control of 5 valves (2 with position indicators + 3 without) • 4 digital and 4 analogue I/O connectors (e. g. for coolers, heating tapes, switching signals etc. ) • Ethernet connection for remote control and monitoring of parameters (OPC-Server / LABVIEW driver coming soon). • Internal logging and graphical display of measured parameters Page 17 Ralf Funke, Market Segment R&D and Analytics, OLV Germany

3 – VACVISION Vacuum control at your fingertips Both automatic and manual control of system Automatic mode, just start/stop and monitor Control of single components in the „Service Mode“ Page 18 Ralf Funke, Market Segment R&D and Analytics, OLV Germany

3 – VACVISION Vacuum control at your fingertips Internal logging with graphical display Graphical display of pump‘s parameters and pressure curves Alarm/warning list allows display and acknowledging of errors having occured Page 19 Ralf Funke, Market Segment R&D and Analytics, OLV Germany

Agenda 1 Introduction – Vacuum pumps meet automation 2 CRYOVISION – control and monitoring for COOLVAC cryopump systems 3 VACVISION – vacuum control at your fingertips 4 LEYASSIST – one PC software for all your vacuum control needs 5 COMBIVAC CM 52 – passive gauge controller from 10 -12 to 1000 mbar Page 20 Ralf Funke, Market Segment R&D and Analytics, OLV Germany

4 - LEYASSIST One PC software for all your vacuum control needs LEYASSIST is Oerlikon Leybold Vacuum’s latest concept to consolidate different vacuum components in just one easy-to-use PC software. § In the first step the following equipment will be supported: − DRYVAC: dry screw pump with variants from 450 m 3/h up to 5000 m 3/h (in combination with a roots pump) − VACVISION: stand-alone vacuum controller with a touch screen to control a complete high-vacuum system including control of gauges and pressure display § In the (not so far away) future it will also support − TURBOVAC: turbo molecular pumps − And even more components… Page 21 Ralf Funke, Market Segment R&D and Analytics, OLV Germany

4 - LEYASSIST One PC software for all your vacuum control needs Some screenshots to illustrate what is possible! Simple control of a turbo molecular pump: Page 22 Ralf Funke, Market Segment R&D and Analytics, OLV Germany

4 - LEYASSIST One PC software for all your vacuum control needs Some screenshots to illustrate what is possible! Monitor and plot parameters such as motor current, frequency, temperature…. Footnote Source: Text Page 23 Ralf Funke, Market Segment R&D and Analytics, OLV Germany

4 - LEYASSIST One PC software for all your vacuum control needs Some screenshots to illustrate what is possible! See your whole vacuum scheme controlled by the VACVISION LEYASSIST screen VACVISION display Page 24 Ralf Funke, Market Segment R&D and Analytics, OLV Germany

4 - LEYASSIST One PC software for all your vacuum control needs Some screenshots to illustrate what is possible! Monitor and set parameters of your DRYVAC screw pump. Execute commands Set frequency Read pump parameters Page 25 Ralf Funke, Market Segment R&D and Analytics, OLV Germany

Agenda 1 Introduction – vacuum pumps meet automation 2 CRYOVISION – control and monitoring for COOLVAC cryopump systems 3 VACVISION – vacuum control at your fingertips 4 LEYASSIST – one PC software for all your vacuum control needs 5 COMBIVAC CM 52 – passive gauge controller from 10 -12 to 1000 mbar Page 26 Ralf Funke, Market Segment R&D and Analytics, OLV Germany

5 – Combivac CM 52 Passive gauge controller from 10 -12 to 1000 mbar The new controller CM 52 of the COMBIVAC platform operates on: - channel 1 & 2 with Passive Pirani (TR 211 – 216) and - channel 3 with Bayard Alpert (IE 414) or Extractor (IE 514) sensors The new controller CM 52 is ideally suitable in : - measurement range 1*10 -12 - 1000 mbar - bakeable UHV/XHV systems - systems in radiation areas like particle accelerators - calibration laboratories Page 27 Ralf Funke, Market Segment R&D and Analytics, OLV Germany

5 – Combivac CM 52 Passive gauge controller from 10 -12 to 1000 mbar - Measurement range with Bayard-Alpert sensor IE 414 1*10 -11 - 1000 mbar Extractor sensor IE 514 1*10 -12 - 1000 mbar - 3 channel display (channel 1&2: TR 211 -16, channel 3: IE 414 or IE 514) - Interface capabilities RS 232/RS 485 or additionally with Profibus - - Sensor cables up to 100 meter length (upon request) - Plug and play installation - Wide range power supply (100 -240 V 50/60 Hz) with IEC 320 receptacle - No ventilation slots > no air pollution Page 28 Ralf Funke, Market Segment R&D and Analytics, OLV Germany

Thank you.